[Scan]
initial_time=2016-02-17T22:30:59
final_time=2016-02-17T22:31:20
ip_count=19
run=1032
dataset=9
scan=471
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=1.36512E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=1.9056E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=3.01993E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=4.32181E-10
mult1=-1.04003E-8
mult2=-2.77719E-9
rf_tmon=-5.43585E-3
rf_agc=3.3298E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.27041E-3
ql5_imon=1.58321E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.68483E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19978E1
lens5a_imon=1.98368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=3.06141E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05619E1
cs_ea1_imon=2.17056E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36843E0
lens1_imon=2.56803E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.97453E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0415E1
cs_ea2_imon=1.56178E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=3.01658E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=1.72842E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11181E1
os_restr1_imon=4.26697E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15453E1
os_ea1_imon=2.19711E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63734E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26921E0
cs_ionrep_imon=1.2712E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=3.27131E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.70115E-8
tplens_vset=1.4E-1
tplens_vmon=1.56121E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26878E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26142E1
iondef2_imon=1.59682E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.09298E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=2.02368E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74739E1
cs_ef2b_imon=3.13369E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8597E0
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71026E1
cs_ef2a_imon=3.17609E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08931E0
os_ef2alow_imon=-2.64409E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.51097E-1
os_ef2bup_imon=-5.42081E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10782E1
os_restr2_imon=3.53926E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.31309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01879E1
cs_anode2_imon=2.27913E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73881E1
iondef1_imon=1.07511E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68213E1
iondef4_imon=1.08955E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.10446E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82904E-1
olens1_imon=9.85347E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-2.095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47191E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.62876E-6
window_vset=0.0E0
window_vmon=1.80616E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.85979E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.13741E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.49678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.61877E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53253E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.58389E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07625E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64209E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30787E1
cs_fil1_imon=1.00606E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61764E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66316E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.86336E-2
os_fil2_imon=-2.86612E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81919E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.31008E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.10325E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22446E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31779E-3
inlet_lpb_pmon=1.98955E-1
chamber_ion_pmon=1.6979E-7
chamber_cvt_pmon=2.52093E-3
foreline_cvt_pmon=2.52093E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88746E-1
res40_imon=-2.65104E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16154E-1	-7.97796E-1	-9.13143E0	-9.14209E0	5.53131E-3	9.31978E-2	2.72886E1	-3.26573E1	-3.2639E1	2.67926E1	1.69798E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00021E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16464E-1	-7.97653E-1	-9.13126E0	-9.14211E0	5.26905E-3	9.30786E-2	2.73963E1	-3.26933E1	-3.26058E1	2.67668E1	1.6987E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16178E-1	-7.97796E-1	-9.13153E0	-9.14209E0	5.34058E-3	9.3174E-2	2.72856E1	-3.26543E1	-3.26148E1	2.6801E1	1.69656E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16035E-1	-7.97749E-1	-9.13153E0	-9.14187E0	5.36442E-3	9.29594E-2	2.73087E1	-3.26675E1	-3.26266E1	2.68082E1	1.69725E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.15916E-1	-7.97701E-1	-9.13126E0	-9.14199E0	5.60284E-3	9.32455E-2	2.73261E1	-3.26639E1	-3.2644E1	2.68088E1	1.69875E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.16369E-1	-7.97892E-1	-9.13122E0	-9.14211E0	5.45979E-3	9.30071E-2	2.72791E1	-3.27027E1	-3.26254E1	2.67932E1	1.70023E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.15988E-1	-7.97987E-1	-9.1316E0	-9.14223E0	5.55515E-3	9.31978E-2	2.72907E1	-3.26633E1	-3.26224E1	2.68146E1	1.69728E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-8.16107E-1	-7.97844E-1	-9.13177E0	-9.14197E0	5.76973E-3	9.2864E-2	2.73189E1	-3.2629E1	-3.26404E1	2.68304E1	1.6987E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.98661E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.16274E-1	-7.9782E-1	-9.13162E0	-9.14214E0	5.8651E-3	9.2864E-2	2.72564E1	-3.26603E1	-3.262E1	2.67808E1	1.69875E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99283E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.16107E-1	-7.97939E-1	-9.13153E0	-9.14192E0	5.53131E-3	9.30548E-2	2.7352E1	-3.26861E1	-3.26164E1	2.6795E1	1.69618E-7	2.52285E-3	2.52285E-3	6.32679E-3	1.99954E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.16131E-1	-7.97725E-1	-9.13162E0	-9.14199E0	5.93662E-3	9.30071E-2	2.72739E1	-3.26536E1	-3.26543E1	2.68112E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09665E0	-8.16345E-1	-7.97892E-1	-9.13155E0	-9.14195E0	5.84126E-3	9.31263E-2	2.73173E1	-3.26536E1	-3.26536E1	2.68208E1	1.69728E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.00325E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16631E-1	-7.97701E-1	-9.13148E0	-9.14202E0	5.67436E-3	9.30071E-2	2.7298E1	-3.27104E1	-3.26107E1	2.6804E1	1.69802E-7	2.51716E-3	2.51716E-3	6.30466E-3	2.00151E-1
1.7E1	1.5E1	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.16369E-1	-7.97629E-1	-9.13153E0	-9.14187E0	5.53131E-3	9.28879E-2	2.73225E1	-3.26506E1	-3.26272E1	2.67812E1					
1.8E1	9.2E1	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16393E-1	-7.97725E-1	-9.13169E0	-9.1419E0	5.96046E-3	9.33647E-2	2.73171E1	-3.26506E1	-3.26476E1	2.67848E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9917E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16607E-1	-7.97606E-1	-9.13131E0	-9.14202E0	5.84126E-3	9.30548E-2	2.73002E1	-3.26725E1	-3.26125E1	2.68028E1	1.69656E-7	2.51915E-3	2.51915E-3	6.32978E-3	1.97818E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16655E-1	-7.97534E-1	-9.13136E0	-9.1423E0	5.79357E-3	9.3317E-2	2.72815E1	-3.26938E1	-3.25959E1	2.68166E1	1.69802E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16584E-1	-7.97462E-1	-9.13155E0	-9.14214E0	5.81741E-3	9.31025E-2	2.73105E1	-3.26819E1	-3.26657E1	2.67879E1	1.69949E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09665E0	-8.16512E-1	-7.98011E-1	-9.1315E0	-9.14211E0	5.88894E-3	9.32217E-2	2.72675E1	-3.26505E1	-3.2622E1	2.67902E1	1.69653E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-8.16584E-1	-7.98011E-1	-9.13155E0	-9.1419E0	6.27041E-3	9.3174E-2	2.73881E1	-3.26142E1	-3.26878E1	2.68213E1	1.6979E-7	2.52093E-3	2.52093E-3	6.31779E-3	1.98955E-1