[Scan]
initial_time=2016-02-17T22:31:27
final_time=2016-02-17T22:31:47
ip_count=19
run=1032
dataset=9
scan=472
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.15916E-1
ql1_imon=1.36773E-8
ql2_vset=
ql2_vmon=-7.97629E-1
ql2_imon=1.92977E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=2.81394E-10
ql4_vset=
ql4_vmon=-9.14149E0
ql4_imon=4.2913E-10
mult1=-8.92163E-9
mult2=-2.71661E-9
rf_tmon=-5.32354E-3
rf_agc=3.2204E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=1.60563E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.71439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19622E1
lens5a_imon=1.98091E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05194E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.05442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05078E1
cs_ea1_imon=2.15178E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44105E0
lens1_imon=2.718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.61176E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.02126E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.72694E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.26823E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.19144E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.06956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.26424E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.26958E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.69572E-8
tplens_vset=1.4E-1
tplens_vmon=1.62521E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2623E1
iondef2_imon=1.60239E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02988E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.09032E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30497E0
ionrepsh_imon=2.022E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33976E1
lens5b_imon=2.17305E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86915E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06155E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11042E0
os_ef2alow_imon=-2.77087E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.74909E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.53158E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.28894E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67955E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.10944E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83095E-1
olens1_imon=9.84578E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-2.07891E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47042E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56051E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.85882E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50191E3
multb_neg_imon=6.79881E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40758E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.59052E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07395E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64195E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30763E1
cs_fil1_imon=1.00664E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61771E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66166E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75127E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83839E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22394E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.00735E-1
chamber_ion_pmon=1.69652E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42183E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.1594E-1	-7.97558E-1	-9.13146E0	-9.14183E0	6.07967E-3	9.34601E-2	2.73122E1	-3.26679E1	-3.26071E1	2.67944E1	1.69654E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99803E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.15988E-1	-7.97606E-1	-9.13115E0	-9.14176E0	5.88894E-3	9.31263E-2	2.72889E1	-3.27221E1	-3.26158E1	2.68154E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.15964E-1	-7.97796E-1	-9.13122E0	-9.14211E0	5.60284E-3	9.30548E-2	2.73237E1	-3.26795E1	-3.25755E1	2.68134E1	1.69806E-7	2.51915E-3	2.51915E-3	6.34099E-3	2.00996E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.15916E-1	-7.97772E-1	-9.13136E0	-9.14209E0	5.72205E-3	9.3317E-2	2.73228E1	-3.26508E1	-3.26679E1	2.68004E1	1.69798E-7	2.51632E-3	2.51632E-3	6.29128E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.15892E-1	-7.9782E-1	-9.13146E0	-9.14221E0	5.96046E-3	9.27687E-2	2.73195E1	-3.26633E1	-3.26314E1	2.6801E1	1.69728E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16083E-1	-7.97892E-1	-9.13136E0	-9.14185E0	5.84126E-3	9.32217E-2	2.73334E1	-3.26567E1	-3.26614E1	2.67884E1	1.69653E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.98661E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.15916E-1	-7.97844E-1	-9.13107E0	-9.1419E0	5.74589E-3	9.32217E-2	2.73351E1	-3.26884E1	-3.26125E1	2.6807E1	1.69802E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.15988E-1	-7.97868E-1	-9.13157E0	-9.14176E0	6.05583E-3	9.33647E-2	2.73016E1	-3.26284E1	-3.2613E1	2.67862E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98937E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16011E-1	-7.98082E-1	-9.13146E0	-9.14204E0	6.05583E-3	9.34601E-2	2.73652E1	-3.26975E1	-3.25713E1	2.6828E1	1.69798E-7	2.52492E-3	2.52492E-3	6.3074E-3	1.98153E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.16178E-1	-7.97892E-1	-9.13112E0	-9.14207E0	5.79357E-3	9.29832E-2	2.73171E1	-3.26693E1	-3.26657E1	2.67884E1	1.69802E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.98419E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-8.16083E-1	-7.9813E-1	-9.13146E0	-9.14209E0	5.72205E-3	9.31263E-2	2.73207E1	-3.2641E1	-3.2647E1	2.68046E1	1.69581E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.97903E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.16178E-1	-7.98321E-1	-9.1315E0	-9.14164E0	5.84126E-3	9.31025E-2	2.72787E1	-3.26585E1	-3.26428E1	2.6795E1	1.69654E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.98419E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16178E-1	-7.98249E-1	-9.13148E0	-9.1418E0	5.8651E-3	9.29117E-2	2.73111E1	-3.27077E1	-3.26032E1	2.68188E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98937E-1
1.7E1	2.6E1	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16131E-1	-7.98297E-1	-9.13126E0	-9.14166E0	5.8651E-3	9.31025E-2	2.72909E1	-3.26673E1	-3.2659E1	2.68348E1	1.69802E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.01022E-1
1.8E1	1.08E2	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16226E-1	-7.98035E-1	-9.13107E0	-9.1419E0	5.6982E-3	9.30786E-2	2.73123E1	-3.26639E1	-3.26254E1	2.67836E1	1.69728E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.00847E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.15964E-1	-7.98035E-1	-9.13143E0	-9.14202E0	5.74589E-3	9.32693E-2	2.73195E1	-3.26663E1	-3.2623E1	2.67992E1	1.69798E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.98153E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16131E-1	-7.98011E-1	-9.13117E0	-9.14192E0	5.98431E-3	9.30309E-2	2.73293E1	-3.26756E1	-3.26296E1	2.68232E1	1.69728E-7	2.52318E-3	2.52318E-3	6.28552E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-8.1625E-1	-7.97892E-1	-9.13134E0	-9.14223E0	5.84126E-3	9.29594E-2	2.73228E1	-3.27198E1	-3.26254E1	2.68018E1	1.69725E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.15916E-1	-7.97915E-1	-9.13165E0	-9.14226E0	5.6982E-3	9.32217E-2	2.72585E1	-3.26585E1	-3.26874E1	2.67734E1	1.69875E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00151E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.15916E-1	-7.97629E-1	-9.13153E0	-9.14149E0	5.65052E-3	9.31025E-2	2.73411E1	-3.2623E1	-3.26464E1	2.67955E1	1.69652E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.00735E-1