[Scan]
initial_time=2016-02-17T22:33:44
final_time=2016-02-17T22:34:04
ip_count=19
run=1032
dataset=9
scan=477
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.36534E-8
ql2_vset=
ql2_vmon=-7.97677E-1
ql2_imon=1.8929E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=3.12686E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=4.38201E-10
mult1=-9.74761E-9
mult2=-2.84868E-9
rf_tmon=-4.3561E-3
rf_agc=3.3197E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.59321E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.66006E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=1.99076E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=3.0555E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04752E1
cs_ea1_imon=2.15888E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36548E0
lens1_imon=2.64236E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.56568E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.01694E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.72441E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10865E1
os_restr1_imon=4.26679E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15713E1
os_ea1_imon=2.17835E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=1.28075E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01599E1
cs_anode1_imon=3.27102E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.70013E-8
tplens_vset=1.4E-1
tplens_vmon=1.57831E0
tplens_imon=-2.28099E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26455E1
iondef3_imon=1.4825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.12307E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29575E0
ionrepsh_imon=2.01978E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.19357E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83846E0
os_ea2_imon=-8.51035E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34064E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.54816E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01629E1
cs_anode2_imon=2.27488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73311E1
iondef1_imon=1.06627E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10578E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.84886E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-2.12216E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=1.75897E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86056E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.82052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.51447E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.43472E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.59395E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07197E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64223E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=1.00663E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61465E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66214E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80005E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74889E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8483E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22336E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.69949E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40102E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19959E-1
res40_imon=-2.77087E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.15988E-1	-7.97677E-1	-9.13146E0	-9.14185E0	5.6982E-3	9.34839E-2	2.73195E1	-3.26536E1	-3.26206E1	2.67998E1					
2.0E0	4.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16655E-1	-7.97725E-1	-9.13148E0	-9.14176E0	6.00815E-3	9.32932E-2	2.73106E1	-3.26646E1	-3.26425E1	2.67962E1	1.69728E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.00151E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16178E-1	-7.9751E-1	-9.13169E0	-9.14195E0	5.65052E-3	9.34124E-2	2.73057E1	-3.26741E1	-3.26509E1	2.67816E1	1.69881E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.15964E-1	-7.97796E-1	-9.13172E0	-9.14197E0	6.00815E-3	9.34362E-2	2.73021E1	-3.26699E1	-3.26633E1	2.6813E1	1.69794E-7	2.51182E-3	2.51182E-3	6.31798E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16035E-1	-7.97701E-1	-9.13172E0	-9.14197E0	5.96046E-3	9.32693E-2	2.73104E1	-3.2672E1	-3.26372E1	2.68202E1	1.69798E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.97984E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16226E-1	-7.9782E-1	-9.13146E0	-9.14199E0	5.81741E-3	9.34124E-2	2.72788E1	-3.26591E1	-3.26627E1	2.68268E1	1.69802E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00151E-1
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16417E-1	-7.98011E-1	-9.13169E0	-9.14228E0	5.79357E-3	9.30548E-2	2.73021E1	-3.26484E1	-3.26419E1	2.67794E1	1.69881E-7	2.51693E-3	2.51693E-3	6.28511E-3	1.99931E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16011E-1	-7.98178E-1	-9.13172E0	-9.14233E0	5.6982E-3	9.33647E-2	2.73027E1	-3.26512E1	-3.26536E1	2.68052E1	1.69653E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9985E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16226E-1	-7.97868E-1	-9.13129E0	-9.14207E0	5.81741E-3	9.34124E-2	2.72817E1	-3.26482E1	-3.26687E1	2.67878E1	1.69654E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.1625E-1	-7.97677E-1	-9.13155E0	-9.14207E0	5.57899E-3	9.30786E-2	2.72985E1	-3.26921E1	-3.25996E1	2.68238E1	1.69728E-7	2.52757E-3	2.52757E-3	6.31837E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16369E-1	-7.9782E-1	-9.13134E0	-9.14195E0	5.34058E-3	9.33886E-2	2.72921E1	-3.26762E1	-3.26301E1	2.67878E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16298E-1	-7.97725E-1	-9.13126E0	-9.14197E0	5.65052E-3	9.32217E-2	2.7251E1	-3.26789E1	-3.26518E1	2.67992E1	1.69653E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9934E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16321E-1	-7.97844E-1	-9.1315E0	-9.14211E0	5.88894E-3	9.31263E-2	2.73118E1	-3.26854E1	-3.26058E1	2.68412E1	1.69802E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98592E-1
1.7E1	1.6E1	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16059E-1	-7.97701E-1	-9.13148E0	-9.14199E0	6.12736E-3	9.31025E-2	2.73712E1	-3.26693E1	-3.26254E1	2.67956E1	1.69581E-7	2.52027E-3	2.52027E-3	6.30182E-3	1.98872E-1
1.8E1	8.8E1	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16345E-1	-7.97796E-1	-9.13167E0	-9.14249E0	6.17504E-3	9.30786E-2	2.7321E1	-3.26472E1	-3.26284E1	2.67798E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16464E-1	-7.97796E-1	-9.13167E0	-9.14202E0	6.07967E-3	9.31978E-2	2.73207E1	-3.27065E1	-3.26248E1	2.67884E1	1.69725E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.9985E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16178E-1	-7.98011E-1	-9.13143E0	-9.14202E0	6.00815E-3	9.28164E-2	2.73198E1	-3.26791E1	-3.26337E1	2.68538E1	1.69728E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.1625E-1	-7.98011E-1	-9.13143E0	-9.14187E0	5.93662E-3	9.29594E-2	2.72945E1	-3.26585E1	-3.25841E1	2.68198E1	1.69798E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9968E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16178E-1	-7.97963E-1	-9.13148E0	-9.14199E0	5.74589E-3	9.31025E-2	2.73045E1	-3.26639E1	-3.26008E1	2.68244E1	1.69798E-7	2.51847E-3	2.51847E-3	6.35059E-3	1.9968E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16274E-1	-7.97677E-1	-9.13122E0	-9.14176E0	5.43594E-3	9.32932E-2	2.73311E1	-3.26897E1	-3.26455E1	2.67968E1	1.69949E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99456E-1