[Scan]
initial_time=2016-02-17T22:34:12
final_time=2016-02-17T22:34:32
ip_count=19
run=1032
dataset=9
scan=478
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.36878E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.92426E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=3.11017E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=4.1486E-10
mult1=-9.09742E-9
mult2=-2.6919E-9
rf_tmon=-5.37663E-3
rf_agc=3.27074E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=1.60182E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63554E0
bslens_imon=2.65298E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.05514E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0467E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04569E1
cs_ea1_imon=2.16879E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36961E0
lens1_imon=2.57157E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.53595E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.01982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.72498E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.2686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=2.18401E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25564E0
cs_ionrep_imon=1.2666E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=3.26633E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.69469E-8
tplens_vset=1.4E-1
tplens_vmon=1.63199E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26006E1
iondef3_imon=1.48533E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98487E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.10714E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=2.03005E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33551E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74405E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85793E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08219E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.98936E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.53267E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.26551E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73287E1
iondef1_imon=1.1098E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.07224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10276E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=9.8233E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.55089E-6
window_vset=0.0E0
window_vmon=2.00524E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.85677E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.6577E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.7233E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.3427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.1039E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.59209E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06644E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64118E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=1.00676E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62768E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6622E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.05711E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98335E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16011E-1	-7.97796E-1	-9.13138E0	-9.14214E0	5.36442E-3	9.32455E-2	2.72793E1	-3.26573E1	-3.2641E1	2.6803E1	1.69943E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00021E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.16035E-1	-7.9751E-1	-9.13126E0	-9.14197E0	5.65052E-3	9.32217E-2	2.73137E1	-3.26303E1	-3.26407E1	2.68238E1	1.69728E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99977E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16131E-1	-7.98011E-1	-9.13126E0	-9.14218E0	5.67436E-3	9.31025E-2	2.73205E1	-3.26414E1	-3.26135E1	2.68043E1	1.69656E-7	2.5147E-3	2.5147E-3	6.33538E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16369E-1	-7.97939E-1	-9.13131E0	-9.14214E0	5.62668E-3	9.32455E-2	2.72933E1	-3.26467E1	-3.26531E1	2.68052E1	1.69718E-7	2.51956E-3	2.51956E-3	6.3023E-3	1.98693E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.16107E-1	-7.97915E-1	-9.13162E0	-9.14209E0	5.6982E-3	9.30548E-2	2.73099E1	-3.26771E1	-3.26434E1	2.68148E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.15868E-1	-7.9813E-1	-9.13148E0	-9.14197E0	5.67436E-3	9.29117E-2	2.7311E1	-3.26762E1	-3.26408E1	2.68148E1	1.69798E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.15797E-1	-7.98345E-1	-9.13165E0	-9.14207E0	5.84126E-3	9.32217E-2	2.73267E1	-3.2653E1	-3.26512E1	2.68018E1	1.69654E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.15916E-1	-7.98082E-1	-9.13143E0	-9.14156E0	5.62668E-3	9.31501E-2	2.73045E1	-3.26219E1	-3.25983E1	2.67968E1	1.69653E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00534E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.15916E-1	-7.98392E-1	-9.13136E0	-9.14199E0	5.55515E-3	9.32693E-2	2.73009E1	-3.26308E1	-3.26146E1	2.67752E1	1.69802E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00499E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16083E-1	-7.98178E-1	-9.13141E0	-9.14185E0	5.62668E-3	9.30071E-2	2.73345E1	-3.26651E1	-3.26212E1	2.67902E1	1.69581E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16131E-1	-7.97963E-1	-9.13134E0	-9.14218E0	5.74589E-3	9.29832E-2	2.7324E1	-3.26679E1	-3.26455E1	2.6828E1	1.69802E-7	2.52647E-3	2.52647E-3	6.31288E-3	1.98419E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16202E-1	-7.98106E-1	-9.13141E0	-9.14218E0	5.84126E-3	9.31263E-2	2.73381E1	-3.26945E1	-3.25906E1	2.67986E1	1.6987E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00192E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16059E-1	-7.98321E-1	-9.13155E0	-9.14223E0	5.76973E-3	9.30786E-2	2.72818E1	-3.26725E1	-3.26242E1	2.681E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99803E-1
1.7E1	1.6E1	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.15892E-1	-7.98154E-1	-9.13122E0	-9.14204E0	5.6982E-3	9.31025E-2	2.73204E1	-3.26673E1	-3.2659E1	2.67986E1	1.69656E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.00463E-1
1.8E1	9.3E1	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16417E-1	-7.97987E-1	-9.13129E0	-9.14207E0	5.8651E-3	9.34362E-2	2.73333E1	-3.26807E1	-3.26212E1	2.67845E1	1.69653E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.01219E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16345E-1	-7.9782E-1	-9.13153E0	-9.14226E0	5.76973E-3	9.29594E-2	2.73051E1	-3.26378E1	-3.26455E1	2.68046E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00499E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16369E-1	-7.97844E-1	-9.13131E0	-9.14216E0	5.4121E-3	9.34601E-2	2.73103E1	-3.26799E1	-3.26254E1	2.67984E1	1.69798E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00534E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16464E-1	-7.98225E-1	-9.13112E0	-9.14209E0	5.55515E-3	9.30309E-2	2.73182E1	-3.26822E1	-3.26454E1	2.68007E1	1.69794E-7	2.52025E-3	2.52025E-3	6.30212E-3	2.00231E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16536E-1	-7.98035E-1	-9.13122E0	-9.14204E0	5.76973E-3	9.33886E-2	2.72733E1	-3.26783E1	-3.26735E1	2.67962E1	1.69806E-7	2.51693E-3	2.51693E-3	6.28511E-3	1.99754E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16417E-1	-7.97939E-1	-9.13122E0	-9.14211E0	5.55515E-3	9.32693E-2	2.73287E1	-3.26638E1	-3.26006E1	2.6792E1	1.69728E-7	2.52428E-3	2.52428E-3	6.28552E-3	1.9963E-1