[Scan]
initial_time=2016-02-17T22:36:02
final_time=2016-02-17T22:36:21
ip_count=19
run=1032
dataset=9
scan=482
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.36591E-8
ql2_vset=
ql2_vmon=-7.97629E-1
ql2_imon=1.91092E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=3.11947E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=4.34446E-10
mult1=-1.02087E-8
mult2=-2.71738E-9
rf_tmon=-3.01113E-3
rf_agc=3.54092E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.12736E-3
ql5_imon=1.5891E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.77207E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=1.9755E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.0519E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.05658E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=2.19396E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39719E0
lens1_imon=2.3539E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03492E1
cs_ea2_imon=1.56237E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=3.01261E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.72525E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.25995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.17882E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.25812E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.27606E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.69489E-8
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26213E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27021E1
iondef2_imon=1.59229E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.09602E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=2.0029E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.11136E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85593E0
os_ea2_imon=-8.47299E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00763E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08219E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.59292E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.53447E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.27776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72868E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.10853E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=9.8451E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.8614E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.46933E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.59693E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.70365E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.00932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.57821E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06771E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64145E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3078E1
cs_fil1_imon=1.00557E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61759E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66004E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77707E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.80412E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22362E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04342E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.15892E-1	-7.97844E-1	-9.13157E0	-9.14199E0	5.79357E-3	9.30786E-2	2.73198E1	-3.26697E1	-3.26378E1	2.68094E1					
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.15821E-1	-7.97749E-1	-9.13172E0	-9.14197E0	5.88894E-3	9.29356E-2	2.73027E1	-3.26805E1	-3.26425E1	2.68124E1	1.70065E-7	2.52174E-3	2.52174E-3	6.34346E-3	2.00129E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-8.16035E-1	-7.97701E-1	-9.13143E0	-9.14183E0	5.6982E-3	9.3174E-2	2.72813E1	-3.2659E1	-3.25982E1	2.67649E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09294E0	-8.15892E-1	-7.97582E-1	-9.13148E0	-9.14207E0	5.81741E-3	9.30786E-2	2.73411E1	-3.26741E1	-3.26494E1	2.67868E1	1.69581E-7	2.51603E-3	2.51603E-3	6.31798E-3	2.00399E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16154E-1	-7.97796E-1	-9.13146E0	-9.14209E0	5.76973E-3	9.26733E-2	2.73139E1	-3.26579E1	-3.25947E1	2.6792E1	1.69725E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.15964E-1	-7.97701E-1	-9.13169E0	-9.14199E0	5.6982E-3	9.29117E-2	2.73051E1	-3.26465E1	-3.26055E1	2.68238E1	1.69875E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.16321E-1	-7.98035E-1	-9.13153E0	-9.1419E0	5.81741E-3	9.30309E-2	2.7335E1	-3.26438E1	-3.26521E1	2.67795E1	1.6972E-7	2.51679E-3	2.51679E-3	6.323E-3	2.00105E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16178E-1	-7.97772E-1	-9.13179E0	-9.14204E0	6.00815E-3	9.31025E-2	2.73153E1	-3.26272E1	-3.26278E1	2.67872E1	1.69581E-7	2.51758E-3	2.51758E-3	6.32483E-3	1.9965E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16464E-1	-7.97653E-1	-9.13131E0	-9.14192E0	5.67436E-3	9.32932E-2	2.7321E1	-3.26124E1	-3.26785E1	2.68064E1	1.69653E-7	2.52384E-3	2.52384E-3	6.29128E-3	2.00534E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16584E-1	-7.97844E-1	-9.13141E0	-9.14204E0	5.81741E-3	9.35078E-2	2.73057E1	-3.26687E1	-3.26567E1	2.68172E1	1.69728E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00847E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16417E-1	-7.97701E-1	-9.13126E0	-9.14207E0	5.98431E-3	9.32217E-2	2.73198E1	-3.26976E1	-3.26499E1	2.68154E1	1.69581E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99977E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16321E-1	-7.97915E-1	-9.13129E0	-9.14216E0	5.84126E-3	9.3174E-2	2.72968E1	-3.26567E1	-3.26384E1	2.67908E1	1.69728E-7	2.51771E-3	2.51771E-3	6.35692E-3	2.00499E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-8.16202E-1	-7.97701E-1	-9.13155E0	-9.14197E0	5.96046E-3	9.32932E-2	2.72901E1	-3.26609E1	-3.2635E1	2.68406E1	1.69725E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.98491E-1
1.7E1	1.4E1	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.16393E-1	-7.97629E-1	-9.13124E0	-9.14171E0	6.03199E-3	9.33647E-2	2.73171E1	-3.26506E1	-3.26518E1	2.67872E1	1.69802E-7	2.52209E-3	2.52209E-3	6.34037E-3	1.98592E-1
1.8E1	7.0E1	0.0E0	7.27E2	5.0E2	-2.09673E0	-8.16226E-1	-7.9782E-1	-9.13117E0	-9.14187E0	6.17504E-3	9.34362E-2	2.73305E1	-3.26962E1	-3.2639E1	2.67962E1	1.69728E-7	2.5199E-3	2.5199E-3	6.28006E-3	1.99803E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.16464E-1	-7.97701E-1	-9.13103E0	-9.14223E0	5.96046E-3	9.32932E-2	2.72973E1	-3.26939E1	-3.26434E1	2.68316E1	1.69949E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.01022E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.16274E-1	-7.97415E-1	-9.1311E0	-9.14192E0	5.72205E-3	9.34362E-2	2.73009E1	-3.2641E1	-3.2653E1	2.68196E1	1.69728E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.16345E-1	-7.97915E-1	-9.13098E0	-9.14204E0	6.03199E-3	9.33886E-2	2.73399E1	-3.2655E1	-3.26376E1	2.68059E1	1.69728E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99977E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.1625E-1	-7.97796E-1	-9.13107E0	-9.14214E0	5.88894E-3	9.31501E-2	2.73204E1	-3.26615E1	-3.26223E1	2.67746E1	1.69794E-7	2.52659E-3	2.52659E-3	6.32858E-3	1.99729E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16131E-1	-7.97629E-1	-9.13134E0	-9.14197E0	6.12736E-3	9.31263E-2	2.72868E1	-3.27021E1	-3.26213E1	2.68244E1	1.69654E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99283E-1