[Scan]
initial_time=2016-02-17T22:38:27
final_time=2016-02-17T22:38:46
ip_count=19
run=1032
dataset=10
scan=487
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.75723E-6
ql1_vset=
ql1_vmon=-8.79994E1
ql1_imon=-1.08299E-9
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=1.33963E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-3.30616E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.56847E-8
mult1=-9.83671E-9
mult2=-2.65873E-9
rf_tmon=-3.34682E-3
rf_agc=3.47996E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=6.0184E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63023E0
bslens_imon=2.56803E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19683E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5332E1
cs_ef1b_imon=3.05898E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=2.17233E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0047E0
lens1_imon=1.57346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64498E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0441E1
cs_ea2_imon=1.55931E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84487E1
cs_ef1a_imon=3.01171E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.72743E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=4.27462E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15164E1
os_ea1_imon=2.18366E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63433E1
os_ef1bup_imon=3.08539E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.27474E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=3.28104E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=4.21096E-8
tplens_vset=1.4E-1
tplens_vmon=1.63671E0
tplens_imon=-2.2102E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.51683E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.58054E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.82781E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28572E0
ionrepsh_imon=2.01589E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.19817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.1184E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82017E0
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08815E0
os_ef2alow_imon=-2.69274E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.83533E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10672E1
os_restr2_imon=3.5403E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.26592E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.11783E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83E-1
olens1_imon=9.85421E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-2.03592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47365E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.67046E-6
window_vset=0.0E0
window_vmon=1.7077E-1
window_imon=-1.1393E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39018E-4
mask2_vset=0.0E0
mask2_vmon=-1.858E1
mask2_imon=-7.98728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.61523E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.55695E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.12679E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55615E0
defgridb_imon=6.25964E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.58534E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0803E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64343E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30815E1
cs_fil1_imon=1.00631E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62546E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66434E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.48384E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91236E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76351E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36144E-1
cs_fil2_imon=-2.06681E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16518E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22557E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.72528E-1
res40_imon=-2.61629E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4858E4	1.0E1	1.47E2	4.1E1	-7.26282E-2	-8.79991E1	2.14577E-4	-8.8001E1	-2.14577E-4	5.88894E-3	9.33886E-2	2.73141E1	-3.26777E1	-3.25876E1	2.68202E1	1.69653E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.9934E-1
2.0E0	5.638E3	3.0E0	3.16E2	1.6E2	-7.22418E-2	-8.79991E1	1.66893E-4	-8.80006E1	-1.19209E-4	5.6982E-3	9.32693E-2	2.73297E1	-3.26554E1	-3.26236E1	2.68136E1	1.69802E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98764E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.79993E1	1.43051E-4	-8.80009E1	-1.19209E-4	5.88894E-3	9.31025E-2	2.73075E1	-3.26458E1	-3.26278E1	2.67992E1	1.69654E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.00847E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13143E-2	-8.79994E1	4.29153E-4	-8.80006E1	0.0E0	5.55515E-3	9.3174E-2	2.73034E1	-3.26818E1	-3.26095E1	2.68076E1	1.69728E-7	2.52647E-3	2.52647E-3	6.30192E-3	1.9963E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.79991E1	6.91414E-4	-8.80007E1	7.15256E-5	5.79357E-3	9.33647E-2	2.73413E1	-3.26709E1	-3.26485E1	2.67876E1	1.6979E-7	2.51886E-3	2.51886E-3	6.30221E-3	1.98628E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.79993E1	3.33786E-4	-8.80007E1	2.6226E-4	5.67436E-3	9.33409E-2	2.72544E1	-3.26726E1	-3.26431E1	2.68118E1	1.6981E-7	2.52179E-3	2.52179E-3	6.3074E-3	1.98446E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.79991E1	3.09944E-4	-8.80009E1	9.53674E-5	5.96046E-3	9.30071E-2	2.73009E1	-3.26597E1	-3.26362E1	2.67938E1	1.69653E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.98153E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.79992E1	1.43051E-4	-8.80005E1	2.86102E-4	5.72205E-3	9.3174E-2	2.73051E1	-3.26724E1	-3.26318E1	2.68151E1	1.69728E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99456E-1
1.2E1	3.16E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.79993E1	2.38419E-5	-8.80008E1	2.86102E-4	5.96046E-3	9.33409E-2	2.73313E1	-3.26298E1	-3.26397E1	2.68063E1	1.69723E-7	2.52025E-3	2.52025E-3	6.3074E-3	2.00735E-1
1.3E1	1.9E1	1.0E0	5.25E2	3.53E2	-7.30918E-2	-8.79993E1	1.90735E-4	-8.80009E1	2.6226E-4	5.88894E-3	9.35078E-2	2.73189E1	-3.26326E1	-3.26158E1	2.67926E1	1.69731E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99842E-1
1.4E1	6.83E2	1.0E0	5.66E2	3.82E2	-7.30146E-2	-8.79994E1	1.90735E-4	-8.80006E1	3.8147E-4	5.74589E-3	9.32932E-2	2.73417E1	-3.26518E1	-3.26314E1	2.68082E1					
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.79996E1	2.38419E-4	-8.80004E1	1.19209E-4	5.45979E-3	9.33886E-2	2.73093E1	-3.26777E1	-3.26152E1	2.67968E1	1.69728E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.00673E-1
1.6E1	3.148E3	4.0E0	6.47E2	4.41E2	-7.26282E-2	-8.79995E1	3.09944E-4	-8.80008E1	3.57628E-4	5.57899E-3	9.34124E-2	2.73316E1	-3.26874E1	-3.26596E1	2.6813E1	1.69728E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.9963E-1
1.7E1	3.7204E4	1.2E1	6.87E2	4.7E2	-7.23189E-2	-8.7999E1	2.14577E-4	-8.80005E1	3.33786E-4	5.67436E-3	9.34839E-2	2.73243E1	-3.26861E1	-3.26326E1	2.68094E1	1.69725E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9917E-1
1.8E1	1.62198E5	1.09E2	7.27E2	5.0E2	-7.22418E-2	-8.79993E1	1.66893E-4	-8.80003E1	1.90735E-4	5.93662E-3	9.35078E-2	2.73051E1	-3.26657E1	-3.26554E1	2.68232E1	1.69581E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
1.9E1	3.558E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.79994E1	1.19209E-4	-8.80007E1	-4.76837E-5	5.81741E-3	9.3317E-2	2.73255E1	-3.26711E1	-3.26176E1	2.6801E1	1.69654E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.01022E-1
2.0E1	3.47E2	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.79994E1	2.38419E-4	-8.80007E1	2.38419E-5	5.50747E-3	9.33409E-2	2.72757E1	-3.26705E1	-3.26314E1	2.68016E1	1.69728E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99456E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.79994E1	-2.14577E-4	-8.80009E1	1.66893E-4	5.79357E-3	9.30786E-2	2.73155E1	-3.26417E1	-3.26474E1	2.68076E1	1.69949E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.00151E-1
2.2E1	3.6E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.79994E1	-3.09944E-4	-8.80007E1	9.53674E-5	6.1512E-3	9.33886E-2	2.72781E1	-3.26741E1	-3.26549E1	2.67937E1	1.69725E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.99E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.79994E1	-9.53674E-5	-8.80007E1	-4.76837E-5	5.62668E-3	9.32932E-2	2.73003E1	-3.26597E1	-3.26056E1	2.67974E1	1.69653E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9968E-1