[Scan]
initial_time=2016-02-17T22:40:41
final_time=2016-02-17T22:41:01
ip_count=19
run=1032
dataset=10
scan=492
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.75451E-6
ql1_vset=
ql1_vmon=-8.79999E1
ql1_imon=-8.45754E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=1.32434E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.52728E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.5671E-8
mult1=-9.80059E-9
mult2=-2.83638E-9
rf_tmon=-4.27209E-3
rf_agc=3.3652E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=5.9588E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68096E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.96882E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.05406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02245E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.1918E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04481E0
lens1_imon=1.60885E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.58904E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=3.01261E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.72497E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=4.26103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.20419E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21552E0
cs_ionrep_imon=1.26943E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=3.27102E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=4.21353E-8
tplens_vset=1.4E-1
tplens_vmon=1.5907E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26014E1
iondef3_imon=1.49347E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27119E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=8.66962E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30106E0
ionrepsh_imon=2.00952E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33935E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84613E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09721E0
os_ef2alow_imon=-2.73843E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.54384E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29114E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.27344E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.11356E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82904E-1
olens1_imon=9.86191E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-2.02124E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=1.6088E-1
window_imon=-1.2536E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82594E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=8.06474E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.72684E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.55152E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33294E1
os_fil1_imon=9.57683E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06722E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64293E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=1.00673E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61933E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66681E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76206E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68631E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22528E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=1.97731E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.16065E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4565E4	1.6E1	1.47E2	4.1E1	-7.286E-2	-8.80001E1	-1.90735E-4	-8.80006E1	1.66893E-4	5.36442E-3	9.33647E-2	2.7251E1	-3.26879E1	-3.26464E1	2.6792E1	1.69728E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99977E-1
2.0E0	5.52E3	7.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80001E1	2.86102E-4	-8.80004E1	1.90735E-4	5.67436E-3	9.34124E-2	2.73461E1	-3.26652E1	-3.26327E1	2.67986E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00151E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80002E1	9.53674E-5	-8.80006E1	1.66893E-4	5.17368E-3	9.35793E-2	2.72957E1	-3.26461E1	-3.26248E1	2.6813E1	1.69836E-7	2.5208E-3	2.5208E-3	6.29926E-3	2.00171E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80001E1	-9.53674E-5	-8.80006E1	2.38419E-4	5.05447E-3	9.35793E-2	2.73086E1	-3.26767E1	-3.2639E1	2.68041E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80002E1	1.19209E-4	-8.80005E1	-2.38419E-5	5.48363E-3	9.32217E-2	2.73405E1	-3.26554E1	-3.26332E1	2.6828E1	1.69728E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00673E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.79997E1	-4.76837E-5	-8.80005E1	1.19209E-4	5.36442E-3	9.33886E-2	2.73147E1	-3.26717E1	-3.26344E1	2.68076E1	1.69802E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.79998E1	-2.86102E-4	-8.80006E1	1.43051E-4	5.4121E-3	9.35078E-2	2.7355E1	-3.2653E1	-3.26482E1	2.6807E1	1.69875E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.79997E1	-7.15256E-5	-8.80003E1	2.38419E-4	5.43594E-3	9.35078E-2	2.73063E1	-3.26909E1	-3.25883E1	2.68226E1	1.69725E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.00192E-1
1.2E1	3.34E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.79998E1	-1.19209E-4	-8.80004E1	1.19209E-4	5.67436E-3	9.34839E-2	2.72919E1	-3.26825E1	-3.25972E1	2.68196E1	1.69949E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00499E-1
1.3E1	3.3E1	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.79997E1	-4.76837E-5	-8.80005E1	4.29153E-4	5.38826E-3	9.35078E-2	2.73297E1	-3.26549E1	-3.26705E1	2.67884E1	1.69581E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.01022E-1
1.4E1	6.89E2	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.79999E1	-9.53674E-5	-8.80005E1	2.86102E-4	5.38826E-3	9.33409E-2	2.7311E1	-3.26826E1	-3.26437E1	2.68175E1	1.69581E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.00673E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.79997E1	2.38419E-5	-8.80005E1	3.09944E-4	5.53131E-3	9.34601E-2	2.73147E1	-3.26819E1	-3.26374E1	2.68004E1	1.69653E-7	2.52707E-3	2.52707E-3	6.31278E-3	2.00363E-1
1.6E1	3.164E3	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.79997E1	1.66893E-4	-8.80005E1	3.57628E-4	5.55515E-3	9.35555E-2	2.73097E1	-3.2732E1	-3.26816E1	2.67746E1	1.69581E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.01547E-1
1.7E1	3.741E4	2.0E1	6.87E2	4.7E2	-7.3401E-2	-8.8E1	-2.38419E-4	-8.80003E1	5.48363E-4	5.55515E-3	9.33647E-2	2.7318E1	-3.2667E1	-3.26223E1	2.67895E1	1.69794E-7	2.52553E-3	2.52553E-3	6.30212E-3	1.99896E-1
1.8E1	1.62769E5	9.8E1	7.27E2	5.0E2	-7.30918E-2	-8.80002E1	-3.8147E-4	-8.80006E1	3.09944E-4	5.65052E-3	9.33409E-2	2.73051E1	-3.26799E1	-3.26493E1	2.68142E1	1.69731E-7	2.51581E-3	2.51581E-3	6.30182E-3	1.99754E-1
1.9E1	3.628E3	8.0E0	7.68E2	5.29E2	-7.30146E-2	-8.79999E1	-3.57628E-4	-8.80008E1	4.52995E-4	5.4121E-3	9.32455E-2	2.73135E1	-3.26561E1	-3.26512E1	2.68016E1	1.69881E-7	2.51693E-3	2.51693E-3	6.26844E-3	2.00818E-1
2.0E1	3.29E2	1.0E0	8.08E2	5.58E2	-7.23964E-2	-8.79998E1	-2.38419E-4	-8.80007E1	2.14577E-4	5.8651E-3	9.34362E-2	2.73111E1	-3.26549E1	-3.25737E1	2.6802E1	1.69802E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99803E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80002E1	-1.66893E-4	-8.80007E1	2.14577E-4	5.84126E-3	9.34601E-2	2.72927E1	-3.26449E1	-3.26779E1	2.67984E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98592E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80003E1	-1.43051E-4	-8.80006E1	3.09944E-4	5.48363E-3	9.33886E-2	2.73207E1	-3.27035E1	-3.25701E1	2.681E1	1.69653E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.98491E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.79999E1	2.38419E-5	-8.80005E1	4.29153E-4	5.45979E-3	9.31263E-2	2.73381E1	-3.27119E1	-3.26014E1	2.68226E1	1.69802E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.97731E-1