[Scan]
initial_time=2016-02-17T22:42:55
final_time=2016-02-17T22:43:15
ip_count=19
run=1032
dataset=10
scan=497
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.76109E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-7.6946E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.32315E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.22187E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.55429E-8
mult1=-9.76262E-9
mult2=-2.73159E-9
rf_tmon=-3.72003E-3
rf_agc=3.3454E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=5.67627E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65122E0
bslens_imon=2.44428E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19979E1
lens5a_imon=1.99331E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05031E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53583E1
cs_ef1b_imon=3.04506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02385E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04785E1
cs_ea1_imon=2.17268E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03423E0
lens1_imon=1.48137E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64322E1
os_ef1alow_imon=2.98845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.54279E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84456E1
cs_ef1a_imon=3.00968E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.72985E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11253E1
os_restr1_imon=4.27078E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15219E1
os_ea1_imon=2.18797E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63568E1
os_ef1bup_imon=3.08292E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25326E0
cs_ionrep_imon=1.2859E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93239E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.28532E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=4.21068E-8
tplens_vset=1.4E-1
tplens_vmon=1.60493E0
tplens_imon=-2.67159E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26566E1
iondef3_imon=1.49899E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2646E1
iondef2_imon=1.57373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98401E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=9.06289E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29613E0
ionrepsh_imon=2.00026E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.18971E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7443E1
cs_ef2b_imon=3.11123E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.90562E0
os_ea2_imon=-7.39923E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00505E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7137E1
cs_ef2a_imon=3.17563E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08139E0
os_ef2alow_imon=-2.74348E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.09671E-1
os_ef2bup_imon=-5.37608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.53797E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30172E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01632E1
cs_anode2_imon=2.27687E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72914E1
iondef1_imon=1.1107E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68269E1
iondef4_imon=1.08654E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.11235E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=9.84713E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15019E0
cs_ionaccel_imon=-1.97564E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47272E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56234E1
einzel_imon=7.57815E-6
window_vset=0.0E0
window_vmon=1.69454E-1
window_imon=-1.03441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.38985E-4
mask2_vset=0.0E0
mask2_vmon=-1.86132E1
mask2_imon=-7.58415E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.58211E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.20553E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=6.8973E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51961E0
defgridb_imon=6.17077E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33288E1
os_fil1_imon=9.5908E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06692E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64639E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=1.0076E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61676E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67031E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.59834E-2
os_fil2_imon=-2.64991E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97954E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60181E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35563E-1
cs_fil2_imon=-2.16043E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.59038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22636E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00399E-1
chamber_ion_pmon=1.69794E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.39158E-1
res40_imon=-2.88856E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4876E4	8.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80003E1	2.86102E-4	-8.80004E1	3.57628E-4	5.6982E-3	9.31978E-2	2.73075E1	-3.26741E1	-3.26543E1	2.6774E1	1.69581E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98661E-1
2.0E0	5.763E3	1.0E1	3.16E2	1.6E2	-7.30918E-2	-8.80002E1	2.38419E-5	-8.80002E1	1.43051E-4	5.79357E-3	9.31263E-2	2.73393E1	-3.26663E1	-3.26368E1	2.67776E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98764E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80005E1	2.86102E-4	-8.80002E1	2.38419E-5	5.74589E-3	9.32455E-2	2.72957E1	-3.26649E1	-3.26337E1	2.68184E1	1.69728E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98419E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80003E1	1.66893E-4	-8.80003E1	-2.38419E-5	5.96046E-3	9.32693E-2	2.73291E1	-3.26693E1	-3.26098E1	2.68016E1	1.69652E-7	2.51393E-3	2.51393E-3	6.3074E-3	1.974E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80005E1	-4.76837E-5	-8.8E1	3.57628E-4	5.79357E-3	9.32932E-2	2.73452E1	-3.2636E1	-3.26284E1	2.6792E1	1.69581E-7	2.52757E-3	2.52757E-3	6.31288E-3	1.97388E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80005E1	-1.43051E-4	-8.80001E1	1.90735E-4	5.8651E-3	9.3627E-2	2.73345E1	-3.26603E1	-3.26464E1	2.67992E1	1.69802E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.97559E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80006E1	9.53674E-5	-8.80004E1	2.14577E-4	5.53131E-3	9.32693E-2	2.72817E1	-3.26765E1	-3.25966E1	2.68148E1	1.69725E-7	2.5131E-3	2.5131E-3	6.29665E-3	1.9968E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.8001E1	-1.43051E-4	-8.80003E1	1.90735E-4	5.60284E-3	9.32932E-2	2.72862E1	-3.26608E1	-3.2636E1	2.68154E1	1.69802E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99977E-1
1.2E1	3.54E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.8001E1	-1.90735E-4	-8.80001E1	1.66893E-4	5.57899E-3	9.30786E-2	2.73106E1	-3.26921E1	-3.26132E1	2.68262E1	1.69802E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99456E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80009E1	2.38419E-4	-8.80003E1	1.90735E-4	5.55515E-3	9.32217E-2	2.73087E1	-3.26867E1	-3.2623E1	2.68088E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00847E-1
1.4E1	6.79E2	1.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80005E1	9.53674E-5	-8.79999E1	2.86102E-4	5.45979E-3	9.33409E-2	2.72962E1	-3.26549E1	-3.2629E1	2.67956E1	1.69875E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00325E-1
1.5E1	1.13E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80008E1	-9.53674E-5	-8.80002E1	4.29153E-4	5.55515E-3	9.3317E-2	2.73057E1	-3.26756E1	-3.26591E1	2.68016E1	1.69798E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.00705E-1
1.6E1	3.161E3	4.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80008E1	-7.15256E-5	-8.80004E1	2.86102E-4	5.67436E-3	9.29594E-2	2.72582E1	-3.26536E1	-3.27101E1	2.68172E1	1.69656E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.00285E-1
1.7E1	3.7593E4	1.5E1	6.87E2	4.7E2	-7.34782E-2	-8.80008E1	3.33786E-4	-8.80001E1	2.86102E-4	5.72205E-3	9.31501E-2	2.73334E1	-3.26927E1	-3.26254E1	2.68172E1	1.69875E-7	2.53087E-3	2.53087E-3	6.32386E-3	1.98764E-1
1.8E1	1.6277E5	8.1E1	7.27E2	5.0E2	-7.25507E-2	-8.80007E1	2.38419E-4	-8.80004E1	2.38419E-5	5.55515E-3	9.29356E-2	2.73015E1	-3.26567E1	-3.26104E1	2.68238E1	1.69654E-7	2.52647E-3	2.52647E-3	6.29098E-3	1.98592E-1
1.9E1	3.622E3	6.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80008E1	2.38419E-5	-8.80006E1	9.53674E-5	5.48363E-3	9.3317E-2	2.73297E1	-3.26651E1	-3.25984E1	2.68118E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.97731E-1
2.0E1	3.28E2	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80007E1	-4.29153E-4	-8.80003E1	-9.53674E-5	5.48363E-3	9.30786E-2	2.73099E1	-3.26585E1	-3.26675E1	2.67818E1	1.70088E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.98322E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80009E1	-3.8147E-4	-8.80004E1	1.19209E-4	5.8651E-3	9.29117E-2	2.73028E1	-3.26637E1	-3.2626E1	2.68198E1	1.69875E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00151E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80009E1	-3.8147E-4	-8.80007E1	-2.38419E-4	5.81741E-3	9.30548E-2	2.73085E1	-3.27E1	-3.25919E1	2.68132E1	1.69794E-7	2.52236E-3	2.52236E-3	6.31798E-3	2.00903E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.8001E1	-3.57628E-4	-8.80004E1	0.0E0	5.74589E-3	9.33886E-2	2.72914E1	-3.2646E1	-3.26566E1	2.68269E1	1.69794E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.00399E-1