[Scan]
initial_time=2016-02-17T22:43:49
final_time=2016-02-17T22:44:08
ip_count=19
run=1032
dataset=10
scan=499
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.76248E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.2006E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.25302E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.11592E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.55976E-8
mult1=-8.96979E-9
mult2=-2.35333E-9
rf_tmon=-6.5312E-3
rf_agc=3.19877E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=5.59199E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.72881E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.97947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=3.06307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05246E1
cs_ea1_imon=2.18351E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06178E0
lens1_imon=1.42022E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.59193E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.99748E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.72773E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15642E1
os_ea1_imon=2.19612E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.24694E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=3.27102E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=4.20703E-8
tplens_vset=1.4E-1
tplens_vmon=1.62221E0
tplens_imon=-4.54359E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26633E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2626E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.74853E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=2.0047E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.19504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74459E1
cs_ef2b_imon=3.10487E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85352E0
os_ea2_imon=-5.73322E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10922E0
os_ef2alow_imon=-2.86818E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.91127E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.53519E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.32307E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.2702E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72384E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.07368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.11286E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=9.88802E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02035E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.9692E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.85857E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.40804E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.92498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.59022E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64589E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=1.00607E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6284E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66988E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78996E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65793E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55067E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22579E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.67411E-1
res40_imon=-2.8898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4909E4	1.6E1	1.47E2	4.1E1	-7.29374E-2	-8.8001E1	2.38419E-5	-8.80005E1	1.66893E-4	5.93662E-3	9.33886E-2	2.73015E1	-3.26518E1	-3.26182E1	2.68076E1	1.69728E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.01022E-1
2.0E0	5.588E3	7.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80012E1	-9.53674E-5	-8.80007E1	2.38419E-4	5.93662E-3	9.30309E-2	2.73043E1	-3.26606E1	-3.26374E1	2.68044E1	1.69654E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.9963E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80008E1	-3.33786E-4	-8.80006E1	2.6226E-4	5.62668E-3	9.30309E-2	2.73181E1	-3.2698E1	-3.26054E1	2.6781E1	1.69943E-7	2.51939E-3	2.51939E-3	6.31894E-3	1.99E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.8001E1	-4.76837E-5	-8.80006E1	7.15256E-5	5.79357E-3	9.28164E-2	2.72877E1	-3.26723E1	-3.26374E1	2.6801E1	1.69725E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.98661E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80011E1	3.09944E-4	-8.80005E1	9.53674E-5	5.84126E-3	9.29117E-2	2.73357E1	-3.26302E1	-3.26288E1	2.68063E1	1.69802E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80008E1	-1.90735E-4	-8.80008E1	2.38419E-4	5.62668E-3	9.29356E-2	2.73431E1	-3.26499E1	-3.25954E1	2.68184E1	1.69696E-7	2.5199E-3	2.5199E-3	6.31169E-3	1.99419E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.8001E1	-1.43051E-4	-8.80006E1	9.53674E-5	5.84126E-3	9.28879E-2	2.72839E1	-3.26767E1	-3.26154E1	2.67962E1	1.70031E-7	2.52473E-3	2.52473E-3	6.34099E-3	1.98169E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80008E1	1.19209E-4	-8.80006E1	3.33786E-4	5.74589E-3	9.29117E-2	2.73302E1	-3.26658E1	-3.26529E1	2.67974E1	1.6987E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.9883E-1
1.2E1	3.44E2	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80006E1	1.90735E-4	-8.80003E1	0.0E0	5.79357E-3	9.31263E-2	2.72951E1	-3.26732E1	-3.26307E1	2.6798E1	1.69731E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.98872E-1
1.3E1	2.5E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80007E1	-9.53674E-5	-8.80005E1	-7.15256E-5	5.96046E-3	9.29594E-2	2.72805E1	-3.26543E1	-3.26464E1	2.67956E1	1.69943E-7	2.52492E-3	2.52492E-3	6.29128E-3	2.00021E-1
1.4E1	7.16E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80011E1	0.0E0	-8.80006E1	3.33786E-4	5.93662E-3	9.30786E-2	2.72702E1	-3.27185E1	-3.26404E1	2.67926E1	1.69728E-7	2.50789E-3	2.50789E-3	6.32386E-3	2.00499E-1
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80007E1	-2.6226E-4	-8.80006E1	3.8147E-4	5.72205E-3	9.3174E-2	2.72877E1	-3.27011E1	-3.26573E1	2.67926E1	1.69654E-7	2.52647E-3	2.52647E-3	6.3074E-3	2.00151E-1
1.6E1	3.124E3	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80006E1	-2.14577E-4	-8.80004E1	2.14577E-4	5.76973E-3	9.32693E-2	2.7412E1	-3.27173E1	-3.25449E1	2.67944E1	1.69875E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.01197E-1
1.7E1	3.7439E4	1.4E1	6.87E2	4.7E2	-7.32464E-2	-8.80012E1	-2.86102E-4	-8.80003E1	7.15256E-5	5.91278E-3	9.31263E-2	2.73327E1	-3.26819E1	-3.26524E1	2.67926E1	1.69875E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.9963E-1
1.8E1	1.6331E5	1.0E2	7.27E2	5.0E2	-7.24736E-2	-8.80014E1	2.38419E-4	-8.80002E1	1.90735E-4	5.60284E-3	9.31025E-2	2.73514E1	-3.26585E1	-3.2611E1	2.68052E1	1.69728E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.98764E-1
1.9E1	3.521E3	5.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80013E1	7.15256E-5	-8.80005E1	2.14577E-4	5.57899E-3	9.30786E-2	2.73063E1	-3.26666E1	-3.26706E1	2.67978E1	1.69728E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99283E-1
2.0E1	3.32E2	1.0E0	8.08E2	5.58E2	-7.25507E-2	-8.8001E1	3.8147E-4	-8.80004E1	0.0E0	5.98431E-3	9.31501E-2	2.73095E1	-3.26472E1	-3.26447E1	2.68606E1	1.69865E-7	2.52025E-3	2.52025E-3	6.3074E-3	1.99729E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80008E1	2.6226E-4	-8.80005E1	4.76837E-5	5.93662E-3	9.30071E-2	2.73086E1	-3.26148E1	-3.26366E1	2.67648E1	1.69963E-7	2.51952E-3	2.51952E-3	6.29035E-3	1.99883E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80006E1	-1.66893E-4	-8.80008E1	-2.38419E-5	6.1512E-3	9.32455E-2	2.73399E1	-3.26986E1	-3.26449E1	2.68166E1	1.69727E-7	2.5208E-3	2.5208E-3	6.31555E-3	2.00258E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80008E1	0.0E0	-8.80008E1	4.76837E-5	5.8651E-3	9.36508E-2	2.72384E1	-3.2626E1	-3.26633E1	2.68184E1