[Scan]
initial_time=2016-02-17T22:45:36
final_time=2016-02-17T22:45:55
ip_count=19
run=1032
dataset=10
scan=503
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.86407E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.63722E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.32655E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.03552E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.56198E-8
mult1=-9.55978E-9
mult2=-2.50503E-9
rf_tmon=-5.7321E-3
rf_agc=3.35258E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=5.90765E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.61405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05259E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=3.05658E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=2.17764E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05189E0
lens1_imon=1.46374E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04351E1
cs_ea2_imon=1.57028E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.02523E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.72962E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.28517E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15347E1
os_ea1_imon=2.1649E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25564E0
cs_ionrep_imon=1.26907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=3.2912E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=4.21256E-8
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=8.69751E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=2.01341E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.19852E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.10379E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88211E0
os_ea2_imon=-4.93555E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00697E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-4.03741E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.53086E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01443E1
cs_anode2_imon=2.27668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72913E1
iondef1_imon=1.08715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.11208E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.87738E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-2.04647E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0205E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.4716E-6
window_vset=0.0E0
window_vmon=1.35653E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.38926E-4
mask2_vset=0.0E0
mask2_vmon=-1.86014E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.82052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=7.07724E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4528E0
defgridb_imon=6.23486E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.57623E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08314E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64445E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=1.00809E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61819E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66873E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90135E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69644E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.11198E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2229E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.4009E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.9384E-1
res40_imon=-2.69879E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4957E4	1.8E1	1.47E2	4.1E1	-7.33239E-2	-8.8001E1	-5.72205E-4	-8.80008E1	7.15256E-5	5.6982E-3	9.31501E-2	2.7292E1	-3.26676E1	-3.26249E1	2.68221E1	1.69728E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.00151E-1
2.0E0	5.548E3	3.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80009E1	-6.4373E-4	-8.80007E1	2.6226E-4	5.8651E-3	9.3174E-2	2.73262E1	-3.26827E1	-3.26394E1	2.68209E1	1.69786E-7	2.52772E-3	2.52772E-3	6.29721E-3	2.00307E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.8001E1	-4.52995E-4	-8.80004E1	2.38419E-4	5.79357E-3	9.32693E-2	2.72797E1	-3.26767E1	-3.26378E1	2.678E1	1.69645E-7	2.52212E-3	2.52212E-3	6.32174E-3	2.00139E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80011E1	-4.76837E-4	-8.80003E1	4.52995E-4	5.53131E-3	9.31263E-2	2.73105E1	-3.26633E1	-3.2635E1	2.67926E1	1.6987E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.97984E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80011E1	-5.48363E-4	-8.80007E1	4.05312E-4	5.36442E-3	9.29832E-2	2.73075E1	-3.26555E1	-3.26278E1	2.6807E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.98419E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80012E1	-4.52995E-4	-8.80004E1	4.52995E-4	5.65052E-3	9.3174E-2	2.72943E1	-3.26657E1	-3.26002E1	2.67782E1	1.69653E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.97478E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80013E1	0.0E0	-8.80007E1	5.96046E-4	6.07967E-3	9.29832E-2	2.72809E1	-3.26626E1	-3.26408E1	2.68322E1	1.69949E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80009E1	-3.8147E-4	-8.80005E1	4.76837E-4	6.19888E-3	9.32932E-2	2.72929E1	-3.26805E1	-3.26254E1	2.67944E1	1.6987E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00363E-1
1.2E1	3.57E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.8001E1	-3.33786E-4	-8.80005E1	4.29153E-4	5.6982E-3	9.29594E-2	2.73045E1	-3.27127E1	-3.26142E1	2.68208E1	1.69656E-7	2.52473E-3	2.52473E-3	6.3074E-3	2.0153E-1
1.3E1	2.9E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80009E1	-3.09944E-4	-8.80004E1	2.14577E-4	5.81741E-3	9.32455E-2	2.72937E1	-3.26789E1	-3.26242E1	2.67902E1	1.69798E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00192E-1
1.4E1	6.37E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80011E1	-2.86102E-4	-8.80006E1	2.86102E-4	5.67436E-3	9.3317E-2	2.73311E1	-3.26909E1	-3.26001E1	2.67926E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99283E-1
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80011E1	-2.6226E-4	-8.80004E1	2.86102E-4	5.55515E-3	9.31501E-2	2.73063E1	-3.26723E1	-3.2611E1	2.68142E1	1.69725E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9934E-1
1.6E1	3.197E3	1.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80009E1	-4.29153E-4	-8.80008E1	5.00679E-4	5.67436E-3	9.29594E-2	2.72182E1	-3.25495E1	-3.26868E1	2.68117E1	1.69802E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.9911E-1
1.7E1	3.713E4	1.9E1	6.87E2	4.7E2	-7.27053E-2	-8.80011E1	-3.09944E-4	-8.80006E1	3.33786E-4	5.74589E-3	9.30548E-2	2.73251E1	-3.26466E1	-3.26354E1	2.67963E1	1.6979E-7	2.51575E-3	2.51575E-3	6.33341E-3	2.006E-1
1.8E1	1.61968E5	8.6E1	7.27E2	5.0E2	-7.29374E-2	-8.80011E1	-3.8147E-4	-8.80007E1	4.52995E-4	5.84126E-3	9.32217E-2	2.73144E1	-3.26634E1	-3.26079E1	2.68322E1	1.69581E-7	2.5118E-3	2.5118E-3	6.32483E-3	2.01125E-1
1.9E1	3.682E3	4.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80012E1	-2.14577E-4	-8.80008E1	1.43051E-4	5.26905E-3	9.3174E-2	2.73009E1	-3.26416E1	-3.26482E1	2.67644E1	1.69648E-7	2.51723E-3	2.51723E-3	6.3275E-3	2.00183E-1
2.0E1	3.29E2	2.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80012E1	-4.29153E-4	-8.80005E1	-2.38419E-4	5.50747E-3	9.30071E-2	2.73051E1	-3.26542E1	-3.26438E1	2.68508E1	1.69581E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99283E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80012E1	-4.05312E-4	-8.80008E1	4.29153E-4	5.65052E-3	9.30786E-2	2.72933E1	-3.2662E1	-3.26012E1	2.68204E1	1.69728E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.99283E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.8001E1	-3.57628E-4	-8.80007E1	2.6226E-4	5.53131E-3	9.3317E-2	2.73204E1	-3.26461E1	-3.26561E1	2.68076E1	1.69798E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9883E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.8001E1	-3.09944E-4	-8.80006E1	2.6226E-4	5.57899E-3	9.29594E-2	2.72913E1	-3.2638E1	-3.26464E1	2.6783E1	1.69725E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.98661E-1