[Scan]
initial_time=2016-02-17T22:46:56
final_time=2016-02-17T22:47:15
ip_count=19
run=1032
dataset=10
scan=506
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.74963E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.81686E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.32453E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.02099E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.56035E-8
mult1=-9.68019E-9
mult2=-3.32942E-9
rf_tmon=-2.8902E-3
rf_agc=3.35138E-2
counter1=9
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=5.63705E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2006E1
lens5a_imon=1.97235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=3.06384E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=2.18012E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02652E0
lens1_imon=1.62655E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64498E1
os_ef1alow_imon=2.96966E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03785E1
cs_ea2_imon=1.58125E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=3.00928E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.72845E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11158E1
os_restr1_imon=4.26663E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15412E1
os_ea1_imon=2.18437E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63919E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26979E0
cs_ionrep_imon=1.27084E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93275E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01491E1
cs_anode1_imon=3.27896E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=4.2096E-8
tplens_vset=1.4E-1
tplens_vmon=1.60132E0
tplens_imon=-3.66136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25539E1
iondef3_imon=1.52639E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27636E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.61526E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=2.01483E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83964E0
os_ea2_imon=-6.88222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71003E1
cs_ef2a_imon=3.16636E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11248E0
os_ef2alow_imon=-2.61976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.55152E-1
os_ef2bup_imon=-5.45209E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10764E1
os_restr2_imon=3.54273E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.27809E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73784E1
iondef1_imon=1.08927E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.08885E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.11709E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.85964E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1342E0
cs_ionaccel_imon=-2.10195E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56156E1
einzel_imon=7.63919E-6
window_vset=0.0E0
window_vmon=2.0726E-1
window_imon=-1.03852E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39022E-4
mask2_vset=0.0E0
mask2_vmon=-1.8591E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.59753E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93761E3
defgrida_imon=6.38706E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.63293E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.07205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.5898E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07196E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64646E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30863E1
cs_fil1_imon=1.00688E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66959E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78738E-2
os_fil2_imon=-2.67498E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96448E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4699E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.18844E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.97552E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22538E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.00673E-1
chamber_ion_pmon=1.70097E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52256E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4625E4	1.7E1	1.47E2	4.1E1	-7.17007E-2	-8.80011E1	1.19209E-4	-8.80001E1	2.38419E-4	5.8651E-3	9.33886E-2	2.72992E1	-3.26738E1	-3.2636E1	2.6792E1	1.69725E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00192E-1
2.0E0	5.674E3	6.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80012E1	3.57628E-4	-8.80005E1	-1.19209E-4	5.67436E-3	9.34124E-2	2.73186E1	-3.26554E1	-3.26327E1	2.6792E1	1.69652E-7	2.51287E-3	2.51287E-3	6.33388E-3	1.98894E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80012E1	2.6226E-4	-8.80004E1	-1.66893E-4	5.45979E-3	9.34124E-2	2.73151E1	-3.26897E1	-3.2649E1	2.68023E1	1.69887E-7	2.51838E-3	2.51838E-3	6.3245E-3	1.98446E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80015E1	1.66893E-4	-8.80003E1	-3.09944E-4	5.43594E-3	9.35793E-2	2.73045E1	-3.26555E1	-3.26213E1	2.6833E1	1.69794E-7	2.51603E-3	2.51603E-3	6.31798E-3	1.97731E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80011E1	-2.6226E-4	-8.80004E1	-3.09944E-4	5.6982E-3	9.31263E-2	2.72937E1	-3.26609E1	-3.26302E1	2.67842E1	1.69802E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.98764E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80012E1	-4.05312E-4	-8.80004E1	-1.19209E-4	5.98431E-3	9.32455E-2	2.73106E1	-3.26419E1	-3.26089E1	2.6792E1	1.69654E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80014E1	-3.09944E-4	-8.80003E1	-1.66893E-4	5.84126E-3	9.33647E-2	2.72802E1	-3.26637E1	-3.26503E1	2.68117E1	1.69728E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80014E1	-3.09944E-4	-8.80005E1	1.19209E-4	6.00815E-3	9.35078E-2	2.73294E1	-3.26454E1	-3.26279E1	2.68331E1	1.69943E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.00192E-1
1.2E1	3.21E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80014E1	-5.72205E-4	-8.80001E1	-7.15256E-5	5.88894E-3	9.33409E-2	2.72907E1	-3.26428E1	-3.2626E1	2.68118E1	1.69963E-7	2.52179E-3	2.52179E-3	6.3074E-3	2.00244E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80012E1	-6.19888E-4	-8.80004E1	-2.14577E-4	5.38826E-3	9.33647E-2	2.73081E1	-3.26633E1	-3.26302E1	2.6783E1	1.69802E-7	2.52647E-3	2.52647E-3	6.32936E-3	1.99803E-1
1.4E1	7.0E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80012E1	-1.90735E-4	-8.80005E1	7.15256E-5	5.79357E-3	9.32932E-2	2.72991E1	-3.26603E1	-3.26074E1	2.67866E1	1.70023E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.9911E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80009E1	-4.76837E-5	-8.80002E1	0.0E0	5.6982E-3	9.3317E-2	2.72839E1	-3.26667E1	-3.26773E1	2.68018E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.98764E-1
1.6E1	3.12E3	1.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80011E1	-1.90735E-4	-8.80004E1	3.09944E-4	5.88894E-3	9.34362E-2	2.73826E1	-3.27582E1	-3.25749E1	2.67559E1	1.698E-7	2.52189E-3	2.52189E-3	6.31012E-3	1.99226E-1
1.7E1	3.7085E4	2.2E1	6.87E2	4.7E2	-7.20871E-2	-8.8001E1	-5.24521E-4	-8.80004E1	5.24521E-4	5.76973E-3	9.35793E-2	2.73004E1	-3.2659E1	-3.25912E1	2.67854E1					
1.8E1	1.61154E5	1.02E2	7.27E2	5.0E2	-7.24736E-2	-8.80009E1	-5.00679E-4	-8.80007E1	3.8147E-4	6.10352E-3	9.32455E-2	2.73472E1	-3.26801E1	-3.26344E1	2.6807E1	1.69581E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9917E-1
1.9E1	3.574E3	2.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80014E1	-2.86102E-4	-8.80006E1	-7.15256E-5	5.79357E-3	9.33647E-2	2.72968E1	-3.26549E1	-3.26349E1	2.68024E1	1.69949E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.98937E-1
2.0E1	2.99E2	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80013E1	-2.86102E-4	-8.80006E1	0.0E0	6.1512E-3	9.32455E-2	2.73117E1	-3.26747E1	-3.26314E1	2.67986E1	1.69725E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80011E1	-4.05312E-4	-8.80007E1	1.43051E-4	5.81741E-3	9.30548E-2	2.72925E1	-3.26476E1	-3.26416E1	2.67824E1	1.69728E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80013E1	-4.52995E-4	-8.80005E1	1.43051E-4	5.67436E-3	9.31501E-2	2.7311E1	-3.26797E1	-3.26154E1	2.68094E1	1.6987E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.00021E-1
2.3E1	9.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.80011E1	-3.09944E-4	-8.80003E1	4.76837E-4	6.07967E-3	9.35078E-2	2.73784E1	-3.27636E1	-3.25539E1	2.67992E1	1.70097E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.00673E-1