[Scan]
initial_time=2016-02-17T22:48:43
final_time=2016-02-17T22:49:02
ip_count=19
run=1032
dataset=10
scan=510
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.78668E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.7054E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.35009E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.84406E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.55966E-8
mult1=-1.02205E-8
mult2=-2.66446E-9
rf_tmon=-5.29404E-3
rf_agc=3.23653E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=5.68259E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.06454E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0467E2
lens23_imon=1.02068E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=2.18047E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0218E0
lens1_imon=1.33278E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64597E1
os_ef1alow_imon=2.97835E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03655E1
cs_ea2_imon=1.57594E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=3.01484E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.72749E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11332E1
os_restr1_imon=4.26072E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=2.1826E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63438E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28218E0
cs_ionrep_imon=1.27014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=3.28556E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=4.20692E-8
tplens_vset=1.4E-1
tplens_vmon=1.62256E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26408E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98601E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.82757E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24974E0
ionrepsh_imon=2.00598E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33835E1
lens5b_imon=2.19923E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74646E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8886E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.0075E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.17574E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.66494E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.69053E-1
os_ef2bup_imon=-5.42777E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.53196E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.31132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.28121E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72933E1
iondef1_imon=1.09458E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68065E1
iondef4_imon=1.07669E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.11218E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.86062E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10639E0
cs_ionaccel_imon=-2.18188E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.73302E-6
window_vset=0.0E0
window_vmon=1.783E-1
window_imon=-1.21923E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39164E-4
mask2_vset=0.0E0
mask2_vmon=-1.85956E1
mask2_imon=-6.42342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.53736E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.63481E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.02769E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38193E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.58238E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64417E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=1.00606E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61538E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66874E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.87603E-2
os_fil2_imon=-2.68656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74579E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.6576E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35028E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22449E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.33721E-1
res40_imon=-2.62324E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4857E4	1.3E1	1.47E2	4.1E1	-7.34782E-2	-8.8001E1	-2.38419E-4	-8.80007E1	2.38419E-5	5.62668E-3	9.3174E-2	2.73105E1	-3.26825E1	-3.26218E1	2.67992E1	1.69802E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99977E-1
2.0E0	5.613E3	1.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80009E1	-1.43051E-4	-8.80007E1	1.43051E-4	5.76973E-3	9.34601E-2	2.73124E1	-3.26823E1	-3.2626E1	2.67966E1	1.69653E-7	2.52169E-3	2.52169E-3	6.28056E-3	1.9985E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80011E1	-2.6226E-4	-8.80003E1	4.76837E-5	5.6982E-3	9.34362E-2	2.7321E1	-3.26514E1	-3.26502E1	2.6794E1	1.69881E-7	2.5225E-3	2.5225E-3	6.31299E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80013E1	-4.76837E-5	-8.80001E1	1.43051E-4	5.74589E-3	9.33409E-2	2.73145E1	-3.26649E1	-3.26266E1	2.67788E1	1.6987E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80012E1	-1.90735E-4	-8.80004E1	9.53674E-5	5.67436E-3	9.33409E-2	2.73045E1	-3.26693E1	-3.25996E1	2.68112E1	1.69802E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80012E1	7.15256E-5	-8.80001E1	-1.43051E-4	5.74589E-3	9.34362E-2	2.72991E1	-3.26482E1	-3.265E1	2.68202E1	1.69875E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.01022E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80013E1	-4.76837E-5	-8.79999E1	2.38419E-5	5.98431E-3	9.33886E-2	2.73155E1	-3.26419E1	-3.26407E1	2.6819E1	1.69949E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00847E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80013E1	-3.57628E-4	-8.79999E1	1.90735E-4	5.74589E-3	9.32693E-2	2.73175E1	-3.26248E1	-3.26555E1	2.68124E1	1.69654E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99977E-1
1.2E1	3.53E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80012E1	-2.6226E-4	-8.80002E1	-9.53674E-5	5.4121E-3	9.34362E-2	2.72985E1	-3.26609E1	-3.2638E1	2.6804E1	1.69875E-7	2.52428E-3	2.52428E-3	6.34037E-3	2.00499E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.8001E1	-1.19209E-4	-8.80003E1	3.09944E-4	5.4121E-3	9.33409E-2	2.73285E1	-3.26723E1	-3.2617E1	2.68352E1	1.69949E-7	2.52977E-3	2.52977E-3	6.31837E-3	1.99803E-1
1.4E1	6.45E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80011E1	-1.66893E-4	-8.80007E1	2.6226E-4	5.72205E-3	9.35793E-2	2.73039E1	-3.26735E1	-3.2605E1	2.6801E1	1.69654E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98419E-1
1.5E1	8.9E1	1.0E0	6.06E2	4.11E2	-7.32464E-2	-8.8001E1	-1.66893E-4	-8.80004E1	3.09944E-4	5.79357E-3	9.34362E-2	2.73145E1	-3.26726E1	-3.26343E1	2.67711E1	1.69653E-7	2.52707E-3	2.52707E-3	6.31817E-3	1.99E-1
1.6E1	3.133E3	1.0E0	6.47E2	4.41E2	-7.3401E-2	-8.8001E1	-9.53674E-5	-8.80003E1	1.66893E-4	5.67436E-3	9.33886E-2	2.73057E1	-3.26236E1	-3.25552E1	2.67998E1	1.69798E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.98322E-1
1.7E1	3.7409E4	2.4E1	6.87E2	4.7E2	-7.30918E-2	-8.8001E1	1.66893E-4	-8.80006E1	1.90735E-4	5.43594E-3	9.32455E-2	2.73143E1	-3.26682E1	-3.26217E1	2.6798E1	1.69654E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.9963E-1
1.8E1	1.62827E5	7.5E1	7.27E2	5.0E2	-7.35556E-2	-8.80012E1	-1.90735E-4	-8.80003E1	1.19209E-4	5.48363E-3	9.31978E-2	2.73051E1	-3.26783E1	-3.2629E1	2.67902E1	1.69728E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00325E-1
1.9E1	3.437E3	3.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80014E1	-3.8147E-4	-8.80003E1	2.86102E-4	5.19753E-3	9.31978E-2	2.73009E1	-3.26843E1	-3.26368E1	2.68004E1	1.69654E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00499E-1
2.0E1	3.44E2	0.0E0	8.08E2	5.58E2	-7.47923E-2	-8.80013E1	-3.8147E-4	-8.80003E1	2.86102E-4	5.57899E-3	9.31978E-2	2.72991E1	-3.26434E1	-3.26464E1	2.68256E1	1.69875E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.98419E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80011E1	-2.14577E-4	-8.80006E1	2.38419E-5	5.19753E-3	9.31978E-2	2.73387E1	-3.26784E1	-3.2638E1	2.67879E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99803E-1
2.2E1	3.4E1	1.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80012E1	-4.05312E-4	-8.80002E1	1.43051E-4	5.29289E-3	9.32455E-2	2.72901E1	-3.26609E1	-3.26615E1	2.68022E1	1.69723E-7	2.52131E-3	2.52131E-3	6.31798E-3	1.99227E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80012E1	-2.14577E-4	-8.80006E1	3.8147E-4	5.55515E-3	9.35078E-2	2.72933E1	-3.26531E1	-3.26408E1	2.68065E1	1.69725E-7	2.52707E-3	2.52707E-3	6.29128E-3	2.00021E-1