[Scan]
initial_time=2016-02-17T22:49:09
final_time=2016-02-17T22:49:29
ip_count=19
run=1032
dataset=10
scan=511
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.8123E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.4162E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.30286E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.91715E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.5578E-8
mult1=-8.96979E-9
mult2=-2.71661E-9
rf_tmon=-4.81885E-3
rf_agc=3.35198E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=5.61595E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=2.00759E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12536E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.08289E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02045E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=2.1662E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02273E0
lens1_imon=1.60767E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64458E1
os_ef1alow_imon=2.96252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.56742E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.01045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.72732E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11039E1
os_restr1_imon=4.26463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15618E1
os_ea1_imon=2.17522E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27313E0
cs_ionrep_imon=1.26713E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.28687E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=4.20045E-8
tplens_vset=1.4E-1
tplens_vmon=1.6192E0
tplens_imon=-3.78655E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26903E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98623E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.96454E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=2.00542E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34066E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86494E0
os_ea2_imon=-3.31791E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0616E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.716E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.71305E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=3.54023E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31478E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.27921E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.07787E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.11089E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83238E-1
olens1_imon=9.85946E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-2.13297E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=1.71692E-1
window_imon=-1.22477E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.85743E1
mask2_imon=-9.32847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.55224E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.27609E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.40804E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.26527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33298E1
os_fil1_imon=9.58836E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06759E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64523E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=1.00492E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6248E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66998E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73837E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66824E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22545E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.19358E-1
res40_imon=-2.6159E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4803E4	1.0E1	1.47E2	4.1E1	-7.38649E-2	-8.80016E1	-3.33786E-4	-8.80006E1	1.43051E-4	5.50747E-3	9.31025E-2	2.73193E1	-3.26703E1	-3.26561E1	2.67926E1	1.69875E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99456E-1
2.0E0	5.653E3	9.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80017E1	1.43051E-4	-8.80004E1	1.19209E-4	5.76973E-3	9.29832E-2	2.73479E1	-3.26787E1	-3.26395E1	2.67701E1	1.69725E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9934E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80015E1	0.0E0	-8.80004E1	-1.43051E-4	5.96046E-3	9.30071E-2	2.73163E1	-3.2649E1	-3.26425E1	2.68169E1	1.69731E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.00108E-1
4.0E0	0.0E0	1.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80015E1	0.0E0	-8.80002E1	1.19209E-4	5.6982E-3	9.28879E-2	2.73093E1	-3.26909E1	-3.26506E1	2.68172E1	1.6987E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80015E1	-4.76837E-5	-8.80003E1	0.0E0	5.76973E-3	9.27687E-2	2.72841E1	-3.26825E1	-3.26362E1	2.6783E1	1.69728E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80016E1	-1.43051E-4	-8.80003E1	1.90735E-4	5.98431E-3	9.31263E-2	2.7344E1	-3.26537E1	-3.26384E1	2.68016E1	1.69875E-7	2.52757E-3	2.52757E-3	6.31288E-3	2.01022E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80016E1	-7.15256E-5	-8.80006E1	-1.19209E-4	5.45979E-3	9.33409E-2	2.72985E1	-3.26783E1	-3.26506E1	2.68232E1	1.69798E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00021E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80015E1	-3.57628E-4	-8.80004E1	2.38419E-4	5.74589E-3	9.31978E-2	2.73173E1	-3.26927E1	-3.26425E1	2.68004E1	1.69731E-7	2.52362E-3	2.52362E-3	6.31299E-3	1.99048E-1
1.2E1	3.33E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80017E1	-7.15256E-5	-8.80005E1	1.43051E-4	5.96046E-3	9.30548E-2	2.73216E1	-3.26697E1	-3.26183E1	2.68166E1	1.69802E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.99977E-1
1.3E1	2.6E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80014E1	-3.33786E-4	-8.80004E1	-2.38419E-5	5.60284E-3	9.32932E-2	2.73039E1	-3.26868E1	-3.26498E1	2.67995E1	1.70097E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.9911E-1
1.4E1	7.2E2	1.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80018E1	-3.09944E-4	-8.80005E1	2.14577E-4	5.57899E-3	9.34124E-2	2.73126E1	-3.26597E1	-3.25942E1	2.6816E1	1.6965E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99119E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80017E1	-1.66893E-4	-8.80007E1	-7.15256E-5	5.79357E-3	9.30786E-2	2.72937E1	-3.26397E1	-3.26357E1	2.68157E1	1.69839E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98419E-1
1.6E1	3.114E3	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80016E1	-6.67572E-4	-8.80007E1	2.38419E-5	5.65052E-3	9.30786E-2	2.72377E1	-3.25961E1	-3.27526E1	2.68114E1					
1.7E1	3.7799E4	1.9E1	6.87E2	4.7E2	-7.31692E-2	-8.80014E1	-6.19888E-4	-8.80003E1	3.8147E-4	5.31673E-3	9.33409E-2	2.72961E1	-3.26591E1	-3.26416E1	2.67962E1	1.69657E-7	2.51384E-3	2.51384E-3	6.3074E-3	1.99163E-1
1.8E1	1.6222E5	8.8E1	7.27E2	5.0E2	-7.30918E-2	-8.80017E1	-5.48363E-4	-8.80005E1	2.14577E-4	5.50747E-3	9.30309E-2	2.73027E1	-3.26753E1	-3.26182E1	2.6825E1	1.69802E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98075E-1
1.9E1	3.629E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80012E1	-5.96046E-4	-8.80005E1	2.38419E-5	5.36442E-3	9.33886E-2	2.73328E1	-3.26956E1	-3.26296E1	2.67839E1	1.69654E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.9963E-1
2.0E1	3.09E2	1.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80012E1	-1.04904E-3	-8.80005E1	1.43051E-4	5.57899E-3	9.36985E-2	2.73021E1	-3.26693E1	-3.26518E1	2.6807E1	1.69654E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00325E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80011E1	-5.96046E-4	-8.80005E1	2.38419E-4	5.81741E-3	9.32455E-2	2.7301E1	-3.26484E1	-3.2629E1	2.68046E1	1.69943E-7	2.51847E-3	2.51847E-3	6.34518E-3	2.00705E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80016E1	-3.57628E-4	-8.80003E1	2.38419E-5	5.6982E-3	9.36031E-2	2.72697E1	-3.26962E1	-3.26313E1	2.68151E1	1.69653E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00876E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80013E1	-4.29153E-4	-8.80002E1	1.90735E-4	5.36442E-3	9.33886E-2	2.73039E1	-3.26903E1	-3.25996E1	2.67914E1	1.69653E-7	2.52492E-3	2.52492E-3	6.3074E-3	1.9917E-1