[Scan]
initial_time=2016-02-17T22:50:03
final_time=2016-02-17T22:50:22
ip_count=19
run=1032
dataset=10
scan=513
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.78691E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.60336E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.32829E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-1.88305E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.56143E-8
mult1=-9.8921E-9
mult2=-2.79207E-9
rf_tmon=-4.53766E-3
rf_agc=3.38623E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=5.66101E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.53054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20091E1
lens5a_imon=1.96973E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05291E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.06019E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=2.18675E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06419E0
lens1_imon=1.45627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.56994E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84046E1
cs_ef1a_imon=3.00613E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.72754E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.16873E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63377E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.26172E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01581E1
cs_anode1_imon=3.28327E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=4.1988E-8
tplens_vset=1.4E-1
tplens_vmon=1.59757E0
tplens_imon=-1.98407E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.49063E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26758E1
iondef2_imon=1.59914E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98285E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.46541E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=2.01119E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82709E0
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.17335E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08459E0
os_ef2alow_imon=-2.73123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.665E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.53411E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.31226E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02019E1
cs_anode2_imon=2.26659E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68131E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.11362E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.87044E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.8731E-1
window_imon=-1.15629E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.8602E1
mask2_imon=-8.13916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.3756E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.10162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.22201E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.58079E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07023E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64603E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=1.00625E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61939E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67003E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6223E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70562E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.07965E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22568E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.69158E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4899E4	1.4E1	1.47E2	4.1E1	-7.34782E-2	-8.80016E1	-6.91414E-4	-8.80007E1	4.76837E-5	5.4121E-3	9.3317E-2	2.73246E1	-3.26596E1	-3.26107E1	2.67842E1	1.69654E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.99456E-1
2.0E0	5.489E3	5.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80014E1	-6.4373E-4	-8.80008E1	2.6226E-4	5.4121E-3	9.3317E-2	2.7332E1	-3.26578E1	-3.26272E1	2.6795E1	1.69943E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9985E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80016E1	-4.52995E-4	-8.80009E1	-2.38419E-5	5.26905E-3	9.35078E-2	2.73086E1	-3.26567E1	-3.26331E1	2.68034E1	1.69656E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80017E1	-5.24521E-4	-8.80005E1	9.53674E-5	5.67436E-3	9.34124E-2	2.72685E1	-3.26337E1	-3.26526E1	2.67833E1	1.69725E-7	2.50668E-3	2.50668E-3	6.32896E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80013E1	-4.05312E-4	-8.80006E1	3.57628E-4	5.34058E-3	9.34839E-2	2.73069E1	-3.25991E1	-3.26591E1	2.68262E1	1.69725E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00534E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.39421E-2	-8.80015E1	-4.76837E-4	-8.80009E1	0.0E0	5.45979E-3	9.33647E-2	2.72949E1	-3.26837E1	-3.26278E1	2.67876E1	1.69731E-7	2.51915E-3	2.51915E-3	6.3074E-3	1.99754E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80012E1	-3.09944E-4	-8.80005E1	-2.6226E-4	5.65052E-3	9.34362E-2	2.72815E1	-3.26567E1	-3.26278E1	2.68151E1	1.69654E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80014E1	-1.90735E-4	-8.80006E1	-1.43051E-4	5.31673E-3	9.32932E-2	2.7301E1	-3.26384E1	-3.2629E1	2.6817E1	1.69725E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9917E-1
1.2E1	3.29E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80014E1	-4.76837E-5	-8.80008E1	-2.38419E-5	5.62668E-3	9.34124E-2	2.73008E1	-3.26554E1	-3.26474E1	2.68076E1	1.70015E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.9951E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80013E1	-2.14577E-4	-8.80006E1	0.0E0	5.96046E-3	9.3174E-2	2.72877E1	-3.26536E1	-3.26458E1	2.67962E1	1.69806E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.00996E-1
1.4E1	6.91E2	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80012E1	-4.76837E-5	-8.80003E1	9.53674E-5	5.79357E-3	9.32693E-2	2.73134E1	-3.26461E1	-3.2685E1	2.6816E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.99977E-1
1.5E1	1.13E2	1.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80014E1	-1.66893E-4	-8.80005E1	7.15256E-5	5.84126E-3	9.33886E-2	2.73063E1	-3.26831E1	-3.26338E1	2.67794E1	1.69725E-7	2.51525E-3	2.51525E-3	6.35059E-3	1.9917E-1
1.6E1	3.172E3	3.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80017E1	-1.19209E-4	-8.80006E1	0.0E0	5.72205E-3	9.36031E-2	2.73964E1	-3.27005E1	-3.25545E1	2.681E1	1.69581E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.99283E-1
1.7E1	3.7543E4	1.3E1	6.87E2	4.7E2	-7.23964E-2	-8.80017E1	-2.38419E-4	-8.80003E1	0.0E0	5.6982E-3	9.35555E-2	2.72739E1	-3.26741E1	-3.26639E1	2.67804E1	1.69802E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.99283E-1
1.8E1	1.61857E5	9.4E1	7.27E2	5.0E2	-7.286E-2	-8.80015E1	4.76837E-5	-8.80006E1	1.43051E-4	5.76973E-3	9.31263E-2	2.73057E1	-3.26767E1	-3.26195E1	2.68148E1	1.69654E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.01022E-1
1.9E1	3.556E3	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80018E1	-2.38419E-5	-8.80009E1	-2.86102E-4	5.91278E-3	9.38654E-2	2.73213E1	-3.26176E1	-3.26651E1	2.67986E1	1.69725E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.00192E-1
2.0E1	3.03E2	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80017E1	-4.76837E-5	-8.80007E1	2.14577E-4	5.48363E-3	9.35316E-2	2.73061E1	-3.26672E1	-3.26116E1	2.68181E1	1.70171E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.9963E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80018E1	-1.66893E-4	-8.80007E1	2.14577E-4	5.22137E-3	9.33647E-2	2.73132E1	-3.2659E1	-3.26324E1	2.67972E1	1.69644E-7	2.51428E-3	2.51428E-3	6.29801E-3	1.99283E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80019E1	-3.33786E-4	-8.80007E1	1.19209E-4	5.50747E-3	9.32932E-2	2.73448E1	-3.26867E1	-3.25984E1	2.68166E1	1.69725E-7	2.52008E-3	2.52008E-3	6.32896E-3	1.98915E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80021E1	-2.86102E-4	-8.80009E1	-2.38419E-5	5.65052E-3	9.36508E-2	2.73051E1	-3.26758E1	-3.26296E1	2.68131E1