[Scan]
initial_time=2016-02-17T22:50:56
final_time=2016-02-17T22:51:15
ip_count=19
run=1032
dataset=10
scan=515
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.77119E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.7023E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.32725E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.85465E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.56097E-8
mult1=-1.01255E-8
mult2=-2.68735E-9
rf_tmon=-3.54827E-3
rf_agc=3.46139E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=5.44119E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.32146E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20055E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53511E1
cs_ef1b_imon=3.04716E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.18603E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05698E0
lens1_imon=1.41661E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64539E1
os_ef1alow_imon=2.99434E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04117E1
cs_ea2_imon=1.56382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.98565E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.73059E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10897E1
os_restr1_imon=4.28261E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15546E1
os_ea1_imon=2.19072E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63769E1
os_ef1bup_imon=3.07878E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.26569E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01578E1
cs_anode1_imon=3.28035E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=4.20175E-8
tplens_vset=1.4E-1
tplens_vmon=1.58676E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26474E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26799E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.9845E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.53384E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=2.03318E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13891E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8355E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06164E2
lens4b_imon=2.0067E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.17505E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08236E0
os_ef2alow_imon=-2.59543E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.61523E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10689E1
os_restr2_imon=3.53335E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02203E1
cs_anode2_imon=2.26558E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7318E1
iondef1_imon=1.10671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.678E1
iondef4_imon=1.076E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.11255E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=9.86135E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14578E0
cs_ionaccel_imon=-2.01507E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.46962E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56388E1
einzel_imon=7.98324E-6
window_vset=0.0E0
window_vmon=1.59765E-1
window_imon=-1.12193E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39195E-4
mask2_vset=0.0E0
mask2_vmon=-1.8624E1
mask2_imon=-8.57807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.54503E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.56809E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.41165E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.27248E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33305E1
os_fil1_imon=9.59385E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64614E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=1.00704E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61688E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66929E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69968E-2
os_fil2_imon=-2.6576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55997E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.82557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.22255E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2261E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.97984E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.26974E-1
res40_imon=-2.58153E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=198
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4884E4	1.2E1	1.47E2	4.1E1	-7.19325E-2	-8.80019E1	-1.66893E-4	-8.80005E1	1.90735E-4	5.74589E-3	9.31025E-2	2.73294E1	-3.26243E1	-3.26005E1	2.68088E1	1.69798E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.98661E-1
2.0E0	5.705E3	5.0E0	3.16E2	1.6E2	-7.08504E-2	-8.80015E1	-3.57628E-4	-8.80003E1	9.53674E-5	5.88894E-3	9.35078E-2	2.73075E1	-3.26713E1	-3.26505E1	2.68028E1	1.69765E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.98678E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80014E1	-4.05312E-4	-8.80003E1	2.38419E-4	5.74589E-3	9.32693E-2	2.73311E1	-3.26762E1	-3.26095E1	2.67818E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80014E1	-4.29153E-4	-8.80005E1	0.0E0	5.79357E-3	9.31025E-2	2.73086E1	-3.26885E1	-3.26467E1	2.68088E1	1.69798E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80014E1	-2.38419E-4	-8.80007E1	-1.19209E-4	5.84126E-3	9.34839E-2	2.72811E1	-3.26957E1	-3.2644E1	2.67944E1	1.69798E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80016E1	-5.00679E-4	-8.80006E1	4.76837E-5	5.74589E-3	9.32932E-2	2.73183E1	-3.26651E1	-3.26368E1	2.6819E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80017E1	-6.4373E-4	-8.80006E1	7.15256E-5	5.4121E-3	9.33409E-2	2.73171E1	-3.265E1	-3.26422E1	2.68328E1	1.69725E-7	2.52599E-3	2.52599E-3	6.30202E-3	1.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80016E1	-5.00679E-4	-8.80006E1	1.19209E-4	5.26905E-3	9.32932E-2	2.73128E1	-3.26974E1	-3.26071E1	2.68376E1	1.69806E-7	2.51581E-3	2.51581E-3	6.34099E-3	1.98872E-1
1.2E1	3.5E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80015E1	-2.6226E-4	-8.80004E1	1.66893E-4	5.65052E-3	9.31501E-2	2.73159E1	-3.26278E1	-3.26044E1	2.681E1	1.6987E-7	2.52599E-3	2.52599E-3	6.30202E-3	1.9951E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80015E1	9.53674E-5	-8.80003E1	9.53674E-5	5.55515E-3	9.35078E-2	2.73045E1	-3.27101E1	-3.26134E1	2.67739E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00325E-1
1.4E1	6.66E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80014E1	0.0E0	-8.80002E1	2.38419E-5	5.60284E-3	9.3317E-2	2.73129E1	-3.26807E1	-3.2623E1	2.67974E1	1.69949E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99456E-1
1.5E1	9.3E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80015E1	-1.43051E-4	-8.80002E1	-2.38419E-5	5.6982E-3	9.32932E-2	2.73129E1	-3.26909E1	-3.26302E1	2.67818E1	1.69949E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99283E-1
1.6E1	3.274E3	3.0E0	6.47E2	4.41E2	-7.201E-2	-8.80019E1	-1.90735E-4	-8.80002E1	1.19209E-4	5.67436E-3	9.35078E-2	2.73442E1	-3.27396E1	-3.27294E1	2.67559E1	1.69654E-7	2.51552E-3	2.51552E-3	6.28552E-3	1.99283E-1
1.7E1	3.7125E4	2.1E1	6.87E2	4.7E2	-7.24736E-2	-8.80013E1	-4.76837E-5	-8.80003E1	0.0E0	5.57899E-3	9.33647E-2	2.73177E1	-3.26753E1	-3.26296E1	2.68099E1	1.69802E-7	2.52538E-3	2.52538E-3	6.29645E-3	1.99977E-1
1.8E1	1.62273E5	9.5E1	7.27E2	5.0E2	-7.19325E-2	-8.80013E1	-1.19209E-4	-8.80003E1	4.05312E-4	6.1512E-3	9.32932E-2	2.73269E1	-3.26537E1	-3.26195E1	2.68052E1	1.69802E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00673E-1
1.9E1	3.586E3	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80013E1	-9.53674E-5	-8.80005E1	3.8147E-4	5.6982E-3	9.32455E-2	2.72889E1	-3.26663E1	-3.26386E1	2.67686E1	1.69798E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.98322E-1
2.0E1	3.12E2	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80013E1	4.76837E-5	-8.80006E1	7.15256E-5	5.74589E-3	9.3174E-2	2.7311E1	-3.26726E1	-3.26408E1	2.68118E1	1.69875E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98764E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80013E1	-3.57628E-4	-8.80004E1	2.38419E-5	5.81741E-3	9.33886E-2	2.72847E1	-3.26627E1	-3.26122E1	2.68052E1	1.69798E-7	2.52061E-3	2.52061E-3	6.33977E-3	1.98491E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80016E1	-2.86102E-4	-8.80003E1	2.14577E-4	5.79357E-3	9.35316E-2	2.73187E1	-3.27015E1	-3.26183E1	2.68036E1	1.69802E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.98419E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80019E1	-3.09944E-4	-8.80005E1	2.14577E-4	5.60284E-3	9.35078E-2	2.7318E1	-3.26799E1	-3.26474E1	2.678E1	1.69581E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.97984E-1