[Scan]
initial_time=2016-02-17T22:51:49
final_time=2016-02-17T22:52:09
ip_count=19
run=1032
dataset=10
scan=517
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.75002E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.3529E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.3435E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.82208E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.56002E-8
mult1=-1.36133E-8
mult2=-3.08778E-9
rf_tmon=2.04433E-3
rf_agc=4.06357E-2
counter1=11
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=5.80621E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66107E0
bslens_imon=2.63895E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20135E1
lens5a_imon=1.99365E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53765E1
cs_ef1b_imon=3.06557E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04657E2
lens23_imon=1.02246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04768E1
cs_ea1_imon=2.15843E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98615E0
lens1_imon=1.72818E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64703E1
os_ef1alow_imon=2.98336E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.55496E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.00014E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.73217E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11347E1
os_restr1_imon=4.26714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15804E1
os_ea1_imon=2.19215E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63585E1
os_ef1bup_imon=3.08838E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25094E0
cs_ionrep_imon=1.26018E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01882E1
cs_anode1_imon=3.28535E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=4.2081E-8
tplens_vset=1.4E-1
tplens_vmon=1.62E0
tplens_imon=-5.62636E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26992E1
iondef3_imon=1.50525E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27298E1
iondef2_imon=1.57477E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.9868E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=9.02689E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=2.00721E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3346E1
lens5b_imon=2.18554E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74384E1
cs_ef2b_imon=3.11355E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87724E0
os_ea2_imon=-6.94732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00585E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.17864E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06798E0
os_ef2alow_imon=-2.75422E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.62482E-1
os_ef2bup_imon=-5.34795E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10648E1
os_restr2_imon=3.53499E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.31388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.29013E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.09332E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.07648E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.114E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=9.88884E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12231E0
cs_ionaccel_imon=-2.05293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47243E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56187E1
einzel_imon=7.76501E-6
window_vset=0.0E0
window_vmon=1.69352E-1
window_imon=-1.11677E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39191E-4
mask2_vset=0.0E0
mask2_vmon=-1.85802E1
mask2_imon=-7.30901E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.65511E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.67482E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.11978E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47611E0
defgridb_imon=6.17773E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.58672E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07413E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64485E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=1.00622E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62176E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66918E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6854E-2
os_fil2_imon=-2.64981E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90796E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73357E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34594E-1
cs_fil2_imon=-2.46526E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17452E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22597E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64159E-1
res40_imon=-2.67369E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=260
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4616E4	1.4E1	1.47E2	4.1E1	-7.14689E-2	-8.80012E1	-4.29153E-4	-8.80005E1	-4.76837E-5	5.45979E-3	9.36508E-2	2.73014E1	-3.26713E1	-3.26511E1	2.67857E1	1.6986E-7	2.51575E-3	2.51575E-3	6.3282E-3	2.00105E-1
2.0E0	5.556E3	4.0E0	3.16E2	1.6E2	-7.10051E-2	-8.80014E1	-1.66893E-4	-8.80007E1	7.15256E-5	5.57899E-3	9.30309E-2	2.73094E1	-3.26811E1	-3.26211E1	2.68082E1	1.69881E-7	2.50803E-3	2.50803E-3	6.29067E-3	1.99577E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80015E1	-5.00679E-4	-8.80006E1	3.33786E-4	5.55515E-3	9.31263E-2	2.73128E1	-3.2695E1	-3.26331E1	2.68012E1	1.69581E-7	2.52635E-3	2.52635E-3	6.3131E-3	2.00064E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80013E1	-6.19888E-4	-8.80003E1	2.86102E-4	5.22137E-3	9.31978E-2	2.73187E1	-3.2672E1	-3.2636E1	2.68221E1	1.69794E-7	2.51498E-3	2.51498E-3	6.32328E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80013E1	-5.72205E-4	-8.80003E1	1.19209E-4	5.53131E-3	9.35793E-2	2.72945E1	-3.26862E1	-3.26201E1	2.68076E1	1.69653E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80014E1	-3.8147E-4	-8.80001E1	7.15256E-5	5.45979E-3	9.3317E-2	2.73098E1	-3.26679E1	-3.26119E1	2.67728E1	1.69875E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80014E1	-3.57628E-4	-8.80003E1	4.76837E-5	5.74589E-3	9.35555E-2	2.73069E1	-3.26669E1	-3.26518E1	2.67986E1	1.69653E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80017E1	-2.14577E-4	-8.80006E1	0.0E0	5.53131E-3	9.32455E-2	2.73015E1	-3.26915E1	-3.26218E1	2.68076E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99803E-1
1.2E1	3.5E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80011E1	-3.33786E-4	-8.80003E1	1.90735E-4	5.34058E-3	9.36985E-2	2.73159E1	-3.26536E1	-3.26332E1	2.68176E1	1.69798E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.99E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80014E1	-3.57628E-4	-8.80003E1	1.43051E-4	5.43594E-3	9.377E-2	2.73177E1	-3.26314E1	-3.26116E1	2.67992E1	1.69656E-7	2.5225E-3	2.5225E-3	6.32418E-3	1.97119E-1
1.4E1	6.97E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80017E1	-5.24521E-4	-8.80004E1	1.19209E-4	5.48363E-3	9.35555E-2	2.73021E1	-3.26687E1	-3.26218E1	2.68447E1	1.69581E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.96021E-1
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80017E1	-4.29153E-4	-8.80002E1	0.0E0	5.88894E-3	9.37223E-2	2.72957E1	-3.26809E1	-3.26419E1	2.67986E1	1.69725E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.97142E-1
1.6E1	3.236E3	2.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80013E1	-5.00679E-4	-8.80003E1	-1.19209E-4	5.60284E-3	9.34601E-2	2.74211E1	-3.27768E1	-3.25876E1	2.68022E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98247E-1
1.7E1	3.731E4	2.0E1	6.87E2	4.7E2	-7.36328E-2	-8.80014E1	-3.09944E-4	-8.80004E1	7.15256E-5	5.6982E-3	9.33647E-2	2.73257E1	-3.26968E1	-3.26366E1	2.67836E1	1.69725E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98491E-1
1.8E1	1.62516E5	9.0E1	7.27E2	5.0E2	-7.32464E-2	-8.80013E1	-2.86102E-4	-8.80004E1	-9.53674E-5	5.45979E-3	9.29356E-2	2.73382E1	-3.26878E1	-3.26223E1	2.68064E1	1.69802E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98764E-1
1.9E1	3.528E3	2.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80013E1	-2.6226E-4	-8.80001E1	-1.90735E-4	5.34058E-3	9.33409E-2	2.72973E1	-3.2638E1	-3.26392E1	2.6813E1	1.69656E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.99577E-1
2.0E1	3.29E2	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80012E1	9.53674E-5	-8.80004E1	-2.86102E-4	5.17368E-3	9.32932E-2	2.72874E1	-3.26903E1	-3.26154E1	2.67439E1	1.69798E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9985E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80014E1	-2.38419E-5	-8.80002E1	-7.15256E-5	5.57899E-3	9.36985E-2	2.73405E1	-3.26868E1	-3.26231E1	2.68001E1	1.69875E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99803E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80014E1	-2.38419E-5	-8.8E1	2.38419E-5	5.6982E-3	9.36508E-2	2.73532E1	-3.26717E1	-3.26284E1	2.67896E1	1.69725E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.00534E-1
2.3E1	1.1E1	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80013E1	-1.90735E-4	-8.80003E1	1.66893E-4	5.48363E-3	9.33647E-2	2.7308E1	-3.27298E1	-3.26992E1	2.68106E1	1.69653E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9985E-1