[Scan]
initial_time=2016-02-17T22:52:16
final_time=2016-02-17T22:52:35
ip_count=19
run=1032
dataset=10
scan=518
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.82224E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.68895E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.33225E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.79614E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.55287E-8
mult1=-7.78981E-9
mult2=-2.86233E-9
rf_tmon=-6.87367E-3
rf_agc=2.93201E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.36954E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60966E0
bslens_imon=2.63148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.05694E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=2.19504E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04496E0
lens1_imon=1.42743E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.5649E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.99748E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.73002E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.2758E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15534E1
os_ea1_imon=2.20081E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26652E0
cs_ionrep_imon=1.26569E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.28507E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=4.20916E-8
tplens_vset=1.4E-1
tplens_vmon=1.59757E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25683E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.58941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=8.69703E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29295E0
ionrepsh_imon=2.00578E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86554E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00926E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.77087E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.4848E-1
os_ef2bup_imon=-5.48466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.54672E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73646E1
iondef1_imon=1.08724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67972E1
iondef4_imon=1.07224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.10956E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=9.86898E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.87709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=1.6088E-1
window_imon=-1.30045E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.85924E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.28908E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.42389E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.09802E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.58866E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07431E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64666E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30843E1
cs_fil1_imon=1.00757E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62342E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67036E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76417E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52774E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.93509E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22582E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.9911E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15153E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4753E4	7.0E0	1.47E2	4.1E1	-7.286E-2	-8.80018E1	1.43051E-4	-8.80005E1	1.43051E-4	5.74589E-3	9.33886E-2	2.72868E1	-3.26632E1	-3.26331E1	2.68094E1	1.69802E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98937E-1
2.0E0	5.53E3	4.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80014E1	-1.43051E-4	-8.80003E1	-2.14577E-4	5.4121E-3	9.32693E-2	2.73124E1	-3.2656E1	-3.26089E1	2.6816E1	1.69725E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00363E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80017E1	-2.86102E-4	-8.80003E1	-2.38419E-5	5.36442E-3	9.33886E-2	2.73236E1	-3.26642E1	-3.26196E1	2.67943E1	1.69806E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80014E1	-3.09944E-4	-8.80006E1	1.43051E-4	5.43594E-3	9.32932E-2	2.73327E1	-3.26452E1	-3.26687E1	2.67788E1	1.69723E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80013E1	-4.76837E-5	-8.80002E1	-7.15256E-5	5.50747E-3	9.33409E-2	2.73231E1	-3.2653E1	-3.26104E1	2.67824E1	1.69725E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.9917E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80012E1	-7.15256E-5	-8.79998E1	1.19209E-4	5.126E-3	9.36747E-2	2.73117E1	-3.26987E1	-3.262E1	2.68034E1	1.69875E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80013E1	9.53674E-5	-8.80002E1	0.0E0	5.126E-3	9.35078E-2	2.73393E1	-3.26437E1	-3.26549E1	2.68028E1	1.69949E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80012E1	-1.90735E-4	-8.8E1	2.38419E-5	5.4121E-3	9.32693E-2	2.73019E1	-3.26457E1	-3.26276E1	2.68092E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98764E-1
1.2E1	3.13E2	1.0E0	4.85E2	3.23E2	-7.286E-2	-8.80014E1	-1.90735E-4	-8.80001E1	-2.38419E-5	5.57899E-3	9.3627E-2	2.72895E1	-3.26326E1	-3.26218E1	2.68202E1	1.69776E-7	2.51958E-3	2.51958E-3	6.33658E-3	1.99948E-1
1.3E1	2.8E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80014E1	4.76837E-5	-8.80004E1	9.53674E-5	5.38826E-3	9.34124E-2	2.72907E1	-3.26422E1	-3.26434E1	2.68076E1	1.69949E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.00325E-1
1.4E1	6.57E2	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80014E1	-1.43051E-4	-8.80005E1	-4.76837E-5	5.62668E-3	9.3317E-2	2.7346E1	-3.2653E1	-3.26464E1	2.68094E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99977E-1
1.5E1	1.02E2	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80017E1	-2.38419E-5	-8.80003E1	9.53674E-5	5.36442E-3	9.33886E-2	2.73051E1	-3.26413E1	-3.26236E1	2.6795E1	1.69763E-7	2.51484E-3	2.51484E-3	6.33188E-3	1.98627E-1
1.6E1	3.159E3	1.0E0	6.47E2	4.41E2	-7.42513E-2	-8.80016E1	1.43051E-4	-8.80003E1	2.38419E-4	5.45979E-3	9.33886E-2	2.73502E1	-3.27155E1	-3.26897E1	2.68088E1					
1.7E1	3.7119E4	1.6E1	6.87E2	4.7E2	-7.47923E-2	-8.80012E1	2.14577E-4	-8.80001E1	-7.15256E-5	5.29289E-3	9.31263E-2	2.73111E1	-3.26518E1	-3.25978E1	2.67966E1	1.69798E-7	2.52815E-3	2.52815E-3	6.31278E-3	1.99E-1
1.8E1	1.62452E5	8.8E1	7.27E2	5.0E2	-7.50241E-2	-8.80012E1	-2.86102E-4	-8.8E1	-2.38419E-5	5.31673E-3	9.3627E-2	2.72892E1	-3.27039E1	-3.26113E1	2.68052E1	1.69949E-7	2.52977E-3	2.52977E-3	6.32386E-3	1.99456E-1
1.9E1	3.563E3	2.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80012E1	-3.33786E-4	-8.80003E1	1.43051E-4	5.50747E-3	9.3174E-2	2.73082E1	-3.26493E1	-3.26272E1	2.67986E1	1.69654E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00499E-1
2.0E1	3.37E2	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80014E1	-2.14577E-4	-8.80001E1	2.14577E-4	5.43594E-3	9.31025E-2	2.73039E1	-3.26975E1	-3.26344E1	2.67373E1	1.69802E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.00499E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80017E1	-2.14577E-4	-8.80001E1	-2.14577E-4	5.22137E-3	9.31978E-2	2.73271E1	-3.26828E1	-3.26654E1	2.67824E1	1.69654E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.00151E-1
2.2E1	3.6E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80016E1	-1.66893E-4	-8.80003E1	1.43051E-4	5.4121E-3	9.3317E-2	2.72817E1	-3.26302E1	-3.2638E1	2.68124E1	1.69653E-7	2.52599E-3	2.52599E-3	6.32356E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80015E1	-3.09944E-4	-8.8E1	9.53674E-5	5.53131E-3	9.30309E-2	2.73646E1	-3.26681E1	-3.25683E1	2.67972E1	1.69728E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.9911E-1