[Scan]
initial_time=2016-02-17T22:52:43
final_time=2016-02-17T22:53:02
ip_count=19
run=1032
dataset=10
scan=519
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.75086E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.55186E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=1.3363E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.8364E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.55892E-8
mult1=-9.27081E-9
mult2=-2.59485E-9
rf_tmon=-5.49177E-3
rf_agc=3.20959E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=5.74243E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.75916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05252E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=3.05154E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=2.19251E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02652E0
lens1_imon=1.44604E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04215E1
cs_ea2_imon=1.57417E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.00937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.72787E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.26715E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=2.16384E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.28783E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=3.293E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=4.208E-8
tplens_vset=1.4E-1
tplens_vmon=1.61371E0
tplens_imon=-3.73215E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=8.74853E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30165E0
ionrepsh_imon=2.03854E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.18755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84672E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00704E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10622E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.51483E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.53699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.2756E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.0762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.11304E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.86851E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=1.64484E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86032E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.30022E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.52863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.89673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.01188E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.59353E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07497E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64441E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=1.00601E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62264E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66971E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.63543E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56988E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22631E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.98247E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.07345E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4783E4	1.3E1	1.47E2	4.1E1	-7.20871E-2	-8.80013E1	-3.8147E-4	-8.80004E1	1.43051E-4	5.74589E-3	9.32217E-2	2.72892E1	-3.26636E1	-3.26533E1	2.6818E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.00847E-1
2.0E0	5.562E3	4.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80015E1	-4.05312E-4	-8.80006E1	4.76837E-5	5.88894E-3	9.32217E-2	2.72739E1	-3.26462E1	-3.2645E1	2.68106E1	1.6972E-7	2.5199E-3	2.5199E-3	6.34385E-3	1.99447E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80012E1	-5.24521E-4	-8.8E1	4.76837E-5	5.65052E-3	9.31978E-2	2.73097E1	-3.26944E1	-3.26167E1	2.68198E1	1.69581E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98764E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80013E1	-6.91414E-4	-8.80002E1	-1.43051E-4	5.76973E-3	9.3174E-2	2.73219E1	-3.26861E1	-3.26104E1	2.67896E1	1.69725E-7	2.50882E-3	2.50882E-3	6.32356E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80011E1	-5.72205E-4	-8.80007E1	9.53674E-5	5.43594E-3	9.31263E-2	2.72943E1	-3.26747E1	-3.26512E1	2.68076E1	1.69765E-7	2.51662E-3	2.51662E-3	6.32112E-3	1.99197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80015E1	-4.76837E-4	-8.80006E1	1.90735E-4	5.31673E-3	9.33409E-2	2.72835E1	-3.26903E1	-3.26086E1	2.67896E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80011E1	-1.66893E-4	-8.80005E1	1.19209E-4	5.22137E-3	9.35555E-2	2.7311E1	-3.26437E1	-3.26384E1	2.6804E1	1.69654E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80013E1	-2.14577E-4	-8.80007E1	2.38419E-5	5.57899E-3	9.34362E-2	2.72991E1	-3.26332E1	-3.27059E1	2.67794E1	1.69798E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9968E-1
1.2E1	3.24E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80017E1	-1.19209E-4	-8.80004E1	3.09944E-4	5.76973E-3	9.35316E-2	2.72937E1	-3.26452E1	-3.26777E1	2.67932E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98592E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80016E1	-3.57628E-4	-8.80001E1	2.6226E-4	5.31673E-3	9.34124E-2	2.73267E1	-3.26416E1	-3.25936E1	2.67968E1	1.69949E-7	2.51552E-3	2.51552E-3	6.27461E-3	1.98937E-1
1.4E1	6.72E2	1.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80016E1	-2.14577E-4	-8.80003E1	2.14577E-4	5.50747E-3	9.33647E-2	2.7358E1	-3.26699E1	-3.26404E1	2.68028E1	1.69581E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.9911E-1
1.5E1	8.7E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80014E1	-1.66893E-4	-8.80005E1	1.43051E-4	6.00815E-3	9.31263E-2	2.73243E1	-3.26573E1	-3.26512E1	2.68146E1	1.69654E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.99283E-1
1.6E1	3.186E3	1.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80015E1	-1.90735E-4	-8.80005E1	0.0E0	5.84126E-3	9.34601E-2	2.73723E1	-3.26767E1	-3.25234E1	2.68058E1	1.69581E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9968E-1
1.7E1	3.7288E4	2.7E1	6.87E2	4.7E2	-7.31692E-2	-8.80016E1	-4.05312E-4	-8.8E1	2.86102E-4	5.67436E-3	9.3174E-2	2.72845E1	-3.26927E1	-3.26095E1	2.68154E1	1.69798E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9951E-1
1.8E1	1.6224E5	1.03E2	7.27E2	5.0E2	-7.286E-2	-8.80019E1	-1.43051E-4	-8.80001E1	3.09944E-4	5.76973E-3	9.31263E-2	2.73015E1	-3.26915E1	-3.2614E1	2.6804E1	1.69802E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00151E-1
1.9E1	3.687E3	2.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80018E1	2.14577E-4	-8.80002E1	5.00679E-4	5.60284E-3	9.32217E-2	2.73131E1	-3.26836E1	-3.2634E1	2.67842E1	1.69802E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.00325E-1
2.0E1	3.26E2	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80018E1	-2.14577E-4	-8.80003E1	0.0E0	5.81741E-3	9.33409E-2	2.73157E1	-3.26862E1	-3.25977E1	2.67956E1	1.69875E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.00325E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80016E1	-5.72205E-4	-8.80006E1	-4.76837E-5	5.48363E-3	9.32932E-2	2.73364E1	-3.26764E1	-3.26341E1	2.68227E1	1.6987E-7	2.52384E-3	2.52384E-3	6.30202E-3	2.00192E-1
2.2E1	3.3E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80018E1	-5.48363E-4	-8.80006E1	-2.38419E-5	5.34058E-3	9.30071E-2	2.73124E1	-3.26425E1	-3.25936E1	2.67962E1	1.6987E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.98661E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80017E1	-9.53674E-5	-8.80006E1	2.14577E-4	5.36442E-3	9.30309E-2	2.73117E1	-3.26657E1	-3.26182E1	2.68028E1	1.69802E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98247E-1