[Scan]
initial_time=2016-02-17T22:54:02
final_time=2016-02-17T22:54:22
ip_count=19
run=1032
dataset=10
scan=522
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.76683E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.33931E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.34E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.81247E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.55929E-8
mult1=-8.8253E-9
mult2=-2.61481E-9
rf_tmon=-5.66E-3
rf_agc=3.23182E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=5.63121E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.79102E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20131E1
lens5a_imon=1.96775E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12538E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5391E1
cs_ef1b_imon=3.07183E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.0194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04711E1
cs_ea1_imon=2.15924E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03714E0
lens1_imon=1.4248E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64521E1
os_ef1alow_imon=2.98113E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.57559E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84522E1
cs_ef1a_imon=3.00719E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.72938E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11245E1
os_restr1_imon=4.28192E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15766E1
os_ea1_imon=2.19569E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.07913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.26978E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=3.2727E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=4.20884E-8
tplens_vset=1.4E-1
tplens_vmon=1.55118E0
tplens_imon=-4.29845E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26524E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26422E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=8.98397E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=2.01412E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.20135E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87857E0
os_ea2_imon=-5.53725E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.16567E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12001E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.41251E-1
os_ef2bup_imon=-5.45557E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=3.52987E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.32547E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01624E1
cs_anode2_imon=2.2979E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72829E1
iondef1_imon=1.09458E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.076E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.11E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=9.8798E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10987E0
cs_ionaccel_imon=-1.96989E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47289E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.57316E-6
window_vset=0.0E0
window_vmon=1.66136E-1
window_imon=-1.00724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.8613E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.40995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46757E0
defgridb_imon=6.05435E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33301E1
os_fil1_imon=9.59211E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06918E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64619E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=1.00701E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61816E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67062E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55469E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36269E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.77107E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2254E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68474E-1
res40_imon=-2.65799E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4461E4	1.8E1	1.47E2	4.1E1	-7.22418E-2	-8.80015E1	-5.96046E-4	-8.80005E1	2.38419E-4	5.31673E-3	9.32455E-2	2.73021E1	-3.26729E1	-3.26314E1	2.67848E1					
2.0E0	5.472E3	1.0E1	3.16E2	1.6E2	-7.19325E-2	-8.80015E1	-5.72205E-4	-8.80001E1	2.14577E-4	5.34058E-3	9.31978E-2	2.72818E1	-3.26615E1	-3.26493E1	2.67968E1	1.69798E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9917E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80014E1	-3.57628E-4	-8.8E1	2.14577E-4	5.55515E-3	9.32932E-2	2.73016E1	-3.26724E1	-3.26109E1	2.68004E1	1.69656E-7	2.51581E-3	2.51581E-3	6.32978E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80015E1	7.15256E-5	-8.79999E1	4.05312E-4	5.29289E-3	9.30309E-2	2.73529E1	-3.26856E1	-3.2636E1	2.67914E1	1.70007E-7	2.51709E-3	2.51709E-3	6.32858E-3	1.98229E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80014E1	1.66893E-4	-8.79999E1	2.86102E-4	5.19753E-3	9.2864E-2	2.73369E1	-3.26747E1	-3.26573E1	2.68226E1	1.69725E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.98491E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80015E1	0.0E0	-8.79997E1	1.90735E-4	5.26905E-3	9.29356E-2	2.73231E1	-3.26981E1	-3.26158E1	2.68016E1	1.69654E-7	2.52318E-3	2.52318E-3	6.34037E-3	1.97045E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80014E1	-4.29153E-4	-8.79998E1	2.14577E-4	5.4121E-3	9.30071E-2	2.72974E1	-3.26543E1	-3.26225E1	2.68364E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80015E1	-2.14577E-4	-8.80003E1	-2.14577E-4	5.62668E-3	9.30548E-2	2.72873E1	-3.2634E1	-3.25966E1	2.68208E1	1.69875E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
1.2E1	3.38E2	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80015E1	-2.86102E-4	-8.80006E1	7.15256E-5	5.65052E-3	9.31978E-2	2.73141E1	-3.26567E1	-3.26308E1	2.68082E1	1.69728E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00151E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80014E1	-2.86102E-4	-8.80003E1	2.14577E-4	5.43594E-3	9.32217E-2	2.7341E1	-3.26585E1	-3.26231E1	2.677E1	1.69802E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00847E-1
1.4E1	6.56E2	1.0E0	5.66E2	3.82E2	-7.201E-2	-8.80015E1	-1.66893E-4	-8.80001E1	2.86102E-4	5.53131E-3	9.3317E-2	2.72995E1	-3.26765E1	-3.26123E1	2.68007E1	1.69652E-7	2.51919E-3	2.51919E-3	6.3074E-3	1.98894E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80015E1	-3.33786E-4	-8.80002E1	4.05312E-4	5.62668E-3	9.3317E-2	2.73279E1	-3.26987E1	-3.26164E1	2.67884E1	1.6981E-7	2.52521E-3	2.52521E-3	6.3131E-3	1.99703E-1
1.6E1	3.231E3	4.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80017E1	-3.33786E-4	-8.80002E1	2.38419E-5	5.50747E-3	9.33886E-2	2.73611E1	-3.27133E1	-3.26856E1	2.68094E1	1.69581E-7	2.52867E-3	2.52867E-3	6.30192E-3	1.99283E-1
1.7E1	3.7451E4	3.6E1	6.87E2	4.7E2	-7.19325E-2	-8.80016E1	-3.57628E-4	-8.80002E1	3.8147E-4	5.72205E-3	9.33409E-2	2.73335E1	-3.26666E1	-3.26196E1	2.6828E1	1.69943E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.98661E-1
1.8E1	1.61359E5	9.1E1	7.27E2	5.0E2	-7.14689E-2	-8.80014E1	-2.38419E-4	-8.8E1	4.05312E-4	5.38826E-3	9.3627E-2	2.73454E1	-3.26969E1	-3.2647E1	2.6783E1	1.69653E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.01047E-1
1.9E1	3.6E3	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80012E1	-3.09944E-4	-8.80002E1	9.53674E-5	5.60284E-3	9.34839E-2	2.73106E1	-3.26682E1	-3.26327E1	2.67848E1	1.69875E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.00847E-1
2.0E1	3.44E2	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80016E1	-2.14577E-4	-8.80002E1	1.43051E-4	5.60284E-3	9.34601E-2	2.72811E1	-3.26831E1	-3.26218E1	2.67812E1	1.69654E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80016E1	-3.8147E-4	-8.80001E1	-1.66893E-4	5.79357E-3	9.33409E-2	2.73057E1	-3.27127E1	-3.26248E1	2.6796E1	1.69654E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00499E-1
2.2E1	3.1E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80017E1	-2.14577E-4	-8.80002E1	3.09944E-4	5.76973E-3	9.29832E-2	2.73116E1	-3.26667E1	-3.26372E1	2.67848E1	1.6987E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00192E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80014E1	-2.86102E-4	-8.80005E1	-4.76837E-5	5.81741E-3	9.31263E-2	2.72829E1	-3.26422E1	-3.26524E1	2.67926E1	1.69798E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9917E-1