[Scan]
initial_time=2016-02-17T22:55:22
final_time=2016-02-17T22:55:42
ip_count=19
run=1032
dataset=10
scan=525
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.74183E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.19483E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.25961E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.76048E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.55921E-8
mult1=-1.05712E-8
mult2=-3.30147E-9
rf_tmon=-3.93563E-3
rf_agc=3.4391E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=5.37384E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19929E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53358E1
cs_ef1b_imon=3.0537E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.01998E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=2.18747E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04797E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.5649E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84094E1
cs_ef1a_imon=3.00324E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.73105E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15528E1
os_ea1_imon=2.1918E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.28299E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=3.28075E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=4.2118E-8
tplens_vset=1.4E-1
tplens_vmon=1.58796E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25858E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27486E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03017E2
lens6_imon=2.98602E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.58343E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24669E0
ionrepsh_imon=2.00542E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74327E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86915E0
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.73123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.99536E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.54168E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.28389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73778E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.11488E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=9.89065E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-2.03206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56627E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.03527E-1
window_imon=-1.12746E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.85719E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.46212E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49179E0
defgridb_imon=5.9913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.57094E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07161E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64486E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30831E1
cs_fil1_imon=1.00626E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62372E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66976E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59477E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.25151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.15753E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22406E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28103E-3
inlet_lpb_pmon=1.99729E-1
chamber_ion_pmon=1.69723E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.08256E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4804E4	9.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80018E1	-4.76837E-4	-8.80004E1	4.76837E-5	5.43594E-3	9.32932E-2	2.73181E1	-3.26685E1	-3.26402E1	2.68292E1	1.69728E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98937E-1
2.0E0	5.529E3	7.0E0	3.16E2	1.6E2	-7.201E-2	-8.80018E1	-3.09944E-4	-8.80002E1	2.14577E-4	5.34058E-3	9.34601E-2	2.73027E1	-3.26455E1	-3.26431E1	2.68163E1	1.69798E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.01391E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80018E1	-3.09944E-4	-8.80003E1	2.14577E-4	5.36442E-3	9.35555E-2	2.73143E1	-3.26603E1	-3.26695E1	2.67848E1	1.69653E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00021E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80017E1	-2.6226E-4	-8.79999E1	9.53674E-5	5.38826E-3	9.34601E-2	2.73039E1	-3.27045E1	-3.26107E1	2.68034E1	1.70031E-7	2.52027E-3	2.52027E-3	6.29624E-3	1.99754E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80016E1	-4.76837E-4	-8.80003E1	1.19209E-4	5.36442E-3	9.31263E-2	2.73123E1	-3.26747E1	-3.26278E1	2.67914E1	1.69798E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00021E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80016E1	-4.29153E-4	-8.80003E1	2.38419E-4	5.74589E-3	9.37462E-2	2.73021E1	-3.26591E1	-3.26158E1	2.67866E1	1.69654E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80016E1	-5.48363E-4	-8.80001E1	2.6226E-4	5.43594E-3	9.35316E-2	2.73183E1	-3.26687E1	-3.26266E1	2.68094E1	1.69802E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.9911E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80018E1	-4.52995E-4	-8.79998E1	2.86102E-4	5.55515E-3	9.36031E-2	2.73405E1	-3.26638E1	-3.26437E1	2.68028E1	1.69802E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.9911E-1
1.2E1	3.3E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80015E1	-2.14577E-4	-8.79999E1	3.33786E-4	5.43594E-3	9.34124E-2	2.72763E1	-3.26633E1	-3.2614E1	2.67962E1	1.69725E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9883E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80016E1	-4.76837E-4	-8.8E1	1.19209E-4	5.67436E-3	9.34124E-2	2.73105E1	-3.26597E1	-3.26092E1	2.68046E1	1.69581E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.98764E-1
1.4E1	6.54E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80017E1	-5.72205E-4	-8.80002E1	1.19209E-4	5.55515E-3	9.34601E-2	2.73442E1	-3.26458E1	-3.26603E1	2.68007E1	1.69581E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.98872E-1
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80014E1	-6.19888E-4	-8.8E1	1.90735E-4	5.74589E-3	9.35316E-2	2.73189E1	-3.2638E1	-3.26494E1	2.6792E1	1.69581E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00021E-1
1.6E1	3.15E3	1.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80017E1	-4.76837E-4	-8.79999E1	7.15256E-5	5.55515E-3	9.34362E-2	2.73003E1	-3.25864E1	-3.25912E1	2.68166E1	1.69654E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.9963E-1
1.7E1	3.7101E4	1.8E1	6.87E2	4.7E2	-7.32464E-2	-8.80017E1	-7.15256E-4	-8.80002E1	-1.66893E-4	5.65052E-3	9.34601E-2	2.73442E1	-3.26681E1	-3.26494E1	2.68279E1	1.69728E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.98419E-1
1.8E1	1.61341E5	1.06E2	7.27E2	5.0E2	-7.26282E-2	-8.80016E1	-2.6226E-4	-8.8E1	1.19209E-4	5.50747E-3	9.35316E-2	2.72799E1	-3.26554E1	-3.2638E1	2.68223E1	1.69949E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.97903E-1
1.9E1	3.609E3	1.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80017E1	-2.86102E-4	-8.80003E1	2.6226E-4	5.24521E-3	9.32932E-2	2.72915E1	-3.26655E1	-3.26343E1	2.67746E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99456E-1
2.0E1	3.51E2	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80017E1	-3.09944E-4	-8.80003E1	-2.38419E-5	5.53131E-3	9.33409E-2	2.73039E1	-3.26572E1	-3.26425E1	2.67728E1	1.69654E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80017E1	-4.76837E-4	-8.80001E1	2.38419E-5	5.60284E-3	9.32455E-2	2.73051E1	-3.26708E1	-3.26195E1	2.67854E1	1.69654E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.9963E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80017E1	-3.09944E-4	-8.80001E1	2.6226E-4	5.96046E-3	9.32693E-2	2.72981E1	-3.26671E1	-3.26208E1	2.6807E1	1.69725E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9968E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80018E1	-1.66893E-4	-8.80005E1	2.14577E-4	5.60284E-3	9.34839E-2	2.73778E1	-3.27486E1	-3.25858E1	2.68046E1	1.69723E-7	2.52131E-3	2.52131E-3	6.28103E-3	1.99729E-1