[Scan]
initial_time=2016-02-17T22:57:36
final_time=2016-02-17T22:57:55
ip_count=19
run=1032
dataset=10
scan=530
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.8657E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.20294E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.35669E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.7361E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.56008E-8
mult1=-1.40625E-8
mult2=-3.59145E-9
rf_tmon=5.58374E-3
rf_agc=4.33669E-2
counter1=3
counter2=2
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=5.70655E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63141E0
bslens_imon=2.61051E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20167E1
lens5a_imon=1.9812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.04361E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.1741E-5
lens1_vset=-2.7E0
lens1_vmon=-3.092E0
lens1_imon=1.63363E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.99459E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.57523E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.0036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.73005E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.28878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15199E1
os_ea1_imon=2.1741E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.04721E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.27226E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=3.30742E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=4.2027E-8
tplens_vset=1.4E-1
tplens_vmon=1.56829E0
tplens_imon=-4.12148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26915E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27658E1
iondef2_imon=1.58727E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.27539E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=2.02014E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.10163E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88211E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08639E0
os_ef2alow_imon=-2.86457E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.55688E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.55753E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02151E1
cs_anode2_imon=2.29218E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73723E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67824E1
iondef4_imon=1.07008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.11092E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=9.87597E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47035E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-1.43019E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39336E-4
mask2_vset=0.0E0
mask2_vmon=-1.85966E1
mask2_imon=-8.7158E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.34978E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.46138E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.95336E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32583E0
defgridb_imon=6.20655E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.58704E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07299E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6462E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=1.00786E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6254E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66986E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.8507E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68884E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.99516E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22664E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.59292E-1
res40_imon=-2.80331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4998E4	1.0E1	1.47E2	4.1E1	-7.41738E-2	-8.80019E1	-7.86781E-4	-8.80002E1	3.09944E-4	5.8651E-3	9.33409E-2	2.73051E1	-3.27021E1	-3.26714E1	2.67677E1	1.69798E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00192E-1
2.0E0	5.637E3	8.0E0	3.16E2	1.6E2	-7.43285E-2	-8.80019E1	-7.39098E-4	-8.80004E1	1.19209E-4	5.98431E-3	9.3317E-2	2.73176E1	-3.26553E1	-3.26503E1	2.67951E1	1.70088E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.00876E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80018E1	-5.00679E-4	-8.80004E1	1.66893E-4	5.48363E-3	9.31263E-2	2.73225E1	-3.26411E1	-3.26318E1	2.68302E1	1.69731E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80017E1	-2.14577E-4	-8.80003E1	2.38419E-4	5.60284E-3	9.3174E-2	2.73183E1	-3.265E1	-3.2623E1	2.68124E1	1.69725E-7	2.51632E-3	2.51632E-3	6.34518E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80018E1	-4.29153E-4	-8.80004E1	9.53674E-5	5.55515E-3	9.34839E-2	2.72787E1	-3.26176E1	-3.26392E1	2.67956E1	1.69875E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80015E1	-6.91414E-4	-8.80002E1	2.86102E-4	5.62668E-3	9.36508E-2	2.73177E1	-3.26735E1	-3.26122E1	2.68082E1	1.69802E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99977E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80018E1	-4.05312E-4	-8.80001E1	2.38419E-4	5.81741E-3	9.31978E-2	2.7288E1	-3.26638E1	-3.26142E1	2.67836E1	1.69802E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00151E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.8002E1	-4.05312E-4	-8.80002E1	3.09944E-4	5.8651E-3	9.34124E-2	2.72883E1	-3.26975E1	-3.26044E1	2.67995E1	1.69581E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00192E-1
1.2E1	3.74E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80017E1	-6.19888E-4	-8.80001E1	2.38419E-4	5.79357E-3	9.37939E-2	2.72997E1	-3.26741E1	-3.26278E1	2.6796E1	1.69802E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.98937E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80021E1	-5.00679E-4	-8.80005E1	1.43051E-4	5.84126E-3	9.35316E-2	2.73122E1	-3.26773E1	-3.26307E1	2.6787E1	1.69949E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.99283E-1
1.4E1	6.32E2	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80018E1	-4.52995E-4	-8.79999E1	4.52995E-4	5.88894E-3	9.32932E-2	2.73003E1	-3.26422E1	-3.26386E1	2.67956E1	1.69798E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.9951E-1
1.5E1	1.16E2	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80017E1	-6.91414E-4	-8.80003E1	1.90735E-4	5.6982E-3	9.3174E-2	2.72991E1	-3.2632E1	-3.25906E1	2.6768E1	1.69581E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.00673E-1
1.6E1	3.131E3	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80015E1	-4.29153E-4	-8.80004E1	2.6226E-4	5.55515E-3	9.32932E-2	2.72576E1	-3.2599E1	-3.26801E1	2.67842E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00847E-1
1.7E1	3.6815E4	1.8E1	6.87E2	4.7E2	-7.21643E-2	-8.80015E1	-3.8147E-4	-8.80001E1	1.66893E-4	5.98431E-3	9.31025E-2	2.72997E1	-3.26573E1	-3.26777E1	2.68052E1	1.69802E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99977E-1
1.8E1	1.60486E5	7.5E1	7.27E2	5.0E2	-7.25507E-2	-8.80016E1	-6.67572E-4	-8.80002E1	1.19209E-4	5.76973E-3	9.31978E-2	2.73231E1	-3.26549E1	-3.25972E1	2.68106E1	1.69875E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.00151E-1
1.9E1	3.674E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80017E1	-5.72205E-4	-8.80002E1	-1.43051E-4	5.45979E-3	9.30786E-2	2.73016E1	-3.26531E1	-3.26419E1	2.6792E1	1.69802E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98764E-1
2.0E1	3.65E2	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80012E1	-6.19888E-4	-8.80003E1	-1.66893E-4	5.38826E-3	9.35555E-2	2.73189E1	-3.26747E1	-3.26356E1	2.67682E1	1.69581E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9934E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80016E1	-5.96046E-4	-8.80001E1	-7.15256E-5	5.67436E-3	9.33409E-2	2.73039E1	-3.26443E1	-3.26172E1	2.6807E1	1.69798E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9883E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80016E1	-4.29153E-4	-8.79999E1	9.53674E-5	5.93662E-3	9.32932E-2	2.73568E1	-3.26795E1	-3.262E1	2.68226E1	1.69728E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98937E-1
2.3E1	3.0E0	2.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80013E1	-3.8147E-4	-8.79998E1	3.8147E-4	5.81741E-3	9.34362E-2	2.73723E1	-3.27658E1	-3.26915E1	2.67824E1	1.69725E-7	2.51847E-3	2.51847E-3	6.28592E-3	1.9985E-1