[Scan]
initial_time=2016-02-17T22:58:02
final_time=2016-02-17T22:58:22
ip_count=19
run=1032
dataset=10
scan=531
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.78669E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.99217E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.37981E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.73683E-9
ql4_vset=
ql4_vmon=-1.90735E-4
ql4_imon=1.55542E-8
mult1=-8.52386E-9
mult2=-3.61507E-9
rf_tmon=-9.10681E-3
rf_agc=2.80828E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=5.58817E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20172E1
lens5a_imon=1.95926E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04962E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.06343E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04782E1
cs_ea1_imon=2.17799E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05956E0
lens1_imon=1.31862E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.59895E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.00216E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.73125E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11069E1
os_restr1_imon=4.27364E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1504E1
os_ea1_imon=2.16702E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=1.27545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=3.27931E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=4.20732E-8
tplens_vset=1.4E-1
tplens_vmon=1.56652E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25316E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27923E1
iondef2_imon=1.57665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98495E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=9.27198E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29752E0
ionrepsh_imon=2.00279E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33321E1
lens5b_imon=2.18437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74976E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88565E0
os_ea2_imon=-6.35131E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06175E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.19966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10802E0
os_ef2alow_imon=-2.92944E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.90526E-1
os_ef2bup_imon=-5.5279E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11105E1
os_restr2_imon=3.53807E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29751E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.26227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74268E1
iondef1_imon=1.11582E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.0535E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.11191E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=9.86541E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.90231E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47057E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.41059E-1
window_imon=-9.40055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.85731E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.60461E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.82594E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.08078E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33304E1
os_fil1_imon=9.58686E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07083E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64567E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30829E1
cs_fil1_imon=1.00675E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61519E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67001E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.68608E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22506E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13952E-1
res40_imon=-2.81772E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.478E4	1.0E1	1.47E2	4.1E1	-7.30918E-2	-8.80015E1	-3.33786E-4	-8.80002E1	2.6226E-4	5.45979E-3	9.34124E-2	2.72886E1	-3.27233E1	-3.26219E1	2.67972E1	1.69728E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00673E-1
2.0E0	5.537E3	8.0E0	3.16E2	1.6E2	-7.286E-2	-8.80014E1	-2.6226E-4	-8.79998E1	1.90735E-4	5.81741E-3	9.3627E-2	2.73161E1	-3.26591E1	-3.26456E1	2.67963E1	1.69798E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.00705E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80016E1	-3.57628E-4	-8.79998E1	2.38419E-5	5.57899E-3	9.30071E-2	2.72856E1	-3.26608E1	-3.26207E1	2.67839E1	1.69731E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.00463E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80017E1	-3.09944E-4	-8.80003E1	-1.19209E-4	5.45979E-3	9.31263E-2	2.73157E1	-3.26284E1	-3.26667E1	2.68058E1	1.69653E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.99765E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80018E1	-3.33786E-4	-8.80001E1	2.38419E-4	5.88894E-3	9.3174E-2	2.73057E1	-3.26675E1	-3.26032E1	2.67956E1					
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80015E1	-4.76837E-5	-8.80002E1	2.86102E-4	5.74589E-3	9.32455E-2	2.73111E1	-3.26705E1	-3.26146E1	2.68184E1	1.69581E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80017E1	-1.90735E-4	-8.80005E1	7.15256E-5	5.74589E-3	9.31978E-2	2.72937E1	-3.2644E1	-3.26224E1	2.68058E1	1.69875E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80016E1	-5.24521E-4	-8.80004E1	-1.19209E-4	5.48363E-3	9.34362E-2	2.7318E1	-3.26719E1	-3.26376E1	2.67782E1	1.69728E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99283E-1
1.2E1	3.74E2	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80017E1	-3.8147E-4	-8.80002E1	-7.15256E-5	6.05583E-3	9.32217E-2	2.72853E1	-3.26693E1	-3.26008E1	2.67974E1	1.69654E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.9963E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80018E1	-2.14577E-4	-8.80003E1	1.43051E-4	5.48363E-3	9.31263E-2	2.73472E1	-3.26543E1	-3.26753E1	2.6798E1	1.69728E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.01022E-1
1.4E1	6.11E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80017E1	-4.05312E-4	-8.80002E1	1.43051E-4	5.65052E-3	9.31978E-2	2.73171E1	-3.26729E1	-3.2653E1	2.67956E1	1.69881E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.00818E-1
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80016E1	-2.38419E-4	-8.80003E1	1.90735E-4	5.96046E-3	9.3174E-2	2.73393E1	-3.26663E1	-3.26633E1	2.681E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99283E-1
1.6E1	3.233E3	3.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80016E1	-7.15256E-5	-8.80001E1	3.09944E-4	5.67436E-3	9.30071E-2	2.7269E1	-3.27011E1	-3.26068E1	2.67794E1	1.69728E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.98764E-1
1.7E1	3.6895E4	1.7E1	6.87E2	4.7E2	-7.286E-2	-8.80018E1	-3.09944E-4	-8.80003E1	2.38419E-4	5.88894E-3	9.30548E-2	2.73129E1	-3.26975E1	-3.2602E1	2.67986E1	1.69728E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.98764E-1
1.8E1	1.60365E5	8.5E1	7.27E2	5.0E2	-7.17779E-2	-8.8002E1	-3.33786E-4	-8.80004E1	2.38419E-4	5.55515E-3	9.29356E-2	2.73116E1	-3.27322E1	-3.26001E1	2.68151E1	1.69875E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.00151E-1
1.9E1	3.569E3	6.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80021E1	-1.19209E-4	-8.80007E1	2.14577E-4	5.57899E-3	9.30786E-2	2.72823E1	-3.27101E1	-3.26729E1	2.67902E1	1.69794E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.00399E-1
2.0E1	3.09E2	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80021E1	-3.8147E-4	-8.80004E1	-2.38419E-5	5.88894E-3	9.30786E-2	2.73207E1	-3.26669E1	-3.2611E1	2.6807E1	1.69802E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80022E1	-6.91414E-4	-8.80002E1	4.76837E-5	6.05583E-3	9.3317E-2	2.73051E1	-3.27151E1	-3.26071E1	2.67998E1	1.69728E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98764E-1
2.2E1	3.1E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80022E1	-4.29153E-4	-8.80005E1	-1.43051E-4	5.57899E-3	9.34362E-2	2.7301E1	-3.26573E1	-3.26207E1	2.68047E1	1.69653E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00363E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.8002E1	-4.76837E-4	-8.80003E1	-1.90735E-4	5.72205E-3	9.3627E-2	2.74268E1	-3.27923E1	-3.25316E1	2.6807E1	1.69798E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.00534E-1