[Scan]
initial_time=2016-02-17T22:58:55
final_time=2016-02-17T22:59:15
ip_count=19
run=1032
dataset=10
scan=533
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.80067E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.92995E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=1.3188E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.74559E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.55715E-8
mult1=-1.14742E-8
mult2=-3.77854E-9
rf_tmon=2.22283E-3
rf_agc=3.89453E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=5.60212E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.34669E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05208E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.0591E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04585E1
cs_ea1_imon=2.18206E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09423E0
lens1_imon=1.2616E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64362E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04075E1
cs_ea2_imon=1.60203E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.01333E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.73109E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11063E1
os_restr1_imon=4.2722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15083E1
os_ea1_imon=2.17846E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27793E0
cs_ionrep_imon=1.2646E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=3.28435E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=4.21498E-8
tplens_vset=1.4E-1
tplens_vmon=1.61199E0
tplens_imon=-3.5342E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2602E1
iondef3_imon=1.51515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.28615E1
iondef2_imon=1.57211E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98591E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.93056E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=2.01191E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33411E1
lens5b_imon=2.1954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.90099E0
os_ea2_imon=-6.05767E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00756E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70891E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11823E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.64097E-1
os_ef2bup_imon=-5.50988E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.54023E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23101E2
cs_ionfoca_imon=6.27477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01605E1
cs_anode2_imon=2.28497E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74012E1
iondef1_imon=1.11896E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67966E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.10649E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.86456E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08329E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=2.01125E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86122E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.61495E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34141E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33286E1
os_fil1_imon=9.58902E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07569E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64508E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=1.0059E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61537E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66696E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.84155E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6734E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-3.02036E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22504E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.00673E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42183E-1
res40_imon=-2.78529E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4819E4	1.2E1	1.47E2	4.1E1	-7.24736E-2	-8.80019E1	-5.00679E-4	-8.80002E1	-9.53674E-5	5.93662E-3	9.3174E-2	2.73405E1	-3.27021E1	-3.26213E1	2.68094E1	1.69731E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.00818E-1
2.0E0	5.428E3	4.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80017E1	-4.05312E-4	-8.79998E1	-5.24521E-4	5.84126E-3	9.30786E-2	2.73134E1	-3.26903E1	-3.26136E1	2.68118E1	1.70007E-7	2.51814E-3	2.51814E-3	6.29684E-3	1.99394E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80017E1	-6.19888E-4	-8.80003E1	-3.33786E-4	5.60284E-3	9.35316E-2	2.7267E1	-3.26965E1	-3.25861E1	2.67708E1	1.6987E-7	2.53031E-3	2.53031E-3	6.32356E-3	1.9934E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80017E1	-2.6226E-4	-8.80003E1	1.19209E-4	6.17504E-3	9.32693E-2	2.73122E1	-3.2698E1	-3.2659E1	2.68112E1	1.6981E-7	2.51952E-3	2.51952E-3	6.33021E-3	2.00064E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80018E1	-6.67572E-4	-8.80003E1	1.43051E-4	5.76973E-3	9.32455E-2	2.73357E1	-3.26609E1	-3.26729E1	2.68036E1	1.70023E-7	2.52428E-3	2.52428E-3	6.29098E-3	1.98419E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80019E1	-5.96046E-4	-8.80005E1	-1.19209E-4	5.93662E-3	9.33409E-2	2.72947E1	-3.2637E1	-3.26283E1	2.6786E1	1.69653E-7	2.51739E-3	2.51739E-3	6.33977E-3	1.9883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80021E1	-7.62939E-4	-8.80004E1	4.76837E-5	5.55515E-3	9.31978E-2	2.72549E1	-3.26836E1	-3.26095E1	2.68064E1	1.69653E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9883E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80021E1	-2.86102E-4	-8.80006E1	1.66893E-4	5.6982E-3	9.3174E-2	2.72732E1	-3.26797E1	-3.26366E1	2.67962E1	1.69728E-7	2.52977E-3	2.52977E-3	6.28552E-3	1.99803E-1
1.2E1	3.62E2	1.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80021E1	-3.09944E-4	-8.80003E1	1.19209E-4	5.93662E-3	9.29117E-2	2.72678E1	-3.27083E1	-3.26116E1	2.67955E1	1.69802E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00499E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80023E1	-5.96046E-4	-8.80002E1	4.76837E-5	5.60284E-3	9.30786E-2	2.73255E1	-3.26663E1	-3.26308E1	2.68138E1	1.69725E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9985E-1
1.4E1	6.11E2	2.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80021E1	-2.6226E-4	-8.80003E1	7.15256E-5	5.81741E-3	9.31501E-2	2.72997E1	-3.26567E1	-3.26717E1	2.68018E1	1.69881E-7	2.52139E-3	2.52139E-3	6.30182E-3	2.00108E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.8002E1	-1.66893E-4	-8.80002E1	1.19209E-4	5.91278E-3	9.35316E-2	2.72895E1	-3.26765E1	-3.26116E1	2.681E1	1.69798E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.00021E-1
1.6E1	3.128E3	1.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80021E1	-3.33786E-4	-8.80002E1	2.86102E-4	5.24521E-3	9.3317E-2	2.71936E1	-3.25582E1	-3.27682E1	2.68148E1	1.69728E-7	2.52099E-3	2.52099E-3	6.29098E-3	1.98937E-1
1.7E1	3.7318E4	1.6E1	6.87E2	4.7E2	-7.29374E-2	-8.80023E1	-4.52995E-4	-8.8E1	4.05312E-4	5.60284E-3	9.33409E-2	2.72768E1	-3.27009E1	-3.25942E1	2.68118E1	1.69654E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98937E-1
1.8E1	1.61269E5	9.7E1	7.27E2	5.0E2	-7.30146E-2	-8.80018E1	-6.4373E-4	-8.80004E1	2.38419E-4	5.45979E-3	9.3627E-2	2.73502E1	-3.26771E1	-3.26404E1	2.67914E1	1.6987E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9968E-1
1.9E1	3.596E3	2.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80019E1	-3.57628E-4	-8.80001E1	2.14577E-4	5.53131E-3	9.3317E-2	2.73333E1	-3.26476E1	-3.26452E1	2.68256E1	1.69728E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.00673E-1
2.0E1	3.08E2	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80017E1	-3.09944E-4	-8.79999E1	4.52995E-4	5.74589E-3	9.32455E-2	2.73225E1	-3.26681E1	-3.26561E1	2.68444E1	1.69725E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.9985E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80018E1	-2.38419E-4	-8.80001E1	1.66893E-4	5.57899E-3	9.34362E-2	2.73254E1	-3.26446E1	-3.26741E1	2.6818E1	1.69731E-7	2.51915E-3	2.51915E-3	6.29624E-3	2.00108E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.8002E1	-4.29153E-4	-8.80002E1	3.33786E-4	5.6982E-3	9.35793E-2	2.73279E1	-3.26332E1	-3.26687E1	2.67836E1	1.69581E-7	2.52448E-3	2.52448E-3	6.31798E-3	1.99729E-1
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80023E1	2.38419E-5	-8.80003E1	3.33786E-4	5.65052E-3	9.33409E-2	2.74012E1	-3.28615E1	-3.2602E1	2.67966E1	1.69875E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00673E-1