[Scan]
initial_time=2016-02-17T22:59:49
final_time=2016-02-17T23:00:08
ip_count=19
run=1032
dataset=10
scan=535
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.78713E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.88906E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.32141E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.69888E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.56383E-8
mult1=-8.78918E-9
mult2=-2.71462E-9
rf_tmon=-5.61794E-3
rf_agc=3.18916E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.69797E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.70253E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.97589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.05406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05171E1
cs_ea1_imon=2.15782E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04599E0
lens1_imon=1.35048E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.59435E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.01478E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.72706E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.18507E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25859E0
cs_ionrep_imon=1.26872E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.2876E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=4.20699E-8
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-2.63527E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26164E1
iondef3_imon=1.48321E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2632E1
iondef2_imon=1.58231E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=9.10699E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=2.02969E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86972E0
os_ea2_imon=-4.15688E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71011E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11643E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.86922E-1
os_ef2bup_imon=-5.45582E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.54996E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.29751E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.27957E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.08042E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67842E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.11344E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=9.88719E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-2.03206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02044E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.53647E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.85978E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.927E3
multa_neg_imon=7.66832E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=5.93047E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.58055E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0671E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6447E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=1.0067E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62192E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66887E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49142E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.25151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.13641E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22562E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.98419E-1
chamber_ion_pmon=1.69654E-7
chamber_cvt_pmon=2.52867E-3
foreline_cvt_pmon=2.52867E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.89325E-1
res40_imon=-2.68437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4869E4	7.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80019E1	-4.29153E-4	-8.80002E1	-1.43051E-4	5.62668E-3	9.31501E-2	2.73428E1	-3.26874E1	-3.26166E1	2.68001E1	1.69581E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.00499E-1
2.0E0	5.45E3	3.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80018E1	-4.76837E-5	-8.79999E1	-2.38419E-5	5.60284E-3	9.32455E-2	2.73502E1	-3.26428E1	-3.26585E1	2.6822E1	1.69943E-7	2.52707E-3	2.52707E-3	6.32356E-3	2.00705E-1
3.0E0	6.0E0	1.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80018E1	-2.38419E-5	-8.80003E1	-4.52995E-4	5.65052E-3	9.3174E-2	2.73538E1	-3.26801E1	-3.26428E1	2.681E1	1.69725E-7	2.52169E-3	2.52169E-3	6.33977E-3	1.9951E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80018E1	-3.8147E-4	-8.80001E1	-2.14577E-4	5.45979E-3	9.31978E-2	2.72859E1	-3.26777E1	-3.26518E1	2.67854E1	1.69654E-7	2.51334E-3	2.51334E-3	6.3514E-3	1.97731E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.8002E1	-4.29153E-4	-8.80004E1	7.15256E-5	5.36442E-3	9.31978E-2	2.73574E1	-3.2626E1	-3.26603E1	2.67932E1	1.69731E-7	2.5225E-3	2.5225E-3	6.29624E-3	1.99048E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80021E1	-7.62939E-4	-8.80003E1	-3.09944E-4	5.34058E-3	9.32932E-2	2.73117E1	-3.26657E1	-3.26326E1	2.68022E1	1.69725E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.9883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.8002E1	-7.15256E-4	-8.80002E1	-1.19209E-4	5.4121E-3	9.33409E-2	2.7344E1	-3.26596E1	-3.26797E1	2.68268E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80021E1	-5.24521E-4	-8.80002E1	0.0E0	5.48363E-3	9.30309E-2	2.72812E1	-3.26646E1	-3.26034E1	2.68148E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.9963E-1
1.2E1	3.38E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80021E1	-6.67572E-4	-8.80003E1	-2.38419E-5	5.45979E-3	9.3174E-2	2.73381E1	-3.26176E1	-3.26759E1	2.678E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00325E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80018E1	-3.57628E-4	-8.80005E1	9.53674E-5	5.34058E-3	9.32932E-2	2.72874E1	-3.26372E1	-3.26225E1	2.68088E1	1.70023E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00673E-1
1.4E1	6.56E2	2.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80021E1	-4.52995E-4	-8.80006E1	2.38419E-4	5.6982E-3	9.30786E-2	2.73562E1	-3.26494E1	-3.2653E1	2.6774E1	1.69875E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99803E-1
1.5E1	8.8E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80018E1	-7.39098E-4	-8.80007E1	-1.66893E-4	5.62668E-3	9.30548E-2	2.72849E1	-3.26982E1	-3.25942E1	2.68004E1	1.69654E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00325E-1
1.6E1	3.161E3	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80018E1	-8.10623E-4	-8.80003E1	-1.66893E-4	5.65052E-3	9.29594E-2	2.72384E1	-3.2623E1	-3.27324E1	2.67752E1	1.69875E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00151E-1
1.7E1	3.6749E4	1.8E1	6.87E2	4.7E2	-7.12368E-2	-8.80019E1	-7.62939E-4	-8.80001E1	4.76837E-5	5.34058E-3	9.28402E-2	2.72871E1	-3.27131E1	-3.25948E1	2.6771E1	1.69728E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00151E-1
1.8E1	1.60295E5	8.4E1	7.27E2	5.0E2	-7.27053E-2	-8.80017E1	-8.10623E-4	-8.80003E1	1.19209E-4	5.07832E-3	9.3174E-2	2.72588E1	-3.26927E1	-3.25767E1	2.68118E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.9963E-1
1.9E1	3.488E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80018E1	-1.04904E-3	-8.80003E1	1.19209E-4	5.34058E-3	9.32932E-2	2.72895E1	-3.27071E1	-3.26146E1	2.67818E1	1.69802E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99803E-1
2.0E1	3.28E2	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.8002E1	-7.15256E-4	-8.8E1	1.90735E-4	5.29289E-3	9.3317E-2	2.73033E1	-3.26747E1	-3.26476E1	2.68016E1	1.69802E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98937E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80022E1	-4.29153E-4	-8.80003E1	4.76837E-5	5.43594E-3	9.33409E-2	2.73075E1	-3.26797E1	-3.26561E1	2.67879E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98592E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80022E1	-4.76837E-4	-8.80003E1	2.6226E-4	5.38826E-3	9.32693E-2	2.72841E1	-3.26891E1	-3.259E1	2.68418E1	1.69653E-7	2.52492E-3	2.52492E-3	6.30202E-3	1.97984E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.8002E1	-5.00679E-4	-8.80003E1	-9.53674E-5	5.53131E-3	9.3174E-2	2.73123E1	-3.2632E1	-3.26164E1	2.67842E1	1.69654E-7	2.52867E-3	2.52867E-3	6.31837E-3	1.98419E-1