[Scan]
initial_time=2016-02-17T23:00:15
final_time=2016-02-17T23:00:35
ip_count=19
run=1032
dataset=10
scan=536
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.85085E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.17671E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.3083E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.71711E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.56111E-8
mult1=-9.02649E-9
mult2=-2.88984E-9
rf_tmon=-4.68645E-3
rf_agc=3.23771E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=5.6839E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.53972E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2009E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53376E1
cs_ef1b_imon=3.06091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=2.16773E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01708E0
lens1_imon=1.5593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.57594E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.01297E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.72854E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.25418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=2.1872E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63329E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.26447E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=3.26958E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=4.21055E-8
tplens_vset=1.4E-1
tplens_vmon=1.59601E0
tplens_imon=-4.12148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25977E1
iondef3_imon=1.5094E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.56603E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=8.45397E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32112E0
ionrepsh_imon=2.03288E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33516E1
lens5b_imon=2.19357E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87562E0
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.17479E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08639E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.77312E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=3.53231E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.31167E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01629E1
cs_anode2_imon=2.28245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73605E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.11468E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83119E-1
olens1_imon=9.8865E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-2.08251E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=1.11026E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.85845E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.53736E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=5.96941E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.33916E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25496E0
defgridb_imon=6.32335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.58764E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07467E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64344E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=1.00666E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62095E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67064E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76351E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.51793E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22613E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.70023E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.51503E-1
res40_imon=-2.60509E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4847E4	1.3E1	1.47E2	4.1E1	-7.30918E-2	-8.80016E1	-4.29153E-4	-8.80001E1	9.53674E-5	5.19753E-3	9.34124E-2	2.73051E1	-3.2688E1	-3.26124E1	2.6803E1	1.6987E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.98661E-1
2.0E0	5.654E3	4.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80019E1	-5.00679E-4	-8.80001E1	-7.15256E-5	5.31673E-3	9.32217E-2	2.72971E1	-3.26664E1	-3.26156E1	2.67783E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.99E-1
3.0E0	5.0E0	1.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80017E1	-3.33786E-4	-8.8E1	2.14577E-4	5.34058E-3	9.32932E-2	2.72738E1	-3.2626E1	-3.26337E1	2.68076E1	1.69656E-7	2.5225E-3	2.5225E-3	6.34661E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80017E1	-4.29153E-4	-8.8E1	1.90735E-4	5.14984E-3	9.34839E-2	2.72973E1	-3.26627E1	-3.26296E1	2.6801E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00673E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80015E1	-2.38419E-5	-8.80003E1	2.38419E-4	5.126E-3	9.33647E-2	2.73E1	-3.26793E1	-3.26473E1	2.68105E1	1.69725E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.01562E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80014E1	-2.6226E-4	-8.80003E1	3.09944E-4	5.48363E-3	9.33647E-2	2.73009E1	-3.26524E1	-3.26116E1	2.67944E1	1.69751E-7	2.52046E-3	2.52046E-3	6.32434E-3	2.01882E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80016E1	-3.57628E-4	-8.80002E1	2.14577E-4	5.29289E-3	9.34362E-2	2.72955E1	-3.26693E1	-3.26134E1	2.68064E1	1.69728E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80017E1	-6.67572E-4	-8.8E1	2.38419E-4	5.57899E-3	9.37462E-2	2.73327E1	-3.26687E1	-3.26464E1	2.68028E1	1.69581E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98247E-1
1.2E1	3.47E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80018E1	-2.86102E-4	-8.79999E1	2.86102E-4	5.38826E-3	9.34362E-2	2.73159E1	-3.26549E1	-3.26506E1	2.6792E1	1.69731E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.9852E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80017E1	-1.90735E-4	-8.79999E1	2.14577E-4	5.45979E-3	9.32693E-2	2.73175E1	-3.26567E1	-3.26527E1	2.67858E1	1.69725E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.97142E-1
1.4E1	6.96E2	1.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80016E1	-3.09944E-4	-8.8E1	2.86102E-4	5.43594E-3	9.32932E-2	2.73094E1	-3.26878E1	-3.26168E1	2.68126E1	1.69707E-7	2.52131E-3	2.52131E-3	6.3121E-3	1.98026E-1
1.5E1	1.08E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80017E1	-2.14577E-4	-8.80002E1	3.33786E-4	5.34058E-3	9.31978E-2	2.72821E1	-3.26782E1	-3.2649E1	2.67952E1					
1.6E1	3.16E3	2.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80018E1	9.53674E-5	-8.80002E1	1.19209E-4	5.17368E-3	9.3627E-2	2.72612E1	-3.26999E1	-3.27257E1	2.68376E1	1.69969E-7	2.52326E-3	2.52326E-3	6.29298E-3	1.98297E-1
1.7E1	3.7475E4	2.1E1	6.87E2	4.7E2	-7.30918E-2	-8.80016E1	1.66893E-4	-8.80003E1	7.15256E-5	5.24521E-3	9.34124E-2	2.72805E1	-3.26987E1	-3.26392E1	2.68198E1	1.69656E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.00463E-1
1.8E1	1.61449E5	1.1E2	7.27E2	5.0E2	-7.30918E-2	-8.80019E1	7.15256E-5	-8.80003E1	3.09944E-4	5.126E-3	9.35078E-2	2.7298E1	-3.26354E1	-3.26225E1	2.68118E1	1.69798E-7	2.52008E-3	2.52008E-3	6.33436E-3	2.00619E-1
1.9E1	3.747E3	2.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80017E1	-2.38419E-4	-8.79999E1	3.57628E-4	5.22137E-3	9.3627E-2	2.73153E1	-3.26933E1	-3.26837E1	2.6807E1					
2.0E1	3.4E2	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.8002E1	-1.43051E-4	-8.8E1	4.29153E-4	5.62668E-3	9.31263E-2	2.73027E1	-3.26759E1	-3.26362E1	2.67716E1	1.69728E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.97559E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.8002E1	-1.43051E-4	-8.80003E1	-2.38419E-5	5.36442E-3	9.33886E-2	2.72986E1	-3.27021E1	-3.26254E1	2.68076E1	1.69728E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.98075E-1
2.2E1	3.1E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80019E1	-2.38419E-4	-8.80001E1	3.57628E-4	5.126E-3	9.34124E-2	2.73261E1	-3.26669E1	-3.26777E1	2.68186E1	1.69798E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.96973E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80018E1	-1.90735E-4	-8.80001E1	1.43051E-4	5.14984E-3	9.31501E-2	2.73605E1	-3.26661E1	-3.25977E1	2.68148E1	1.70023E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98764E-1