[Scan]
initial_time=2016-02-17T23:00:42
final_time=2016-02-17T23:01:02
ip_count=19
run=1032
dataset=10
scan=537
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.83381E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.2089E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.28632E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.63361E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.55673E-8
mult1=-1.10701E-8
mult2=-2.7626E-9
rf_tmon=-3.89108E-3
rf_agc=3.44731E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=5.53739E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.75765E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=1.93224E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.0523E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5378E1
cs_ef1b_imon=3.05887E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05102E1
cs_ea1_imon=2.1781E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03355E0
lens1_imon=1.50313E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6464E1
os_ef1alow_imon=2.97691E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.58941E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.00722E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.73167E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11317E1
os_restr1_imon=4.26473E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15516E1
os_ea1_imon=2.16909E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.09068E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27373E0
cs_ionrep_imon=1.26352E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93326E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0169E1
cs_anode1_imon=3.27444E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=4.20727E-8
tplens_vset=1.4E-1
tplens_vmon=1.60779E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26615E1
iondef3_imon=1.47369E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2645E1
iondef2_imon=1.59229E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=8.52859E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=2.04183E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74476E1
cs_ef2b_imon=3.12698E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87035E0
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7132E1
cs_ef2a_imon=3.17302E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08887E0
os_ef2alow_imon=-2.74273E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.71236E-1
os_ef2bup_imon=-5.32511E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1151E1
os_restr2_imon=3.53567E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.32956E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.28715E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72941E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.08129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.10895E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=9.89402E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12702E0
cs_ionaccel_imon=-1.91562E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47121E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.55311E-6
window_vset=0.0E0
window_vmon=1.28399E-1
window_imon=-9.94946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86026E1
mask2_imon=-6.54371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.73249E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65119E0
defgridb_imon=6.00932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.59062E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07248E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64455E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30895E1
cs_fil1_imon=1.00669E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62047E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67028E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80286E-2
os_fil2_imon=-2.61884E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61024E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36509E-1
cs_fil2_imon=-2.70617E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.74236E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22586E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.00499E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.34038E-1
res40_imon=-2.72028E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.5041E4	1.2E1	1.47E2	4.1E1	-7.43285E-2	-8.80018E1	-5.96046E-4	-8.80004E1	7.15256E-5	5.43594E-3	9.3317E-2	2.73249E1	-3.26831E1	-3.25894E1	2.6792E1	1.69654E-7	2.51935E-3	2.51935E-3	6.31563E-3	1.99197E-1
2.0E0	5.483E3	5.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80018E1	-4.05312E-4	-8.8E1	3.09944E-4	5.26905E-3	9.30786E-2	2.73106E1	-3.26866E1	-3.2615E1	2.68107E1					
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80018E1	-8.10623E-4	-8.80001E1	2.6226E-4	5.38826E-3	9.35078E-2	2.73039E1	-3.26498E1	-3.25947E1	2.68018E1	1.69881E-7	2.52139E-3	2.52139E-3	6.31299E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80018E1	-3.33786E-4	-8.80003E1	2.86102E-4	5.24521E-3	9.3317E-2	2.73207E1	-3.26897E1	-3.26422E1	2.68286E1	1.69652E-7	2.52765E-3	2.52765E-3	6.27577E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.43285E-2	-8.80019E1	-5.24521E-4	-8.80003E1	1.19209E-4	5.79357E-3	9.3317E-2	2.72949E1	-3.265E1	-3.26422E1	2.68232E1	1.69875E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99803E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80017E1	-5.00679E-4	-8.79999E1	-4.76837E-5	5.57899E-3	9.30548E-2	2.73129E1	-3.26759E1	-3.26278E1	2.68166E1	1.69728E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.00847E-1
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80017E1	-5.00679E-4	-8.80001E1	7.15256E-5	5.57899E-3	9.29594E-2	2.73171E1	-3.2641E1	-3.2626E1	2.68016E1	1.69728E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80018E1	-9.53674E-4	-8.80001E1	3.8147E-4	5.74589E-3	9.31978E-2	2.73261E1	-3.26627E1	-3.2641E1	2.68028E1	1.69654E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.9911E-1
1.2E1	3.4E2	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80019E1	-8.10623E-4	-8.80003E1	4.76837E-4	5.45979E-3	9.3174E-2	2.73204E1	-3.2639E1	-3.26402E1	2.67884E1	1.69728E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99977E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80019E1	-5.00679E-4	-8.80006E1	2.6226E-4	5.38826E-3	9.3174E-2	2.72961E1	-3.26819E1	-3.26314E1	2.68111E1	1.69581E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.00363E-1
1.4E1	6.58E2	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80017E1	-9.53674E-5	-8.80003E1	2.14577E-4	5.65052E-3	9.32693E-2	2.72842E1	-3.26955E1	-3.26411E1	2.67937E1	1.69581E-7	2.52757E-3	2.52757E-3	6.29098E-3	2.00847E-1
1.5E1	8.6E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.8002E1	-3.8147E-4	-8.80004E1	-2.38419E-5	5.26905E-3	9.32693E-2	2.72955E1	-3.26278E1	-3.26278E1	2.67962E1	1.69794E-7	2.52131E-3	2.52131E-3	6.3074E-3	1.99394E-1
1.6E1	3.223E3	3.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80017E1	-4.52995E-4	-8.80003E1	4.05312E-4	5.48363E-3	9.33886E-2	2.73069E1	-3.27197E1	-3.27281E1	2.68058E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98419E-1
1.7E1	3.6822E4	1.6E1	6.87E2	4.7E2	-7.37874E-2	-8.80017E1	-6.19888E-4	-8.79999E1	9.53674E-5	5.05447E-3	9.29117E-2	2.73017E1	-3.26541E1	-3.26221E1	2.67959E1	1.69654E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9585E-1
1.8E1	1.60478E5	1.02E2	7.27E2	5.0E2	-7.33239E-2	-8.80018E1	-3.57628E-4	-8.80001E1	0.0E0	5.57899E-3	9.3317E-2	2.73153E1	-3.26561E1	-3.26573E1	2.6801E1	1.69759E-7	2.5152E-3	2.5152E-3	6.3384E-3	1.97385E-1
1.9E1	3.631E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80022E1	-5.48363E-4	-8.80001E1	7.15256E-5	5.26905E-3	9.30071E-2	2.73225E1	-3.26314E1	-3.26344E1	2.6771E1	1.69654E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.97216E-1
2.0E1	3.2E2	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80018E1	-2.86102E-4	-8.80003E1	2.38419E-4	5.57899E-3	9.31501E-2	2.73231E1	-3.26718E1	-3.26434E1	2.67682E1	1.69654E-7	2.52647E-3	2.52647E-3	6.33486E-3	1.98419E-1
2.1E1	0.0E0	1.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80021E1	-3.57628E-4	-8.80001E1	1.90735E-4	5.55515E-3	9.29594E-2	2.73249E1	-3.26561E1	-3.26206E1	2.67764E1	1.69723E-7	2.52236E-3	2.52236E-3	6.32328E-3	2.01072E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80019E1	-3.57628E-4	-8.8E1	4.05312E-4	5.57899E-3	9.30309E-2	2.73122E1	-3.26732E1	-3.25765E1	2.68106E1	1.69728E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00325E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80017E1	-1.43051E-4	-8.8E1	4.29153E-4	5.50747E-3	9.29832E-2	2.72941E1	-3.2645E1	-3.26615E1	2.68094E1	1.69802E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00499E-1