[Scan]
initial_time=2016-02-17T23:02:02
final_time=2016-02-17T23:02:21
ip_count=19
run=1032
dataset=10
scan=540
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.75575E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.18029E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.29373E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.70105E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.56E-8
mult1=-1.10125E-8
mult2=-3.19949E-9
rf_tmon=-1.87851E-3
rf_agc=3.53089E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=5.55193E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67919E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20102E1
lens5a_imon=1.97483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.06199E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.17552E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02298E0
lens1_imon=1.48144E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.58479E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.01045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.72944E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.27292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1494E1
os_ea1_imon=2.18012E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27274E0
cs_ionrep_imon=1.27898E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91838E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.28543E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=4.2032E-8
tplens_vset=1.4E-1
tplens_vmon=1.58893E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26449E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27157E1
iondef2_imon=1.59328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=8.20875E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=2.01872E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.1092E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87857E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10261E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.70104E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=3.5287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.27596E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73529E1
iondef1_imon=1.10697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67893E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.11323E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8331E-1
olens1_imon=9.86397E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-2.17261E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47143E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56033E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.1463E-1
window_imon=-1.1635E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39271E-4
mask2_vset=0.0E0
mask2_vmon=-1.85785E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.39579E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.71976E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.11971E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.59323E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06596E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64467E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=1.00739E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66897E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75465E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22722E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.70097E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72817E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4705E4	1.3E1	1.47E2	4.1E1	-7.26282E-2	-8.80023E1	-5.72205E-4	-8.80001E1	-7.15256E-5	5.60284E-3	9.3174E-2	2.73092E1	-3.26614E1	-3.26467E1	2.68012E1	1.69581E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9985E-1
2.0E0	5.387E3	2.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80021E1	-4.76837E-4	-8.80001E1	2.38419E-5	5.88894E-3	9.32217E-2	2.73198E1	-3.26572E1	-3.26229E1	2.67751E1	1.69798E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.00192E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80019E1	-3.8147E-4	-8.80003E1	9.53674E-5	5.65052E-3	9.30309E-2	2.73252E1	-3.27228E1	-3.26098E1	2.68227E1	1.69731E-7	2.5225E-3	2.5225E-3	6.29067E-3	2.00108E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80018E1	-5.72205E-4	-8.80001E1	7.15256E-5	5.8651E-3	9.32217E-2	2.72828E1	-3.26655E1	-3.26012E1	2.67995E1	1.69855E-7	2.51854E-3	2.51854E-3	6.3023E-3	2.00145E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80017E1	-6.19888E-4	-8.79998E1	9.53674E-5	5.67436E-3	9.31025E-2	2.73139E1	-3.26531E1	-3.26195E1	2.68112E1	1.70127E-7	2.51527E-3	2.51527E-3	6.33065E-3	2.00386E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80019E1	-5.48363E-4	-8.80002E1	2.38419E-5	5.62668E-3	9.3627E-2	2.73045E1	-3.26891E1	-3.26156E1	2.67968E1	1.69943E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.00876E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80021E1	-6.91414E-4	-8.80001E1	2.14577E-4	5.76973E-3	9.33886E-2	2.7297E1	-3.2681E1	-3.25762E1	2.68283E1	1.69728E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.01022E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80018E1	-4.76837E-4	-8.8E1	-9.53674E-5	5.76973E-3	9.33409E-2	2.73357E1	-3.26734E1	-3.26391E1	2.67843E1	1.69725E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00363E-1
1.2E1	3.41E2	1.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80018E1	-5.96046E-4	-8.80002E1	-1.43051E-4	5.98431E-3	9.32932E-2	2.72949E1	-3.26933E1	-3.26452E1	2.68046E1	1.6981E-7	2.51838E-3	2.51838E-3	6.3131E-3	1.98804E-1
1.3E1	2.7E1	0.0E0	5.25E2	3.53E2	-7.44831E-2	-8.80018E1	-5.96046E-4	-8.80006E1	0.0E0	5.57899E-3	9.33647E-2	2.73099E1	-3.26813E1	-3.262E1	2.67818E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99977E-1
1.4E1	6.57E2	1.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80019E1	-4.76837E-4	-8.80005E1	1.19209E-4	5.76973E-3	9.3174E-2	2.73479E1	-3.27087E1	-3.26695E1	2.6787E1	1.69725E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.00021E-1
1.5E1	8.3E1	1.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80019E1	-5.72205E-4	-8.80004E1	2.14577E-4	5.45979E-3	9.32455E-2	2.72892E1	-3.26785E1	-3.26313E1	2.68094E1	1.69731E-7	2.5147E-3	2.5147E-3	6.29067E-3	2.00108E-1
1.6E1	3.023E3	4.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80018E1	-4.76837E-4	-8.79999E1	2.38419E-5	5.91278E-3	9.32932E-2	2.72841E1	-3.26657E1	-3.27732E1	2.68052E1	1.69728E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99803E-1
1.7E1	3.6957E4	1.9E1	6.87E2	4.7E2	-7.30146E-2	-8.80018E1	-5.72205E-4	-8.80003E1	1.19209E-4	5.55515E-3	9.32932E-2	2.72921E1	-3.26726E1	-3.26201E1	2.68244E1	1.69728E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99283E-1
1.8E1	1.60386E5	9.3E1	7.27E2	5.0E2	-7.17779E-2	-8.80019E1	-3.8147E-4	-8.80001E1	-1.66893E-4	5.81741E-3	9.32455E-2	2.73165E1	-3.25858E1	-3.2644E1	2.67848E1	1.70015E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.98661E-1
1.9E1	3.587E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80017E1	-5.96046E-4	-8.79999E1	1.43051E-4	5.55515E-3	9.34839E-2	2.73322E1	-3.2672E1	-3.2603E1	2.67705E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00499E-1
2.0E1	3.48E2	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80016E1	-3.8147E-4	-8.80003E1	7.15256E-5	5.57899E-3	9.32455E-2	2.73363E1	-3.26891E1	-3.2617E1	2.6768E1	1.70088E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.9951E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80014E1	-4.76837E-4	-8.80002E1	0.0E0	5.38826E-3	9.32932E-2	2.73116E1	-3.26561E1	-3.26278E1	2.68106E1	1.69728E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00151E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80014E1	-3.57628E-4	-8.8E1	3.09944E-4	5.4121E-3	9.31263E-2	2.72847E1	-3.26819E1	-3.2632E1	2.68286E1	1.69798E-7	2.50989E-3	2.50989E-3	6.30202E-3	1.99E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80017E1	-2.6226E-4	-8.80001E1	3.09944E-4	5.67436E-3	9.31025E-2	2.73529E1	-3.27157E1	-3.26449E1	2.67893E1	1.70097E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.98937E-1