[Scan]
initial_time=2016-02-17T23:02:55
final_time=2016-02-17T23:03:15
ip_count=19
run=1032
dataset=10
scan=542
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.85138E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.79143E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.27341E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.69258E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.55748E-8
mult1=-1.04687E-8
mult2=-2.71934E-9
rf_tmon=-5.26455E-3
rf_agc=3.31852E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=5.43833E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64172E0
bslens_imon=2.49704E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.05253E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53518E1
cs_ef1b_imon=3.05438E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05192E1
cs_ea1_imon=2.18264E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04482E0
lens1_imon=1.56569E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64627E1
os_ef1alow_imon=2.97129E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04116E1
cs_ea2_imon=1.55779E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84357E1
cs_ef1a_imon=2.99599E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.72837E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10974E1
os_restr1_imon=4.25649E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15319E1
os_ea1_imon=2.16584E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63405E1
os_ef1bup_imon=3.06149E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24828E0
cs_ionrep_imon=1.26007E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.28717E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=4.20529E-8
tplens_vset=1.4E-1
tplens_vmon=1.59627E0
tplens_imon=-1.32882E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.50817E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98235E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.70955E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27118E0
ionrepsh_imon=2.00935E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33633E1
lens5b_imon=2.19103E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74794E1
cs_ef2b_imon=3.14121E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83228E0
os_ea2_imon=-6.02374E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71339E1
cs_ef2a_imon=3.20071E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.15374E0
os_ef2alow_imon=-2.72028E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.61256E-1
os_ef2bup_imon=-5.48979E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1083E1
os_restr2_imon=3.52931E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30997E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02108E1
cs_anode2_imon=2.25496E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73175E1
iondef1_imon=1.08334E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.06856E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.10676E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=9.8863E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07962E0
cs_ionaccel_imon=-2.18134E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02045E2
cs_ionfocb_imon=1.46998E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55993E1
einzel_imon=7.58679E-6
window_vset=0.0E0
window_vmon=1.34636E-1
window_imon=-9.50035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.3929E-4
mask2_vset=0.0E0
mask2_vmon=-1.86319E1
mask2_imon=-5.90748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.59656E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.61177E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.18432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43323E0
defgridb_imon=5.92853E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.59436E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07261E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6453E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=1.00521E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6249E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66581E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-2.5627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85354E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55929E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36912E-1
cs_fil2_imon=-2.86211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.87304E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22448E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00499E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.70414E-1
res40_imon=-2.46578E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4916E4	1.9E1	1.47E2	4.1E1	-7.30918E-2	-8.80017E1	-7.39098E-4	-8.80003E1	2.38419E-5	5.60284E-3	9.35316E-2	2.7334E1	-3.27139E1	-3.26402E1	2.67836E1	1.69815E-7	2.51527E-3	2.51527E-3	6.31902E-3	2.0094E-1
2.0E0	5.703E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80019E1	-5.96046E-4	-8.80004E1	7.15256E-5	5.43594E-3	9.31978E-2	2.73057E1	-3.26762E1	-3.26266E1	2.67776E1	1.69725E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.00021E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80019E1	-2.86102E-4	-8.80003E1	4.76837E-5	5.45979E-3	9.3317E-2	2.73458E1	-3.26543E1	-3.26472E1	2.67746E1	1.69581E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80017E1	-4.29153E-4	-8.80001E1	1.19209E-4	5.6982E-3	9.34601E-2	2.73099E1	-3.27083E1	-3.26236E1	2.68052E1	1.69943E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00876E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80018E1	-2.6226E-4	-8.80002E1	2.14577E-4	5.67436E-3	9.29832E-2	2.72886E1	-3.26467E1	-3.26331E1	2.67619E1	1.69728E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.00847E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80018E1	-4.52995E-4	-8.80001E1	-1.90735E-4	5.53131E-3	9.3174E-2	2.73277E1	-3.26529E1	-3.26413E1	2.68352E1	1.69798E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00876E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.8002E1	-3.57628E-4	-8.80002E1	-3.09944E-4	5.14984E-3	9.30309E-2	2.73092E1	-3.26673E1	-3.26349E1	2.67674E1	1.69875E-7	2.52428E-3	2.52428E-3	6.33486E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80019E1	-2.6226E-4	-8.80001E1	-3.8147E-4	5.19753E-3	9.35316E-2	2.72949E1	-3.26536E1	-3.26753E1	2.67781E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99283E-1
1.2E1	3.47E2	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80017E1	-1.66893E-4	-8.8E1	0.0E0	5.45979E-3	9.36031E-2	2.73429E1	-3.26224E1	-3.26242E1	2.68058E1	1.69728E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.97903E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.8002E1	-3.8147E-4	-8.80002E1	1.19209E-4	5.34058E-3	9.33409E-2	2.73009E1	-3.26693E1	-3.2635E1	2.6774E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98937E-1
1.4E1	6.63E2	0.0E0	5.66E2	3.82E2	-7.10825E-2	-8.80023E1	-4.29153E-4	-8.80001E1	2.38419E-5	5.43594E-3	9.34839E-2	2.73117E1	-3.26771E1	-3.26206E1	2.6798E1	1.69802E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.9911E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80022E1	-3.09944E-4	-8.80001E1	3.57628E-4	5.10216E-3	9.35078E-2	2.73063E1	-3.2635E1	-3.26314E1	2.67686E1	1.69653E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.00363E-1
1.6E1	3.138E3	2.0E0	6.47E2	4.41E2	-7.13915E-2	-8.8002E1	-4.52995E-4	-8.80002E1	1.19209E-4	5.26905E-3	9.36031E-2	2.71871E1	-3.25552E1	-3.27174E1	2.68082E1	1.69875E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.00673E-1
1.7E1	3.6632E4	1.6E1	6.87E2	4.7E2	-7.17779E-2	-8.80017E1	-3.8147E-4	-8.80002E1	2.14577E-4	5.36442E-3	9.34362E-2	2.72847E1	-3.26645E1	-3.25996E1	2.68172E1	1.69949E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00499E-1
1.8E1	1.60093E5	9.3E1	7.27E2	5.0E2	-7.15461E-2	-8.80018E1	-7.15256E-4	-8.80002E1	2.14577E-4	5.43594E-3	9.33409E-2	2.72757E1	-3.26783E1	-3.26344E1	2.67692E1	1.69728E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98419E-1
1.9E1	3.53E3	3.0E0	7.68E2	5.29E2	-7.201E-2	-8.80019E1	-5.72205E-4	-8.80004E1	2.14577E-4	5.43594E-3	9.33409E-2	2.72895E1	-3.26681E1	-3.26218E1	2.68262E1	1.6987E-7	2.52707E-3	2.52707E-3	6.31817E-3	1.97647E-1
2.0E1	3.03E2	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80018E1	-5.72205E-4	-8.80002E1	1.66893E-4	5.45979E-3	9.3174E-2	2.73293E1	-3.26472E1	-3.26461E1	2.68412E1	1.69654E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98247E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80019E1	-5.48363E-4	-8.80003E1	9.53674E-5	5.60284E-3	9.36031E-2	2.72974E1	-3.26655E1	-3.26119E1	2.6816E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.98937E-1
2.2E1	3.7E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.8002E1	-1.66893E-4	-8.80002E1	9.53674E-5	5.72205E-3	9.35078E-2	2.73393E1	-3.26687E1	-3.26068E1	2.68034E1	1.69943E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00192E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80019E1	-1.43051E-4	-8.80002E1	1.90735E-4	5.34058E-3	9.36985E-2	2.73175E1	-3.26543E1	-3.2626E1	2.68052E1	1.69875E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00499E-1