[Scan]
initial_time=2016-02-17T23:05:08
final_time=2016-02-17T23:05:28
ip_count=19
run=1032
dataset=10
scan=547
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.79879E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.15561E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.30873E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.69009E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.56422E-8
mult1=-1.06697E-8
mult2=-2.66446E-9
rf_tmon=-3.05242E-3
rf_agc=3.62822E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=5.78308E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6556E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19895E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=3.08747E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05124E1
cs_ea1_imon=2.15959E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02593E0
lens1_imon=1.46728E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64678E1
os_ef1alow_imon=2.96758E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.5586E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84365E1
cs_ef1a_imon=3.02561E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.72926E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11152E1
os_restr1_imon=4.24612E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15028E1
os_ea1_imon=2.18755E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.09581E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=1.28075E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02064E1
cs_anode1_imon=3.27062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=4.20346E-8
tplens_vset=1.4E-1
tplens_vmon=1.60545E0
tplens_imon=-4.72318E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.50905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.56851E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.9865E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.48126E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=2.00173E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33947E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87267E0
os_ea2_imon=-5.89119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.15246E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.1148E0
os_ef2alow_imon=-2.5155E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.84112E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1026E1
os_restr2_imon=3.55142E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.26662E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72874E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.10345E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.1126E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=9.88351E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11277E0
cs_ionaccel_imon=-2.23748E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47299E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56046E1
einzel_imon=7.47932E-6
window_vset=0.0E0
window_vmon=1.12849E-1
window_imon=-9.16887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.38903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86031E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.80636E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.51801E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.50551E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.24902E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.57503E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64556E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30849E1
cs_fil1_imon=1.00487E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61984E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6685E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69874E-2
os_fil2_imon=-2.71552E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64328E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.22899E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26364E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22552E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.35083E-1
res40_imon=-2.66146E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4521E4	1.7E1	1.47E2	4.1E1	-7.37103E-2	-8.80016E1	-5.48363E-4	-8.80003E1	2.38419E-5	5.79357E-3	9.2864E-2	2.73193E1	-3.2672E1	-3.26284E1	2.6804E1	1.69798E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9985E-1
2.0E0	5.556E3	3.0E0	3.16E2	1.6E2	-7.42513E-2	-8.80019E1	-5.00679E-4	-8.80003E1	-9.53674E-5	5.57899E-3	9.29117E-2	2.72867E1	-3.26823E1	-3.2626E1	2.6801E1	1.69875E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99803E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80019E1	-4.05312E-4	-8.80001E1	-1.19209E-4	5.79357E-3	9.30071E-2	2.7324E1	-3.26543E1	-3.2629E1	2.67944E1	1.69728E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.99977E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80017E1	-2.14577E-4	-8.8E1	-1.90735E-4	5.34058E-3	9.30071E-2	2.73442E1	-3.26645E1	-3.26374E1	2.67968E1	1.69798E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.00534E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80018E1	-5.24521E-4	-8.80001E1	3.33786E-4	5.4121E-3	9.29832E-2	2.73105E1	-3.26518E1	-3.26266E1	2.6798E1	1.69654E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80019E1	-7.39098E-4	-8.80002E1	7.15256E-5	5.17368E-3	9.31263E-2	2.72819E1	-3.26753E1	-3.26121E1	2.6803E1	1.69728E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80018E1	-5.24521E-4	-8.80002E1	9.53674E-5	5.48363E-3	9.32932E-2	2.73294E1	-3.2679E1	-3.26173E1	2.67527E1	1.69723E-7	2.51498E-3	2.51498E-3	6.33388E-3	2.00231E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80017E1	-4.05312E-4	-8.80003E1	0.0E0	5.29289E-3	9.2721E-2	2.73145E1	-3.2659E1	-3.26431E1	2.68334E1	1.69887E-7	2.51384E-3	2.51384E-3	6.31879E-3	2.00425E-1
1.2E1	3.37E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80018E1	-2.86102E-4	-8.80004E1	3.8147E-4	5.57899E-3	9.27448E-2	2.72979E1	-3.26807E1	-3.26062E1	2.68288E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.00151E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80018E1	-6.19888E-4	-8.79997E1	-4.76837E-5	5.45979E-3	9.3174E-2	2.73161E1	-3.26682E1	-3.26682E1	2.6807E1	1.69875E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.00325E-1
1.4E1	6.36E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80017E1	-4.76837E-4	-8.79997E1	-1.90735E-4	5.45979E-3	9.32693E-2	2.72985E1	-3.26777E1	-3.26476E1	2.67716E1	1.69802E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99456E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80017E1	-6.19888E-4	-8.80001E1	-2.14577E-4	5.50747E-3	9.3627E-2	2.73228E1	-3.26956E1	-3.26372E1	2.67931E1	1.69802E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.98592E-1
1.6E1	3.077E3	2.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80017E1	-4.05312E-4	-8.79997E1	2.38419E-5	5.84126E-3	9.3174E-2	2.73508E1	-3.27384E1	-3.26488E1	2.68106E1	1.69653E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9985E-1
1.7E1	3.6997E4	1.1E1	6.87E2	4.7E2	-7.286E-2	-8.80015E1	-5.48363E-4	-8.79997E1	-2.86102E-4	5.31673E-3	9.28164E-2	2.72889E1	-3.26861E1	-3.26368E1	2.67974E1	1.69728E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98937E-1
1.8E1	1.60932E5	9.5E1	7.27E2	5.0E2	-7.27053E-2	-8.80016E1	-6.19888E-4	-8.79998E1	-1.43051E-4	5.4121E-3	9.31263E-2	2.73482E1	-3.26673E1	-3.26443E1	2.68142E1	1.69802E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99283E-1
1.9E1	3.473E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80016E1	-6.67572E-4	-8.79999E1	1.43051E-4	5.57899E-3	9.3174E-2	2.72962E1	-3.2682E1	-3.26549E1	2.67817E1	1.69653E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.00534E-1
2.0E1	3.49E2	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80019E1	-8.58307E-4	-8.8E1	0.0E0	5.55515E-3	9.31501E-2	2.72985E1	-3.26849E1	-3.26506E1	2.67994E1	1.69875E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80018E1	-1.04904E-3	-8.8E1	7.15256E-5	5.38826E-3	9.29356E-2	2.73045E1	-3.2639E1	-3.26207E1	2.68304E1	1.69689E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00277E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.8002E1	-8.58307E-4	-8.80001E1	-1.19209E-4	5.43594E-3	9.33886E-2	2.73472E1	-3.26801E1	-3.26386E1	2.67848E1					
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.8002E1	-6.4373E-4	-8.80002E1	2.38419E-5	5.17368E-3	9.32932E-2	2.72874E1	-3.26744E1	-3.2629E1	2.68016E1	1.69875E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00325E-1