[Scan]
initial_time=2016-02-17T23:05:35
final_time=2016-02-17T23:05:55
ip_count=19
run=1032
dataset=10
scan=548
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.84696E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.67472E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.28551E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.59693E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.55582E-8
mult1=-8.78733E-9
mult2=-2.91193E-9
rf_tmon=-7.12047E-3
rf_agc=3.10082E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=5.47659E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66455E0
bslens_imon=2.61462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20042E1
lens5a_imon=1.99261E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12537E2
lens4a_imon=2.05142E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.06523E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04878E1
cs_ea1_imon=2.16816E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03134E0
lens1_imon=1.43618E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04171E1
cs_ea2_imon=1.58068E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.01586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.72959E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11063E1
os_restr1_imon=4.26391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.19771E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2857E0
cs_ionrep_imon=1.26539E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93437E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.27642E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=4.20298E-8
tplens_vset=1.4E-1
tplens_vmon=1.62116E0
tplens_imon=-2.60206E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26235E1
iondef3_imon=1.47848E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.57373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98287E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.52287E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2828E0
ionrepsh_imon=2.01451E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.18832E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86159E0
os_ea2_imon=-6.3216E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.004E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.8452E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.54312E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.30936E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.27416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73113E1
iondef1_imon=1.08776E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68069E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.10888E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=9.86139E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86134E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.62035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.60182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.15454E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46161E0
defgridb_imon=6.01087E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33304E1
os_fil1_imon=9.58211E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07179E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64363E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=1.0064E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62636E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66874E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.79733E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65402E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22488E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=2.0093E-1
chamber_ion_pmon=1.6979E-7
chamber_cvt_pmon=2.52405E-3
foreline_cvt_pmon=2.52405E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.44586E-1
res40_imon=-2.7096E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.462E4	8.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80022E1	-6.91414E-4	-8.80002E1	-7.15256E-5	5.126E-3	9.36508E-2	2.72979E1	-3.26957E1	-3.26014E1	2.67746E1	1.69798E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9968E-1
2.0E0	5.445E3	7.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80023E1	-5.24521E-4	-8.80001E1	-3.33786E-4	4.95911E-3	9.32693E-2	2.73157E1	-3.27074E1	-3.2606E1	2.67782E1	1.69725E-7	2.52492E-3	2.52492E-3	6.3074E-3	1.9883E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.8002E1	-5.48363E-4	-8.80004E1	7.15256E-5	5.10216E-3	9.35793E-2	2.73088E1	-3.26591E1	-3.26132E1	2.68142E1	1.69949E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.8002E1	-7.15256E-4	-8.79998E1	-1.19209E-4	5.14984E-3	9.34124E-2	2.73063E1	-3.26597E1	-3.26446E1	2.67914E1	1.69728E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.8002E1	-4.29153E-4	-8.80002E1	4.76837E-5	5.50747E-3	9.33409E-2	2.73204E1	-3.26708E1	-3.26726E1	2.6807E1	1.69949E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80018E1	-5.24521E-4	-8.80004E1	-4.76837E-5	5.43594E-3	9.34124E-2	2.73297E1	-3.26398E1	-3.26212E1	2.68124E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00673E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80016E1	-3.8147E-4	-8.80004E1	-2.38419E-5	5.29289E-3	9.32455E-2	2.72815E1	-3.26826E1	-3.26248E1	2.67821E1	1.70015E-7	2.52815E-3	2.52815E-3	6.32896E-3	2.00192E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80018E1	-8.82149E-4	-8.80003E1	-2.14577E-4	5.26905E-3	9.33409E-2	2.73105E1	-3.26536E1	-3.26002E1	2.68119E1	1.69798E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.01047E-1
1.2E1	3.33E2	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80021E1	-5.24521E-4	-8.8E1	-2.38419E-5	5.17368E-3	9.31978E-2	2.73117E1	-3.26627E1	-3.26134E1	2.68141E1	1.69656E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.98872E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80018E1	-3.33786E-4	-8.80003E1	1.43051E-4	4.86374E-3	9.33409E-2	2.73069E1	-3.26494E1	-3.26254E1	2.67836E1	1.69798E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.9883E-1
1.4E1	6.77E2	0.0E0	5.66E2	3.82E2	-7.15461E-2	-8.8002E1	-4.76837E-5	-8.80001E1	-2.6226E-4	5.31673E-3	9.31978E-2	2.73201E1	-3.26813E1	-3.26212E1	2.68196E1	1.69949E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.98592E-1
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.8002E1	-4.05312E-4	-8.80002E1	2.38419E-5	5.05447E-3	9.32455E-2	2.73243E1	-3.2623E1	-3.2626E1	2.68076E1	1.69875E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00412E-1
1.6E1	3.118E3	2.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80019E1	-5.96046E-4	-8.80004E1	1.43051E-4	5.03063E-3	9.33409E-2	2.73478E1	-3.26843E1	-3.25521E1	2.68292E1					
1.7E1	3.7021E4	2.2E1	6.87E2	4.7E2	-7.27053E-2	-8.80019E1	-3.09944E-4	-8.80003E1	9.53674E-5	5.50747E-3	9.3174E-2	2.73231E1	-3.26669E1	-3.26416E1	2.67914E1	1.69802E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.9963E-1
1.8E1	1.59851E5	8.9E1	7.27E2	5.0E2	-7.38649E-2	-8.80021E1	-6.91414E-4	-8.80002E1	-7.15256E-5	5.53131E-3	9.33647E-2	2.72745E1	-3.26879E1	-3.26332E1	2.68082E1	1.69802E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98247E-1
1.9E1	3.575E3	2.0E0	7.68E2	5.29E2	-7.39421E-2	-8.8002E1	-7.39098E-4	-8.80004E1	7.15256E-5	5.05447E-3	9.35078E-2	2.7311E1	-3.26891E1	-3.26331E1	2.67872E1	1.69654E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.98247E-1
2.0E1	3.06E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80018E1	-4.05312E-4	-8.80003E1	-2.38419E-4	5.36442E-3	9.34362E-2	2.73201E1	-3.27131E1	-3.2608E1	2.67974E1	1.69909E-7	2.51593E-3	2.51593E-3	6.32916E-3	1.98969E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80017E1	-8.34465E-4	-8.80003E1	2.38419E-5	5.67436E-3	9.32932E-2	2.73399E1	-3.26856E1	-3.2662E1	2.68146E1					
2.2E1	4.2E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80018E1	-5.48363E-4	-8.80001E1	1.19209E-4	5.55515E-3	9.31025E-2	2.73092E1	-3.26422E1	-3.26306E1	2.67949E1	1.69875E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99977E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80019E1	-6.19888E-4	-8.80002E1	-4.76837E-5	5.45979E-3	9.36031E-2	2.73113E1	-3.26591E1	-3.26235E1	2.68069E1	1.6979E-7	2.52405E-3	2.52405E-3	6.3126E-3	2.0093E-1