[Scan]
initial_time=2016-02-17T23:10:28
final_time=2016-02-17T23:10:48
ip_count=19
run=1032
dataset=10
scan=559
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.73676E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.80859E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.33114E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.55081E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.55362E-8
mult1=-1.0511E-8
mult2=-2.78847E-9
rf_tmon=-4.4223E-3
rf_agc=3.27688E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.47349E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70928E0
bslens_imon=2.30612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=2.0442E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04654E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=3.0555E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02878E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0474E1
cs_ea1_imon=2.11499E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06251E0
lens1_imon=1.42834E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04097E1
cs_ea2_imon=1.56108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.01297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.72858E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.2758E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=2.19746E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=1.26235E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93321E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=3.26489E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=4.2031E-8
tplens_vset=1.4E-1
tplens_vmon=1.58421E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26687E1
iondef3_imon=1.5186E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26843E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=9.00531E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3223E0
ionrepsh_imon=2.00987E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32908E1
lens5b_imon=2.19428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.92636E0
os_ea2_imon=-4.93555E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06041E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.63497E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.53411E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23146E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.27668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73273E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.10781E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.87046E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47143E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56111E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-1.23198E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.8596E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.25775E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.08975E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.50551E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30811E0
defgridb_imon=6.28441E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33294E1
os_fil1_imon=9.58434E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07023E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63651E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3083E1
cs_fil1_imon=1.00565E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62264E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66267E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.7861E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66986E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22704E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.62005E-1
res40_imon=-2.82133E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.496E4	1.4E1	1.47E2	4.1E1	-7.24736E-2	-8.80018E1	-7.15256E-4	-8.80001E1	4.76837E-5	5.74589E-3	9.36031E-2	2.74503E1	-3.26523E1	-3.26476E1	2.67894E1	1.6987E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9951E-1
2.0E0	5.684E3	6.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80021E1	-5.96046E-4	-8.80001E1	-2.38419E-5	5.48363E-3	9.34839E-2	2.73448E1	-3.26669E1	-3.26536E1	2.67842E1	1.69707E-7	2.51428E-3	2.51428E-3	6.3168E-3	1.99135E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80022E1	-5.48363E-4	-8.80005E1	4.76837E-5	5.29289E-3	9.33886E-2	2.73237E1	-3.27071E1	-3.26452E1	2.68016E1	1.69728E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99456E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80022E1	-5.96046E-4	-8.80003E1	-2.38419E-5	5.38826E-3	9.35078E-2	2.73104E1	-3.26248E1	-3.26107E1	2.67998E1	1.69728E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00673E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80021E1	-5.72205E-4	-8.80003E1	9.53674E-5	5.67436E-3	9.3317E-2	2.73111E1	-3.2635E1	-3.2614E1	2.68196E1	1.69581E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.00705E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80021E1	-2.6226E-4	-8.8E1	2.38419E-5	5.31673E-3	9.31025E-2	2.73009E1	-3.26506E1	-3.26146E1	2.68388E1	1.69728E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80022E1	-4.52995E-4	-8.80002E1	2.38419E-4	5.29289E-3	9.36031E-2	2.73201E1	-3.26651E1	-3.2644E1	2.68244E1	1.69802E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.01197E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80019E1	-4.29153E-4	-8.80003E1	3.09944E-4	5.48363E-3	9.34124E-2	2.72868E1	-3.26773E1	-3.26248E1	2.68151E1	1.69875E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00151E-1
1.2E1	3.24E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80021E1	-4.52995E-4	-8.80001E1	1.90735E-4	5.53131E-3	9.35316E-2	2.73538E1	-3.27167E1	-3.26338E1	2.67938E1	1.69875E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.00499E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.8002E1	-8.10623E-4	-8.80002E1	9.53674E-5	5.45979E-3	9.32217E-2	2.73045E1	-3.26633E1	-3.26404E1	2.67884E1	1.69654E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98592E-1
1.4E1	6.8E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.8002E1	-6.67572E-4	-8.80003E1	-4.76837E-5	5.4121E-3	9.34362E-2	2.72803E1	-3.2688E1	-3.26354E1	2.67968E1	1.69725E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.98491E-1
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80022E1	-5.24521E-4	-8.79997E1	-3.57628E-4	5.76973E-3	9.31978E-2	2.73015E1	-3.26669E1	-3.26434E1	2.6768E1	1.69654E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98937E-1
1.6E1	3.098E3	1.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80019E1	-7.86781E-4	-8.80003E1	-2.86102E-4	5.6982E-3	9.36031E-2	2.72654E1	-3.26699E1	-3.26591E1	2.68442E1	1.69653E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00021E-1
1.7E1	3.6858E4	1.8E1	6.87E2	4.7E2	-7.26282E-2	-8.80018E1	-1.09673E-3	-8.80002E1	-1.43051E-4	5.38826E-3	9.33409E-2	2.73069E1	-3.26639E1	-3.26296E1	2.67692E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.01022E-1
1.8E1	1.60069E5	8.6E1	7.27E2	5.0E2	-7.24736E-2	-8.80019E1	-5.96046E-4	-8.80003E1	-2.38419E-5	5.38826E-3	9.38892E-2	2.73057E1	-3.26614E1	-3.2629E1	2.67833E1	1.69875E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00673E-1
1.9E1	3.589E3	3.0E0	7.68E2	5.29E2	-7.17007E-2	-8.8002E1	-6.19888E-4	-8.80001E1	1.19209E-4	5.10216E-3	9.35078E-2	2.73063E1	-3.26723E1	-3.26693E1	2.68028E1	1.6987E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00021E-1
2.0E1	3.2E2	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80022E1	-3.33786E-4	-8.8E1	-1.43051E-4	5.53131E-3	9.3627E-2	2.73033E1	-3.26615E1	-3.26187E1	2.68132E1	1.69806E-7	2.51804E-3	2.51804E-3	6.29067E-3	2.01708E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80021E1	-3.8147E-4	-8.80001E1	3.09944E-4	5.31673E-3	9.34124E-2	2.733E1	-3.26903E1	-3.26243E1	2.67717E1	1.69802E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.01547E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80021E1	-8.34465E-4	-8.8E1	-3.8147E-4	5.38826E-3	9.36031E-2	2.73015E1	-3.26579E1	-3.26362E1	2.68262E1	1.69653E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00192E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80019E1	-4.52995E-4	-8.80003E1	1.90735E-4	5.53131E-3	9.34124E-2	2.73273E1	-3.26843E1	-3.26687E1	2.6828E1	1.69798E-7	2.52492E-3	2.52492E-3	6.33436E-3	1.9968E-1