[Scan]
initial_time=2016-02-17T23:12:25
final_time=2016-02-17T23:12:45
ip_count=19
run=1032
dataset=11
scan=563
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08761E-4
ql1_vset=
ql1_vmon=-8.2016E-1
ql1_imon=1.61982E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.80887E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=7.11426E-9
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-1.12379E-10
mult1=-9.46345E-9
mult2=-2.65873E-9
rf_tmon=-5.47375E-3
rf_agc=3.27448E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=1.43921E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66513E0
bslens_imon=2.72933E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19915E1
lens5a_imon=1.97662E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53777E1
cs_ef1b_imon=3.05098E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02288E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05185E1
cs_ea1_imon=2.18102E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41717E0
lens1_imon=2.68066E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64545E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03777E1
cs_ea2_imon=1.57999E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84105E1
cs_ef1a_imon=3.01936E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.73133E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1132E1
os_restr1_imon=4.25099E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15462E1
os_ea1_imon=2.18033E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6345E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24862E0
cs_ionrep_imon=1.2567E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93403E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01769E1
cs_anode1_imon=3.28348E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.68031E-8
tplens_vset=1.4E-1
tplens_vmon=1.61362E0
tplens_imon=-1.69825E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26603E1
iondef3_imon=1.50768E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.5713E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.9837E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.95083E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25557E0
ionrepsh_imon=2.02772E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.18519E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.12118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84595E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00571E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71188E1
cs_ef2a_imon=3.17574E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09047E0
os_ef2alow_imon=-2.68232E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.74845E-1
os_ef2bup_imon=-5.39996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.54099E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30763E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.27496E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.08602E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.08468E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.05565E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=9.86734E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14173E0
cs_ionaccel_imon=-1.81698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47146E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56428E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=1.68453E-1
window_imon=-1.12888E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86083E1
mask2_imon=-7.91778E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.30054E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.46277E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.35963E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42391E0
defgridb_imon=6.07344E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.58719E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06721E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64229E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30827E1
cs_fil1_imon=1.00611E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61503E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66894E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82221E-2
os_fil2_imon=-2.64602E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76464E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32773E-1
cs_fil2_imon=-2.64602E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02617E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22435E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.69728E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.76786E-1
res40_imon=-2.59891E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.20994E-1	-7.98631E-1	-9.13227E0	-9.14197E0	5.48363E-3	9.33647E-2	2.72968E1	-3.26679E1	-3.26337E1	2.6807E1	1.69652E-7	2.51709E-3	2.51709E-3	6.30212E-3	2.00735E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.20804E-1	-7.9844E-1	-9.13224E0	-9.14185E0	5.62668E-3	9.30548E-2	2.73045E1	-3.26811E1	-3.26346E1	2.67686E1	1.69725E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.20279E-1	-7.98559E-1	-9.13193E0	-9.14195E0	5.31673E-3	9.31978E-2	2.73034E1	-3.26761E1	-3.2663E1	2.68146E1	1.69731E-7	2.51804E-3	2.51804E-3	6.30182E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.20351E-1	-7.98559E-1	-9.13212E0	-9.14202E0	5.55515E-3	9.32932E-2	2.73473E1	-3.26799E1	-3.26389E1	2.67908E1	1.6986E-7	2.51369E-3	2.51369E-3	6.29185E-3	2.01759E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.20255E-1	-7.98678E-1	-9.13208E0	-9.14207E0	5.48363E-3	9.30548E-2	2.72868E1	-3.26472E1	-3.26301E1	2.68088E1	1.69731E-7	2.52362E-3	2.52362E-3	6.31858E-3	2.0064E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.20208E-1	-7.9844E-1	-9.13174E0	-9.14214E0	5.57899E-3	9.3317E-2	2.73153E1	-3.26753E1	-3.26224E1	2.67848E1	1.69653E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.00192E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.20541E-1	-7.98178E-1	-9.13186E0	-9.14173E0	5.53131E-3	9.33647E-2	2.7308E1	-3.26443E1	-3.26349E1	2.68233E1	1.69654E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.20398E-1	-7.98225E-1	-9.13188E0	-9.14171E0	5.67436E-3	9.38177E-2	2.73003E1	-3.26597E1	-3.26038E1	2.67986E1	1.69725E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.00021E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.20327E-1	-7.98178E-1	-9.13193E0	-9.14197E0	5.53131E-3	9.35078E-2	2.73273E1	-3.26657E1	-3.26278E1	2.68046E1	1.69875E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.2047E-1	-7.9813E-1	-9.13181E0	-9.14171E0	5.67436E-3	9.35316E-2	2.73063E1	-3.26615E1	-3.26212E1	2.6828E1	1.69802E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00673E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.20136E-1	-7.98726E-1	-9.13179E0	-9.14195E0	5.60284E-3	9.35555E-2	2.73237E1	-3.26416E1	-3.26296E1	2.681E1	1.69802E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.20303E-1	-7.98726E-1	-9.13165E0	-9.14199E0	5.34058E-3	9.36985E-2	2.73225E1	-3.27113E1	-3.26296E1	2.67908E1	1.69654E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99803E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.20255E-1	-7.98917E-1	-9.13153E0	-9.14204E0	5.67436E-3	9.29832E-2	2.73345E1	-3.27215E1	-3.26395E1	2.67995E1	1.69728E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
1.7E1	2.1E1	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.20279E-1	-7.9844E-1	-9.13146E0	-9.14176E0	5.55515E-3	9.3174E-2	2.73039E1	-3.26549E1	-3.26152E1	2.67926E1	1.69731E-7	2.51804E-3	2.51804E-3	6.30182E-3	1.99577E-1
1.8E1	8.3E1	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.20446E-1	-7.98321E-1	-9.13148E0	-9.14197E0	5.6982E-3	9.34124E-2	2.73027E1	-3.26536E1	-3.26368E1	2.68208E1	1.69728E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.98764E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.20422E-1	-7.98392E-1	-9.13126E0	-9.14195E0	5.72205E-3	9.3317E-2	2.73315E1	-3.26813E1	-3.2629E1	2.6813E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.20684E-1	-7.98512E-1	-9.13072E0	-9.14207E0	5.79357E-3	9.31501E-2	2.73165E1	-3.26603E1	-3.26104E1	2.6783E1	1.69802E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.20374E-1	-7.98249E-1	-9.13076E0	-9.14207E0	5.81741E-3	9.34839E-2	2.73104E1	-3.26797E1	-3.26201E1	2.67984E1	1.69728E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.97903E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.20184E-1	-7.98488E-1	-9.13067E0	-9.14207E0	5.84126E-3	9.32932E-2	2.73093E1	-3.26813E1	-3.26512E1	2.68136E1	1.69725E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.2016E-1	-7.98583E-1	-9.13084E0	-9.1419E0	5.84126E-3	9.31978E-2	2.73003E1	-3.26639E1	-3.26603E1	2.6798E1	1.69728E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99283E-1