[Scan]
initial_time=2016-02-17T23:13:18
final_time=2016-02-17T23:13:38
ip_count=19
run=1032
dataset=11
scan=565
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.1923E-1
ql1_imon=1.4383E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.84382E-9
ql3_vset=
ql3_vmon=-9.1306E0
ql3_imon=2.63929E-9
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=2.49183E-10
mult1=-9.64406E-9
mult2=-2.77251E-9
rf_tmon=-4.57852E-3
rf_agc=3.27388E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.53543E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62197E0
bslens_imon=2.66006E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.98616E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.06379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.01969E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05071E1
cs_ea1_imon=2.16348E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40088E0
lens1_imon=2.62466E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.56285E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.00108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.7321E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.17658E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63443E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27687E0
cs_ionrep_imon=1.26483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=3.27823E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=3.69418E-8
tplens_vset=1.4E-1
tplens_vmon=1.62905E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.48498E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.57736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.03556E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28572E0
ionrepsh_imon=2.02792E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34265E1
lens5b_imon=2.19675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86324E0
os_ea2_imon=-5.43106E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06174E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.64698E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.54168E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.2738E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73207E1
iondef1_imon=1.10768E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09877E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=9.87671E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-1.15269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.8605E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.32854E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.66667E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.67894E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33764E0
defgridb_imon=6.26318E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.59131E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07696E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64427E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=1.00741E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61645E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66645E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80005E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7749E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22593E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99803E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.94441E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.19802E-1	-7.98297E-1	-9.13043E0	-9.14187E0	5.36442E-3	9.33886E-2	2.73163E1	-3.26779E1	-3.26443E1	2.68099E1	1.69653E-7	2.50989E-3	2.50989E-3	6.31817E-3	2.00021E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.19492E-1	-7.98631E-1	-9.13064E0	-9.14187E0	5.60284E-3	9.34124E-2	2.73277E1	-3.26946E1	-3.26266E1	2.68076E1	1.6987E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.19468E-1	-7.98655E-1	-9.13043E0	-9.14197E0	5.50747E-3	9.33886E-2	2.73074E1	-3.26648E1	-3.26573E1	2.67868E1	1.69806E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.19135E-1	-7.98631E-1	-9.13062E0	-9.14187E0	5.6982E-3	9.33409E-2	2.73111E1	-3.26554E1	-3.26332E1	2.68166E1	1.69652E-7	2.51919E-3	2.51919E-3	6.30212E-3	1.98063E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.19135E-1	-7.98798E-1	-9.13055E0	-9.14207E0	5.93662E-3	9.32932E-2	2.72967E1	-3.26458E1	-3.26458E1	2.67902E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.1923E-1	-7.98917E-1	-9.13081E0	-9.14197E0	5.31673E-3	9.36508E-2	2.73087E1	-3.26705E1	-3.26657E1	2.67944E1	1.69728E-7	2.51552E-3	2.51552E-3	6.34588E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.19302E-1	-7.98821E-1	-9.13064E0	-9.14185E0	5.50747E-3	9.33886E-2	2.72952E1	-3.2681E1	-3.26324E1	2.68105E1	1.69581E-7	2.51771E-3	2.51771E-3	6.3514E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.19468E-1	-7.9875E-1	-9.13072E0	-9.14221E0	5.81741E-3	9.3174E-2	2.73261E1	-3.26651E1	-3.2638E1	2.67848E1	1.69794E-7	2.52236E-3	2.52236E-3	6.30212E-3	2.01072E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.19278E-1	-7.98678E-1	-9.13053E0	-9.14204E0	5.57899E-3	9.3174E-2	2.73255E1	-3.26675E1	-3.26693E1	2.68178E1	1.69654E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.19278E-1	-7.98726E-1	-9.13057E0	-9.14197E0	5.55515E-3	9.30786E-2	2.72919E1	-3.265E1	-3.26356E1	2.67854E1	1.69802E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.19373E-1	-7.98631E-1	-9.13062E0	-9.14171E0	5.48363E-3	9.3317E-2	2.73363E1	-3.26597E1	-3.26272E1	2.67896E1	1.69654E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.19325E-1	-7.98655E-1	-9.13057E0	-9.14202E0	5.38826E-3	9.34839E-2	2.73204E1	-3.2659E1	-3.26136E1	2.6785E1	1.69654E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.00499E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.19373E-1	-7.98631E-1	-9.13048E0	-9.1419E0	5.72205E-3	9.33409E-2	2.73167E1	-3.26897E1	-3.26113E1	2.68257E1	1.69725E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.00021E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.19135E-1	-7.98965E-1	-9.13055E0	-9.14223E0	5.72205E-3	9.30548E-2	2.73063E1	-3.26368E1	-3.2617E1	2.67872E1	1.69731E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.00463E-1
1.8E1	9.4E1	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.19588E-1	-7.98368E-1	-9.13076E0	-9.14195E0	5.79357E-3	9.30548E-2	2.73087E1	-3.2653E1	-3.26158E1	2.67956E1	1.69802E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.00673E-1
1.9E1	0.0E0	1.0E0	7.68E2	5.29E2	-2.09441E0	-8.1954E-1	-7.98178E-1	-9.13067E0	-9.14207E0	5.67436E-3	9.34362E-2	2.73375E1	-3.26717E1	-3.26284E1	2.67992E1	1.69802E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.19349E-1	-7.98368E-1	-9.13062E0	-9.14204E0	5.6982E-3	9.35316E-2	2.73141E1	-3.26494E1	-3.2623E1	2.6771E1	1.69728E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.1923E-1	-7.98488E-1	-9.13036E0	-9.14214E0	5.79357E-3	9.3627E-2	2.7288E1	-3.26555E1	-3.26225E1	2.68146E1	1.69875E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.1923E-1	-7.98225E-1	-9.1306E0	-9.1419E0	5.79357E-3	9.31978E-2	2.72955E1	-3.26585E1	-3.26158E1	2.67788E1	1.69653E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.1923E-1	-7.98225E-1	-9.1306E0	-9.14183E0	5.48363E-3	9.34362E-2	2.73207E1	-3.26771E1	-3.26404E1	2.6807E1	1.69875E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99803E-1