[Scan]
initial_time=2016-02-17T23:13:45
final_time=2016-02-17T23:14:04
ip_count=19
run=1032
dataset=11
scan=566
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.0871E-4
ql1_vset=
ql1_vmon=-8.18968E-1
ql1_imon=1.42576E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.90276E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=2.10187E-9
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=3.19314E-10
mult1=-9.76171E-9
mult2=-2.67931E-9
rf_tmon=-4.48311E-3
rf_agc=3.38562E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=1.53407E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64131E0
bslens_imon=2.65615E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20145E1
lens5a_imon=1.9722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05247E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53864E1
cs_ef1b_imon=3.06593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02131E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05034E1
cs_ea1_imon=2.18087E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38736E0
lens1_imon=2.6015E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97487E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03167E1
cs_ea2_imon=1.58491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.01275E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.73E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11187E1
os_restr1_imon=4.26558E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15265E1
os_ea1_imon=2.19521E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63502E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28284E0
cs_ionrep_imon=1.26149E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01682E1
cs_anode1_imon=3.28278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=3.69089E-8
tplens_vset=1.4E-1
tplens_vmon=1.6107E0
tplens_imon=-3.66322E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.49646E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26557E1
iondef2_imon=1.5873E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98506E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.05366E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25381E0
ionrepsh_imon=2.03777E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34044E1
lens5b_imon=2.19487E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7449E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88221E0
os_ea2_imon=-5.81481E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00725E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71327E1
cs_ef2a_imon=3.17852E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10842E0
os_ef2alow_imon=-2.63019E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.7137E-1
os_ef2bup_imon=-5.43819E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=3.53265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.29962E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73301E1
iondef1_imon=1.10268E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68031E1
iondef4_imon=1.08156E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.0968E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=9.8753E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-2.02897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47337E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56133E1
einzel_imon=7.53493E-6
window_vset=0.0E0
window_vmon=1.49918E-1
window_imon=-1.08022E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.86025E1
mask2_imon=-6.97946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9268E3
multa_neg_imon=7.62529E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.89102E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.29743E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42452E0
defgridb_imon=6.09527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.59652E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07265E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64319E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3081E1
cs_fil1_imon=1.00586E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62488E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66554E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7214E-2
os_fil2_imon=-2.71552E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99924E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80481E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.29849E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.003E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22583E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.75627E-1
res40_imon=-2.62324E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.19111E-1	-7.98607E-1	-9.13074E0	-9.14197E0	5.88894E-3	9.33409E-2	2.73302E1	-3.26884E1	-3.26376E1	2.67962E1	1.6986E-7	2.52197E-3	2.52197E-3	6.323E-3	1.99611E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.19111E-1	-7.98416E-1	-9.13091E0	-9.14185E0	5.91278E-3	9.3627E-2	2.73069E1	-3.26658E1	-3.26615E1	2.67733E1	1.69806E-7	2.52809E-3	2.52809E-3	6.32418E-3	1.99754E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.1923E-1	-7.98225E-1	-9.13057E0	-9.14209E0	5.65052E-3	9.35316E-2	2.73207E1	-3.26654E1	-3.26451E1	2.67943E1	1.69657E-7	2.51611E-3	2.51611E-3	6.34164E-3	2.00064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.19325E-1	-7.98655E-1	-9.13053E0	-9.14192E0	5.79357E-3	9.35793E-2	2.73155E1	-3.27038E1	-3.26089E1	2.68016E1	1.70007E-7	2.52342E-3	2.52342E-3	6.32328E-3	2.00735E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.19468E-1	-7.98726E-1	-9.13076E0	-9.14192E0	5.98431E-3	9.32217E-2	2.73098E1	-3.26579E1	-3.26425E1	2.67818E1	1.69728E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.19421E-1	-7.98559E-1	-9.13076E0	-9.14183E0	5.6982E-3	9.31025E-2	2.73171E1	-3.26663E1	-3.2635E1	2.68172E1	1.69802E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.01022E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.1923E-1	-7.98607E-1	-9.13072E0	-9.14176E0	5.6982E-3	9.31263E-2	2.73087E1	-3.26591E1	-3.26368E1	2.68052E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.19182E-1	-7.98321E-1	-9.13093E0	-9.14199E0	5.6982E-3	9.31263E-2	2.72895E1	-3.26398E1	-3.26699E1	2.6792E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00673E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.19206E-1	-7.98535E-1	-9.13062E0	-9.14199E0	5.60284E-3	9.30309E-2	2.72937E1	-3.26663E1	-3.26164E1	2.67974E1	1.69581E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.1892E-1	-7.98798E-1	-9.13076E0	-9.14161E0	5.72205E-3	9.33647E-2	2.73057E1	-3.26596E1	-3.26319E1	2.67956E1	1.69946E-7	2.52243E-3	2.52243E-3	6.31555E-3	2.00258E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.19325E-1	-7.98702E-1	-9.13053E0	-9.14195E0	5.76973E-3	9.27687E-2	2.72965E1	-3.2648E1	-3.26297E1	2.67986E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.19182E-1	-7.98726E-1	-9.13081E0	-9.14199E0	5.34058E-3	9.34362E-2	2.73375E1	-3.26747E1	-3.26326E1	2.68124E1	1.69656E-7	2.51359E-3	2.51359E-3	6.29067E-3	1.99577E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.19159E-1	-7.98678E-1	-9.13081E0	-9.14187E0	5.60284E-3	9.3174E-2	2.73246E1	-3.2708E1	-3.26596E1	2.67902E1	1.69581E-7	2.52867E-3	2.52867E-3	6.29645E-3	1.99803E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.19397E-1	-7.98941E-1	-9.13084E0	-9.14202E0	5.55515E-3	9.29832E-2	2.73003E1	-3.26549E1	-3.26591E1	2.6801E1	1.70015E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.01047E-1
1.8E1	8.6E1	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.19612E-1	-7.98631E-1	-9.13076E0	-9.14149E0	5.31673E-3	9.30548E-2	2.73434E1	-3.26862E1	-3.26366E1	2.67729E1	1.69725E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.00192E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.1954E-1	-7.98821E-1	-9.13086E0	-9.14187E0	5.17368E-3	9.33647E-2	2.73033E1	-3.26524E1	-3.26663E1	2.67577E1	1.70097E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.00847E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.1923E-1	-7.98941E-1	-9.13029E0	-9.14185E0	5.55515E-3	9.33647E-2	2.73129E1	-3.26464E1	-3.26326E1	2.6807E1	1.69949E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.19039E-1	-7.98702E-1	-9.13069E0	-9.14176E0	5.60284E-3	9.33409E-2	2.73411E1	-3.26626E1	-3.26508E1	2.67836E1	1.69728E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00151E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.19087E-1	-7.98535E-1	-9.13062E0	-9.14159E0	5.34058E-3	9.30309E-2	2.73204E1	-3.2659E1	-3.26461E1	2.68059E1	1.69798E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.01047E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.18968E-1	-7.98559E-1	-9.13117E0	-9.14183E0	5.65052E-3	9.3174E-2	2.73301E1	-3.26557E1	-3.2644E1	2.68031E1	1.69653E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9883E-1