[Scan]
initial_time=2016-02-17T23:14:12
final_time=2016-02-17T23:14:31
ip_count=19
run=1032
dataset=11
scan=567
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08721E-4
ql1_vset=
ql1_vmon=-8.18706E-1
ql1_imon=1.40998E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.8571E-9
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=1.81733E-9
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=3.29065E-10
mult1=-8.82552E-9
mult2=-2.58411E-9
rf_tmon=-4.62746E-3
rf_agc=3.33799E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=1.57334E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68116E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.97586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=3.07244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0488E1
cs_ea1_imon=2.16188E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38518E0
lens1_imon=2.79731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.56634E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84148E1
cs_ef1a_imon=3.01009E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.7316E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.24409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=2.19072E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.26172E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.9333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=3.27967E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.68324E-8
tplens_vset=1.4E-1
tplens_vmon=1.63242E0
tplens_imon=-4.21914E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26366E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26425E1
iondef2_imon=1.5804E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.06176E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=2.022E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.17443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84932E0
os_ea2_imon=-4.0389E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53285E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=3.52906E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.32019E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02019E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72927E1
iondef1_imon=1.08796E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6796E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.10136E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=9.89779E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-2.18342E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.52471E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.85972E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.32153E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=6.2112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33298E1
os_fil1_imon=9.59599E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07593E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6418E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30838E1
cs_fil1_imon=1.00652E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62113E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67237E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69968E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75331E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.80412E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22487E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.14843E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E1	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.18729E-1	-7.98631E-1	-9.13072E0	-9.14166E0	5.29289E-3	9.31501E-2	2.73269E1	-3.26579E1	-3.26402E1	2.68041E1	1.69949E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.00499E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.1861E-1	-7.99036E-1	-9.13055E0	-9.14178E0	5.60284E-3	9.29832E-2	2.73173E1	-3.2678E1	-3.26174E1	2.68207E1	1.69581E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.18777E-1	-7.98798E-1	-9.13053E0	-9.14168E0	5.65052E-3	9.30071E-2	2.73202E1	-3.26787E1	-3.26422E1	2.68122E1	1.69806E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.0064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.18729E-1	-7.98917E-1	-9.13053E0	-9.14202E0	5.74589E-3	9.30786E-2	2.7298E1	-3.26762E1	-3.26402E1	2.67775E1	1.6976E-7	2.52043E-3	2.52043E-3	6.31007E-3	1.99705E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.18849E-1	-7.98607E-1	-9.13064E0	-9.14216E0	5.76973E-3	9.32217E-2	2.73303E1	-3.27011E1	-3.26062E1	2.67968E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18706E-1	-7.98702E-1	-9.1306E0	-9.14192E0	5.62668E-3	9.33647E-2	2.73122E1	-3.2652E1	-3.26638E1	2.68382E1	1.69653E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.00192E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.18753E-1	-7.98512E-1	-9.1306E0	-9.14171E0	5.48363E-3	9.2864E-2	2.73333E1	-3.26783E1	-3.26038E1	2.68106E1	1.69728E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.18777E-1	-7.98512E-1	-9.13043E0	-9.1418E0	5.65052E-3	9.27925E-2	2.73131E1	-3.26401E1	-3.26199E1	2.67866E1	1.69802E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.18777E-1	-7.98416E-1	-9.13091E0	-9.14164E0	5.67436E-3	9.29117E-2	2.73237E1	-3.26747E1	-3.26242E1	2.68088E1	1.69581E-7	2.52809E-3	2.52809E-3	6.29624E-3	2.00818E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.18801E-1	-7.98321E-1	-9.13095E0	-9.14166E0	5.53131E-3	9.28164E-2	2.7285E1	-3.26502E1	-3.26431E1	2.6813E1	1.69802E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99803E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.18801E-1	-7.98225E-1	-9.13086E0	-9.14195E0	5.36442E-3	9.33409E-2	2.73087E1	-3.26663E1	-3.26212E1	2.67842E1	1.69725E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9951E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.18753E-1	-7.98345E-1	-9.13093E0	-9.14195E0	5.19753E-3	9.32932E-2	2.73051E1	-3.26494E1	-3.265E1	2.68208E1	1.69802E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00151E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.19087E-1	-7.98512E-1	-9.13069E0	-9.14195E0	5.62668E-3	9.34124E-2	2.73159E1	-3.26777E1	-3.26284E1	2.67992E1	1.69949E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.00499E-1
1.7E1	2.2E1	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.18729E-1	-7.98273E-1	-9.13079E0	-9.14152E0	5.67436E-3	9.31263E-2	2.73128E1	-3.26832E1	-3.26278E1	2.67931E1	1.69943E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9934E-1
1.8E1	7.9E1	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.18753E-1	-7.98416E-1	-9.13081E0	-9.14156E0	5.34058E-3	9.30786E-2	2.73027E1	-3.26921E1	-3.26332E1	2.68022E1	1.69875E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98764E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.18634E-1	-7.98225E-1	-9.13055E0	-9.14183E0	5.29289E-3	9.29832E-2	2.73429E1	-3.26903E1	-3.26284E1	2.68016E1	1.69581E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9934E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18729E-1	-7.98583E-1	-9.1305E0	-9.14161E0	5.26905E-3	9.31025E-2	2.73906E1	-3.26354E1	-3.26478E1	2.67902E1	1.69731E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.00285E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.18777E-1	-7.98488E-1	-9.13055E0	-9.14161E0	5.57899E-3	9.31025E-2	2.73808E1	-3.26759E1	-3.26579E1	2.68136E1	1.69653E-7	2.53139E-3	2.53139E-3	6.31278E-3	2.00192E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.18634E-1	-7.98392E-1	-9.13076E0	-9.14176E0	5.65052E-3	9.3174E-2	2.74163E1	-3.2629E1	-3.26741E1	2.6783E1	1.69728E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00847E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.18706E-1	-7.98559E-1	-9.13076E0	-9.14176E0	5.55515E-3	9.33647E-2	2.72927E1	-3.26425E1	-3.26366E1	2.6796E1	1.69725E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.00021E-1