[Scan]
initial_time=2016-02-17T23:14:38
final_time=2016-02-17T23:14:58
ip_count=19
run=1032
dataset=11
scan=568
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.18729E-1
ql1_imon=1.40492E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=1.97991E-9
ql3_vset=
ql3_vmon=-9.13055E0
ql3_imon=1.42305E-9
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=3.76773E-10
mult1=-9.85401E-9
mult2=-2.83497E-9
rf_tmon=-4.29121E-3
rf_agc=3.44535E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=1.60159E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64485E0
bslens_imon=2.45819E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20309E1
lens5a_imon=2.00999E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05159E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53812E1
cs_ef1b_imon=3.06627E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04785E1
cs_ea1_imon=2.18137E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36561E0
lens1_imon=2.54857E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64435E1
os_ef1alow_imon=2.97036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03881E1
cs_ea2_imon=1.57964E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=3.00685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.72992E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11112E1
os_restr1_imon=4.26419E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14998E1
os_ea1_imon=2.19493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.07739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26021E0
cs_ionrep_imon=1.27721E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=3.27965E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.68997E-8
tplens_vset=1.4E-1
tplens_vmon=1.61015E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.48717E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.57894E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98492E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.07532E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28107E0
ionrepsh_imon=2.02425E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33878E1
lens5b_imon=2.19527E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74652E1
cs_ef2b_imon=3.12292E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.8587E0
os_ea2_imon=-7.22542E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00595E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70985E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.74487E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.58048E-1
os_ef2bup_imon=-5.37216E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=3.52674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.30936E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.27878E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7311E1
iondef1_imon=1.06064E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.08295E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.10237E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=9.8813E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1174E0
cs_ionaccel_imon=-2.0672E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55982E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=1.36017E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39056E-4
mask2_vset=0.0E0
mask2_vmon=-1.85886E1
mask2_imon=-8.33481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.6864E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.48015E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.72001E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.14296E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33306E1
os_fil1_imon=9.58319E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6443E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=1.00579E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62748E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66609E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.85952E-2
os_fil2_imon=-2.79082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73481E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36144E-1
cs_fil2_imon=-2.42592E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.85622E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22555E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.01219E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.79102E-1
res40_imon=-2.69622E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18515E-1	-7.98655E-1	-9.13084E0	-9.14178E0	5.48363E-3	9.31263E-2	2.73552E1	-3.2685E1	-3.26408E1	2.6807E1	1.6972E-7	2.51369E-3	2.51369E-3	6.31779E-3	1.99119E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.1861E-1	-7.98392E-1	-9.13086E0	-9.14183E0	5.6982E-3	9.33409E-2	2.7321E1	-3.2664E1	-3.26407E1	2.68045E1	1.69802E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98764E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.18658E-1	-7.98535E-1	-9.13088E0	-9.14176E0	5.38826E-3	9.32217E-2	2.73005E1	-3.26671E1	-3.26393E1	2.68018E1	1.69656E-7	2.52585E-3	2.52585E-3	6.33538E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.19063E-1	-7.98631E-1	-9.13086E0	-9.1418E0	5.48363E-3	9.35078E-2	2.73346E1	-3.26461E1	-3.26189E1	2.68146E1	1.69865E-7	2.52131E-3	2.52131E-3	6.33388E-3	2.0124E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.18872E-1	-7.98607E-1	-9.13086E0	-9.14183E0	5.55515E-3	9.31263E-2	2.72824E1	-3.26523E1	-3.26713E1	2.67945E1	1.69653E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.9985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.18706E-1	-7.98512E-1	-9.13117E0	-9.14149E0	5.65052E-3	9.32217E-2	2.73171E1	-3.26621E1	-3.26627E1	2.68141E1	1.69656E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.00108E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.18539E-1	-7.98702E-1	-9.131E0	-9.14159E0	5.17368E-3	9.34124E-2	2.73093E1	-3.26458E1	-3.26356E1	2.68141E1	1.6987E-7	2.52384E-3	2.52384E-3	6.29665E-3	2.00021E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.18539E-1	-7.98774E-1	-9.13088E0	-9.14161E0	5.24521E-3	9.3174E-2	2.73081E1	-3.26735E1	-3.26272E1	2.68051E1	1.69802E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.18753E-1	-7.98988E-1	-9.13084E0	-9.14209E0	5.48363E-3	9.32217E-2	2.72787E1	-3.26585E1	-3.26218E1	2.68142E1	1.69875E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.98592E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.18753E-1	-7.98941E-1	-9.13095E0	-9.14209E0	5.79357E-3	9.3317E-2	2.73285E1	-3.26777E1	-3.2629E1	2.67914E1	1.69656E-7	2.51693E-3	2.51693E-3	6.27954E-3	1.99577E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.18729E-1	-7.98702E-1	-9.13079E0	-9.14204E0	5.72205E-3	9.3317E-2	2.73015E1	-3.26849E1	-3.26314E1	2.67998E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98247E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.18872E-1	-7.98774E-1	-9.13093E0	-9.14197E0	5.65052E-3	9.31263E-2	2.73261E1	-3.26909E1	-3.27041E1	2.68154E1	1.69949E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00673E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.18825E-1	-7.98559E-1	-9.13084E0	-9.1418E0	5.36442E-3	9.32932E-2	2.73321E1	-3.26675E1	-3.2644E1	2.68046E1	1.69802E-7	2.52209E-3	2.52209E-3	6.29098E-3	2.00151E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.18896E-1	-7.98774E-1	-9.13064E0	-9.14195E0	5.126E-3	9.31025E-2	2.72883E1	-3.26717E1	-3.26272E1	2.67984E1	1.69802E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.01197E-1
1.8E1	8.2E1	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.18706E-1	-7.98559E-1	-9.13033E0	-9.14192E0	5.55515E-3	9.32217E-2	2.73177E1	-3.27095E1	-3.2614E1	2.67864E1	1.69725E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.01219E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.18682E-1	-7.98726E-1	-9.13036E0	-9.14202E0	5.60284E-3	9.30786E-2	2.73153E1	-3.26494E1	-3.26458E1	2.68196E1	1.69731E-7	2.52139E-3	2.52139E-3	6.34099E-3	2.01174E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.18634E-1	-7.98869E-1	-9.1305E0	-9.1419E0	5.50747E-3	9.33886E-2	2.73009E1	-3.26831E1	-3.26212E1	2.68106E1	1.69653E-7	2.52384E-3	2.52384E-3	6.29128E-3	2.00705E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.18634E-1	-7.98988E-1	-9.13038E0	-9.14173E0	5.81741E-3	9.33647E-2	2.73263E1	-3.26703E1	-3.26419E1	2.67891E1	1.69581E-7	2.52027E-3	2.52027E-3	6.29067E-3	2.00285E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.18753E-1	-7.98726E-1	-9.1306E0	-9.14204E0	5.79357E-3	9.36508E-2	2.72757E1	-3.26615E1	-3.26591E1	2.68184E1	1.69943E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00705E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.18729E-1	-7.98988E-1	-9.13055E0	-9.14195E0	5.67436E-3	9.36508E-2	2.7311E1	-3.26602E1	-3.26284E1	2.67962E1	1.69798E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.01219E-1