[Scan]
initial_time=2016-02-17T23:15:58
final_time=2016-02-17T23:16:18
ip_count=19
run=1032
dataset=11
scan=571
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.17943E-1
ql1_imon=1.38529E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.98646E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=1.14714E-9
ql4_vset=
ql4_vmon=-9.14235E0
ql4_imon=4.15933E-10
mult1=-9.55978E-9
mult2=-2.66072E-9
rf_tmon=-4.42831E-3
rf_agc=3.32675E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.10352E-3
ql5_imon=1.54419E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68155E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=2.00456E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.05766E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05236E1
cs_ea1_imon=2.17516E-5
lens1_vset=-5.0E0
lens1_vmon=-5.405E0
lens1_imon=2.55034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.54833E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.00288E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.73288E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11586E1
os_restr1_imon=4.27688E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=2.17233E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26036E0
cs_ionrep_imon=1.26695E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=3.2894E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.68731E-8
tplens_vset=1.4E-1
tplens_vmon=1.62787E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.50869E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.1376E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24797E0
ionrepsh_imon=1.99324E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86088E0
os_ea2_imon=-8.26259E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00842E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10922E0
os_ef2alow_imon=-2.78529E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.65299E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.52654E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.2922E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.28173E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.08892E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.06359E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.0948E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=9.86666E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.4696E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-1.19954E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.85719E1
mask2_imon=-8.7158E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.5586E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.8401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.70084E0
defgridb_imon=6.27026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.59143E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06825E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64365E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30835E1
cs_fil1_imon=1.00809E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66352E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93934E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80021E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-1.91514E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22517E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77622E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.2E1	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.18133E-1	-7.98678E-1	-9.1306E0	-9.14209E0	5.76973E-3	9.30786E-2	2.73285E1	-3.26621E1	-3.26458E1	2.67746E1	1.69943E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.00021E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.18181E-1	-7.98702E-1	-9.131E0	-9.14168E0	5.65052E-3	9.31025E-2	2.73167E1	-3.26774E1	-3.26272E1	2.67806E1	1.70015E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.00192E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.18062E-1	-7.98392E-1	-9.1306E0	-9.14204E0	5.72205E-3	9.3174E-2	2.73167E1	-3.26666E1	-3.26446E1	2.68458E1	1.69731E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.18038E-1	-7.98249E-1	-9.13088E0	-9.14228E0	5.84126E-3	9.29594E-2	2.72961E1	-3.26789E1	-3.26392E1	2.68178E1	1.69798E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.18229E-1	-7.9875E-1	-9.1306E0	-9.14195E0	5.31673E-3	9.30786E-2	2.73027E1	-3.26963E1	-3.26122E1	2.68124E1	1.69653E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.18467E-1	-7.98774E-1	-9.13093E0	-9.14214E0	5.55515E-3	9.3317E-2	2.73011E1	-3.2692E1	-3.26448E1	2.67981E1	1.69731E-7	2.52139E-3	2.52139E-3	6.3074E-3	1.99224E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.18157E-1	-7.98631E-1	-9.13103E0	-9.14223E0	5.62668E-3	9.31025E-2	2.72873E1	-3.27074E1	-3.26069E1	2.67686E1	1.69924E-7	2.51345E-3	2.51345E-3	6.3023E-3	1.99498E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.18348E-1	-7.98726E-1	-9.13093E0	-9.14221E0	5.91278E-3	9.30071E-2	2.73116E1	-3.26726E1	-3.26213E1	2.6816E1	1.69815E-7	2.51758E-3	2.51758E-3	6.34231E-3	1.98917E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.18086E-1	-7.98559E-1	-9.1311E0	-9.14195E0	5.74589E-3	9.3174E-2	2.73265E1	-3.26585E1	-3.26689E1	2.6789E1	1.69581E-7	2.52647E-3	2.52647E-3	6.30192E-3	1.98592E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.18181E-1	-7.9813E-1	-9.13115E0	-9.14216E0	5.67436E-3	9.33409E-2	2.73297E1	-3.26705E1	-3.2626E1	2.68202E1	1.69581E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99977E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.18062E-1	-7.98249E-1	-9.13081E0	-9.14204E0	5.53131E-3	9.35316E-2	2.73087E1	-3.26549E1	-3.26224E1	2.68082E1	1.69802E-7	2.5199E-3	2.5199E-3	6.28552E-3	2.00325E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.18229E-1	-7.98464E-1	-9.13124E0	-9.14218E0	5.48363E-3	9.34601E-2	2.73128E1	-3.26785E1	-3.26366E1	2.68004E1	1.69654E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99977E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.18157E-1	-7.98392E-1	-9.13088E0	-9.14195E0	5.53131E-3	9.36031E-2	2.73315E1	-3.26807E1	-3.26068E1	2.6801E1	1.69875E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99977E-1
1.7E1	2.4E1	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.1799E-1	-7.98273E-1	-9.13084E0	-9.14149E0	5.67436E-3	9.3317E-2	2.72823E1	-3.26669E1	-3.26476E1	2.67908E1	1.70023E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99977E-1
1.8E1	1.13E2	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.17847E-1	-7.98678E-1	-9.13072E0	-9.14197E0	6.17504E-3	9.33409E-2	2.73405E1	-3.26536E1	-3.2626E1	2.67968E1	1.69728E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.17847E-1	-7.98702E-1	-9.1311E0	-9.14195E0	5.96046E-3	9.30786E-2	2.73106E1	-3.26689E1	-3.26462E1	2.68262E1	1.69943E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9985E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.17871E-1	-7.98392E-1	-9.13105E0	-9.14221E0	5.88894E-3	9.34601E-2	2.73104E1	-3.26378E1	-3.26502E1	2.6801E1	1.69806E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.00108E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18014E-1	-7.98297E-1	-9.13115E0	-9.1423E0	5.72205E-3	9.33409E-2	2.72656E1	-3.26915E1	-3.26455E1	2.68146E1	1.69943E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9917E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.17823E-1	-7.98535E-1	-9.131E0	-9.14233E0	5.91278E-3	9.34839E-2	2.72883E1	-3.26753E1	-3.26266E1	2.67902E1	1.69581E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.9911E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.17943E-1	-7.98321E-1	-9.13122E0	-9.14235E0	6.10352E-3	9.32932E-2	2.72931E1	-3.2644E1	-3.26332E1	2.67968E1	1.6987E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9883E-1