[Scan]
initial_time=2016-02-17T23:16:25
final_time=2016-02-17T23:16:44
ip_count=19
run=1032
dataset=11
scan=572
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.17823E-1
ql1_imon=1.3899E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=1.86837E-9
ql3_vset=
ql3_vmon=-9.13079E0
ql3_imon=1.01242E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.71199E-10
mult1=-9.80059E-9
mult2=-2.77051E-9
rf_tmon=-5.57589E-3
rf_agc=3.25465E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=1.64611E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.46539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19783E1
lens5a_imon=1.97837E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05281E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=3.05009E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04728E1
cs_ea1_imon=2.19569E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40854E0
lens1_imon=2.47955E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04203E1
cs_ea2_imon=1.55789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.00721E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.73066E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.18083E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=1.2673E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.28039E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=3.69228E-8
tplens_vset=1.4E-1
tplens_vmon=1.61253E0
tplens_imon=6.56719E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27005E1
iondef2_imon=1.59576E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98565E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.088E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=2.0035E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.19428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82843E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.665E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.54528E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.27452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.08361E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.10558E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83024E-1
olens1_imon=9.86572E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0917E0
cs_ionaccel_imon=-2.03566E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.71692E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86026E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.27191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.87903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.01353E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.13094E0
defgridb_imon=5.93047E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33308E1
os_fil1_imon=9.58127E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64476E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=1.00662E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62972E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66377E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.71141E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90145E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22519E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.9911E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.55998E-1
res40_imon=-2.66635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.18276E-1	-7.98512E-1	-9.13103E0	-9.14195E0	5.6982E-3	9.33409E-2	2.72951E1	-3.26703E1	-3.26343E1	2.68076E1	1.69798E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.18419E-1	-7.98631E-1	-9.13095E0	-9.14192E0	6.00815E-3	9.31025E-2	2.73085E1	-3.26306E1	-3.26567E1	2.67949E1	1.69943E-7	2.52815E-3	2.52815E-3	6.32356E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.18157E-1	-7.98869E-1	-9.13129E0	-9.14214E0	5.6982E-3	9.3627E-2	2.73216E1	-3.26646E1	-3.26364E1	2.67776E1	1.6979E-7	2.52093E-3	2.52093E-3	6.30221E-3	1.98955E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.18157E-1	-7.98869E-1	-9.1311E0	-9.14183E0	5.34058E-3	9.3317E-2	2.72898E1	-3.26797E1	-3.26496E1	2.67998E1	1.69802E-7	2.52428E-3	2.52428E-3	6.34037E-3	1.98764E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-2.0934E0	-8.18419E-1	-7.98512E-1	-9.13136E0	-9.14214E0	5.43594E-3	9.34839E-2	2.72871E1	-3.2653E1	-3.2626E1	2.6804E1	1.69581E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.18348E-1	-7.98559E-1	-9.13131E0	-9.14173E0	5.57899E-3	9.33647E-2	2.73075E1	-3.26771E1	-3.26368E1	2.68135E1	1.69653E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.00705E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.183E-1	-7.9875E-1	-9.13098E0	-9.14161E0	5.74589E-3	9.3174E-2	2.73228E1	-3.2639E1	-3.2636E1	2.68035E1	1.69581E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.18324E-1	-7.98368E-1	-9.13081E0	-9.14185E0	5.88894E-3	9.34124E-2	2.72839E1	-3.2688E1	-3.26455E1	2.67854E1	1.6987E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.00705E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.18181E-1	-7.98726E-1	-9.13105E0	-9.14195E0	5.84126E-3	9.32455E-2	2.72666E1	-3.26314E1	-3.26506E1	2.68128E1	1.69653E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.98322E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.18133E-1	-7.98774E-1	-9.13107E0	-9.14204E0	5.84126E-3	9.36031E-2	2.73285E1	-3.26573E1	-3.26266E1	2.68286E1	1.69728E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17966E-1	-7.9906E-1	-9.13091E0	-9.14202E0	5.96046E-3	9.35316E-2	2.72997E1	-3.26909E1	-3.2641E1	2.67998E1	1.69581E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.97388E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.178E-1	-7.98845E-1	-9.13057E0	-9.14199E0	5.57899E-3	9.35316E-2	2.73234E1	-3.26644E1	-3.25894E1	2.67998E1	1.69581E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.17823E-1	-7.98917E-1	-9.13107E0	-9.14237E0	5.79357E-3	9.35793E-2	2.7349E1	-3.26741E1	-3.26308E1	2.68124E1	1.69875E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99977E-1
1.7E1	1.5E1	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.17895E-1	-7.99036E-1	-9.13069E0	-9.14204E0	5.65052E-3	9.37223E-2	2.72997E1	-3.26651E1	-3.26518E1	2.67854E1	1.69653E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00192E-1
1.8E1	9.8E1	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.17823E-1	-7.98559E-1	-9.13067E0	-9.14185E0	5.88894E-3	9.34124E-2	2.73033E1	-3.26524E1	-3.25972E1	2.67902E1	1.69728E-7	2.51935E-3	2.51935E-3	6.32112E-3	1.99716E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.17895E-1	-7.98297E-1	-9.13103E0	-9.14195E0	5.67436E-3	9.34839E-2	2.7301E1	-3.26514E1	-3.26284E1	2.67896E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.18086E-1	-7.98583E-1	-9.13081E0	-9.14211E0	5.55515E-3	9.32217E-2	2.73213E1	-3.26609E1	-3.26392E1	2.6795E1	1.69654E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98075E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.18157E-1	-7.98726E-1	-9.13095E0	-9.14209E0	5.60284E-3	9.3317E-2	2.73511E1	-3.27092E1	-3.26413E1	2.68128E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98075E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.18062E-1	-7.98321E-1	-9.13079E0	-9.14226E0	5.76973E-3	9.3174E-2	2.72654E1	-3.265E1	-3.26134E1	2.67758E1	1.69581E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17823E-1	-7.98631E-1	-9.13079E0	-9.14199E0	5.72205E-3	9.32455E-2	2.73051E1	-3.27005E1	-3.262E1	2.67974E1	1.69581E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.9911E-1