[Scan]
initial_time=2016-02-17T23:19:05
final_time=2016-02-17T23:19:24
ip_count=19
run=1032
dataset=11
scan=578
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.17347E-1
ql1_imon=1.37614E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.97067E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=7.26521E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=4.27055E-10
mult1=-9.77126E-9
mult2=-2.81733E-9
rf_tmon=-5.17016E-3
rf_agc=3.30437E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.05583E-3
ql5_imon=1.59349E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.9737E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.06847E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.01962E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.17594E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4038E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.58004E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.00541E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.72289E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.28193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15924E1
os_ea1_imon=2.17738E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=1.26569E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=3.26813E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.68587E-8
tplens_vset=1.4E-1
tplens_vmon=1.57474E0
tplens_imon=-5.01223E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98418E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.11049E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24729E0
ionrepsh_imon=1.99389E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3412E1
lens5b_imon=2.21054E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84451E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.64097E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.53519E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73098E1
iondef1_imon=1.12473E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67674E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.09634E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=9.8476E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10732E0
cs_ionaccel_imon=-2.05728E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-1.24639E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.8596E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.15209E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=6.78439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.10162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62412E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.59521E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64071E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3087E1
cs_fil1_imon=1.00667E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62318E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65871E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.69968E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96213E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22391E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.69725E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.89635E-1
res40_imon=-2.68798E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.3E1	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.17394E-1	-7.99108E-1	-9.13079E0	-9.14183E0	5.65052E-3	9.33647E-2	2.72974E1	-3.26632E1	-3.26136E1	2.68022E1	1.69654E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.98937E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17347E-1	-7.99179E-1	-9.13098E0	-9.14176E0	5.8651E-3	9.31263E-2	2.73326E1	-3.26836E1	-3.26358E1	2.68034E1	1.6987E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.17394E-1	-7.99131E-1	-9.13084E0	-9.14185E0	6.07967E-3	9.32217E-2	2.72981E1	-3.26666E1	-3.26231E1	2.68128E1	1.69581E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.1749E-1	-7.99251E-1	-9.13107E0	-9.14176E0	5.91278E-3	9.34839E-2	2.73027E1	-3.26813E1	-3.26164E1	2.67758E1	1.6987E-7	2.52599E-3	2.52599E-3	6.31278E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.17585E-1	-7.99131E-1	-9.13112E0	-9.14183E0	6.05583E-3	9.34124E-2	2.73364E1	-3.26461E1	-3.26449E1	2.68388E1	1.69581E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17728E-1	-7.9937E-1	-9.13103E0	-9.14168E0	5.74589E-3	9.31978E-2	2.73219E1	-3.26759E1	-3.26308E1	2.6807E1	1.69802E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.17609E-1	-7.99227E-1	-9.131E0	-9.14204E0	5.76973E-3	9.33647E-2	2.73063E1	-3.26526E1	-3.26278E1	2.6804E1	1.70088E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.17513E-1	-7.98726E-1	-9.13072E0	-9.14221E0	5.4121E-3	9.33647E-2	2.73317E1	-3.26932E1	-3.26162E1	2.68105E1	1.69875E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99283E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.17394E-1	-7.9906E-1	-9.13057E0	-9.14197E0	5.36442E-3	9.32932E-2	2.73163E1	-3.26647E1	-3.26067E1	2.68188E1	1.69794E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.98727E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.17537E-1	-7.99084E-1	-9.13093E0	-9.14159E0	5.65052E-3	9.3317E-2	2.73255E1	-3.26693E1	-3.26939E1	2.6813E1	1.69581E-7	2.51838E-3	2.51838E-3	6.33021E-3	1.99163E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.1737E-1	-7.98678E-1	-9.13079E0	-9.14202E0	5.96046E-3	9.30309E-2	2.73387E1	-3.26815E1	-3.25877E1	2.67914E1	1.69653E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.97984E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-8.17323E-1	-7.98988E-1	-9.13088E0	-9.1418E0	5.96046E-3	9.30786E-2	2.73213E1	-3.26801E1	-3.26122E1	2.68036E1	1.69949E-7	2.52428E-3	2.52428E-3	6.30192E-3	1.99283E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.17466E-1	-7.98965E-1	-9.13076E0	-9.14211E0	5.19753E-3	9.2864E-2	2.73364E1	-3.27086E1	-3.26413E1	2.68346E1	1.69802E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99803E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.17466E-1	-7.99012E-1	-9.13069E0	-9.14192E0	5.38826E-3	9.29832E-2	2.73255E1	-3.26464E1	-3.26549E1	2.68136E1	1.69653E-7	2.53031E-3	2.53031E-3	6.31817E-3	1.9985E-1
1.8E1	8.9E1	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.17704E-1	-7.98655E-1	-9.13091E0	-9.14192E0	5.79357E-3	9.34124E-2	2.73135E1	-3.26795E1	-3.26116E1	2.6816E1	1.69654E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00673E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.17561E-1	-7.98655E-1	-9.13129E0	-9.14185E0	5.98431E-3	9.35078E-2	2.73141E1	-3.26849E1	-3.26044E1	2.68148E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.01722E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.17585E-1	-7.98917E-1	-9.13088E0	-9.14173E0	5.50747E-3	9.34362E-2	2.72845E1	-3.26826E1	-3.26278E1	2.67812E1	1.69654E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17633E-1	-7.98631E-1	-9.131E0	-9.1419E0	5.93662E-3	9.30786E-2	2.73333E1	-3.26512E1	-3.26338E1	2.68319E1	1.69798E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.00192E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.17633E-1	-7.98583E-1	-9.13079E0	-9.1423E0	5.93662E-3	9.35316E-2	2.73252E1	-3.2672E1	-3.26284E1	2.67992E1	1.69802E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.99977E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.17347E-1	-7.9875E-1	-9.13107E0	-9.14195E0	6.05583E-3	9.31978E-2	2.73098E1	-3.26927E1	-3.26478E1	2.67674E1	1.69725E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9883E-1