[Scan]
initial_time=2016-02-17T23:19:58
final_time=2016-02-17T23:20:17
ip_count=19
run=1032
dataset=11
scan=580
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.17251E-1
ql1_imon=1.37229E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.90322E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=5.77652E-10
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=3.96264E-10
mult1=-8.69286E-9
mult2=-2.8264E-9
rf_tmon=-5.21539E-3
rf_agc=3.21139E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=1.60182E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68568E0
bslens_imon=2.36983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.99607E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.04541E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02362E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.051E1
cs_ea1_imon=2.18614E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33481E0
lens1_imon=2.8972E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04239E1
cs_ea2_imon=1.56497E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=3.01369E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.72777E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.27869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.19392E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28572E0
cs_ionrep_imon=1.262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91832E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=3.27678E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.69643E-8
tplens_vset=1.4E-1
tplens_vmon=1.63494E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.47153E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.06812E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31581E0
ionrepsh_imon=2.01766E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33369E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.88388E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0924E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.70705E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.54348E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23102E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.27885E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.08467E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09972E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=9.847E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10551E0
cs_ionaccel_imon=-1.94917E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.47666E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86098E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.48262E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.24713E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45576E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33337E1
os_fil1_imon=9.59281E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0608E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64239E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=1.00717E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61759E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65707E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78738E-2
os_fil2_imon=-2.76808E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91411E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.19978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22417E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.01722E-1
chamber_ion_pmon=1.70171E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06744E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.1737E-1	-7.98345E-1	-9.13088E0	-9.14202E0	5.29289E-3	9.33409E-2	2.73458E1	-3.26779E1	-3.26225E1	2.67962E1	1.69802E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99456E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.17418E-1	-7.98368E-1	-9.13093E0	-9.14209E0	5.57899E-3	9.32932E-2	2.73016E1	-3.26863E1	-3.25889E1	2.68166E1	1.69653E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.17513E-1	-7.98059E-1	-9.13119E0	-9.14204E0	5.4121E-3	9.30548E-2	2.7302E1	-3.2679E1	-3.26142E1	2.67835E1	1.6986E-7	2.51679E-3	2.51679E-3	6.3126E-3	1.99447E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.17585E-1	-7.98106E-1	-9.13098E0	-9.14192E0	5.48363E-3	9.31501E-2	2.73497E1	-3.26695E1	-3.26243E1	2.68012E1	1.69581E-7	2.52454E-3	2.52454E-3	6.29002E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17251E-1	-7.98488E-1	-9.13095E0	-9.14161E0	5.31673E-3	9.3317E-2	2.73307E1	-3.27003E1	-3.26142E1	2.68016E1	1.69865E-7	2.51709E-3	2.51709E-3	6.31269E-3	1.99562E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.17013E-1	-7.98345E-1	-9.13117E0	-9.14183E0	5.76973E-3	9.3317E-2	2.73369E1	-3.26753E1	-3.26206E1	2.67963E1	1.69656E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.00108E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.1687E-1	-7.98488E-1	-9.13107E0	-9.14195E0	5.93662E-3	9.3174E-2	2.73039E1	-3.26777E1	-3.26218E1	2.68244E1	1.69731E-7	2.5225E-3	2.5225E-3	6.3074E-3	2.00463E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.1706E-1	-7.98583E-1	-9.13124E0	-9.14192E0	5.84126E-3	9.31263E-2	2.72862E1	-3.26644E1	-3.26124E1	2.67926E1	1.69798E-7	2.51203E-3	2.51203E-3	6.33977E-3	2.00534E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17013E-1	-7.98225E-1	-9.13112E0	-9.14207E0	5.6982E-3	9.32693E-2	2.73112E1	-3.26658E1	-3.26199E1	2.67914E1	1.69949E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.17347E-1	-7.98512E-1	-9.13131E0	-9.14209E0	5.88894E-3	9.34839E-2	2.7308E1	-3.26826E1	-3.26119E1	2.68358E1	1.69802E-7	2.5199E-3	2.5199E-3	6.26916E-3	1.98419E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.17394E-1	-7.98583E-1	-9.13136E0	-9.1419E0	5.88894E-3	9.32217E-2	2.73111E1	-3.26753E1	-3.26687E1	2.6798E1	1.69765E-7	2.51662E-3	2.51662E-3	6.31014E-3	1.99024E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.1718E-1	-7.98512E-1	-9.13146E0	-9.14199E0	5.79357E-3	9.31263E-2	2.73267E1	-3.26723E1	-3.26488E1	2.68022E1	1.69802E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00499E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17466E-1	-7.98297E-1	-9.13148E0	-9.14176E0	5.45979E-3	9.3317E-2	2.73171E1	-3.26585E1	-3.26134E1	2.6798E1					
1.7E1	2.1E1	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17347E-1	-7.98154E-1	-9.13098E0	-9.1419E0	5.34058E-3	9.34839E-2	2.73099E1	-3.26771E1	-3.26386E1	2.68208E1	1.69581E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.00673E-1
1.8E1	7.6E1	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.17394E-1	-7.98202E-1	-9.13129E0	-9.14197E0	5.74589E-3	9.32455E-2	2.73139E1	-3.26944E1	-3.26142E1	2.67878E1	1.6987E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.98661E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17394E-1	-7.9844E-1	-9.13122E0	-9.14226E0	5.53131E-3	9.32932E-2	2.73145E1	-3.26478E1	-3.26107E1	2.6796E1	1.69728E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.1768E-1	-7.98583E-1	-9.13081E0	-9.14226E0	5.4121E-3	9.32217E-2	2.73129E1	-3.26825E1	-3.2623E1	2.68262E1	1.6987E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.9951E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17513E-1	-7.98631E-1	-9.13117E0	-9.14233E0	5.14984E-3	9.35078E-2	2.73004E1	-3.26579E1	-3.26024E1	2.68088E1	1.6987E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00705E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.17108E-1	-7.98225E-1	-9.13122E0	-9.14245E0	5.76973E-3	9.30309E-2	2.72414E1	-3.27089E1	-3.25942E1	2.67956E1	1.69875E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00325E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.17251E-1	-7.98297E-1	-9.13115E0	-9.14264E0	5.79357E-3	9.33409E-2	2.73069E1	-3.26404E1	-3.26476E1	2.67866E1	1.70171E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.01722E-1