[Scan]
initial_time=2016-02-17T23:20:24
final_time=2016-02-17T23:20:44
ip_count=19
run=1032
dataset=11
scan=581
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.38177E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.93881E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=6.97625E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.41837E-10
mult1=-9.96916E-9
mult2=-2.73658E-9
rf_tmon=-5.16132E-3
rf_agc=3.32675E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=1.58668E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67094E0
bslens_imon=2.65311E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20121E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53358E1
cs_ef1b_imon=3.05766E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.01912E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04706E1
cs_ea1_imon=2.1781E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43505E0
lens1_imon=2.59183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64969E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04075E1
cs_ea2_imon=1.57607E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84004E1
cs_ef1a_imon=3.01802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.7259E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.26247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=2.14638E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27853E0
cs_ionrep_imon=1.27001E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=3.26129E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.68757E-8
tplens_vset=1.4E-1
tplens_vmon=1.58075E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26969E1
iondef2_imon=1.60599E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.0903E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=2.02921E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86614E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.1665E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10682E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.58691E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10595E1
os_restr2_imon=3.53194E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.28101E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.09572E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=9.83368E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-2.18703E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.85978E1
mask2_imon=-8.31936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.25664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=7.05115E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.58986E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07101E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64145E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=1.0067E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61735E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65899E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75127E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86417E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.96029E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22483E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.0285E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.1E1	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.17657E-1	-7.98416E-1	-9.13103E0	-9.14214E0	5.60284E-3	9.33886E-2	2.73464E1	-3.26649E1	-3.26266E1	2.67972E1	1.69875E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.17537E-1	-7.98368E-1	-9.1311E0	-9.14204E0	5.74589E-3	9.3317E-2	2.72997E1	-3.26657E1	-3.26404E1	2.67986E1	1.69581E-7	2.51498E-3	2.51498E-3	6.32858E-3	1.99562E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.17418E-1	-7.98535E-1	-9.13103E0	-9.14211E0	5.57899E-3	9.33647E-2	2.7284E1	-3.26676E1	-3.26351E1	2.67885E1	1.69654E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17156E-1	-7.98607E-1	-9.13098E0	-9.14207E0	5.4121E-3	9.35793E-2	2.72985E1	-3.27023E1	-3.26332E1	2.68202E1	1.69581E-7	2.52342E-3	2.52342E-3	6.3074E-3	1.99394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.17418E-1	-7.98464E-1	-9.13138E0	-9.1423E0	5.60284E-3	9.34124E-2	2.73093E1	-3.26657E1	-3.26645E1	2.67776E1	1.6987E-7	2.52923E-3	2.52923E-3	6.31278E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-8.17275E-1	-7.98416E-1	-9.13126E0	-9.14211E0	5.72205E-3	9.33409E-2	2.73259E1	-3.26542E1	-3.26578E1	2.68064E1	1.69806E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.00818E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.17156E-1	-7.98273E-1	-9.13126E0	-9.14218E0	5.98431E-3	9.32455E-2	2.72892E1	-3.2659E1	-3.2662E1	2.68112E1	1.69802E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00673E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.1749E-1	-7.98583E-1	-9.13138E0	-9.14195E0	5.45979E-3	9.33647E-2	2.72976E1	-3.26392E1	-3.26317E1	2.68058E1	1.69728E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.17227E-1	-7.98774E-1	-9.1311E0	-9.14204E0	5.43594E-3	9.34839E-2	2.73312E1	-3.26283E1	-3.26266E1	2.67821E1	1.69638E-7	2.51819E-3	2.51819E-3	6.32028E-3	2.00643E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17442E-1	-7.9875E-1	-9.13112E0	-9.14209E0	5.48363E-3	9.32693E-2	2.73418E1	-3.26653E1	-3.26303E1	2.68475E1	1.69652E-7	2.52025E-3	2.52025E-3	6.33388E-3	1.99562E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.17227E-1	-7.98726E-1	-9.13084E0	-9.14204E0	5.48363E-3	9.34362E-2	2.73139E1	-3.26579E1	-3.26266E1	2.67607E1	1.69895E-7	2.51575E-3	2.51575E-3	6.34646E-3	2.00187E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.17204E-1	-7.98416E-1	-9.13103E0	-9.14221E0	5.24521E-3	9.32217E-2	2.73045E1	-3.26585E1	-3.26374E1	2.67644E1	1.6987E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.00192E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17251E-1	-7.9844E-1	-9.13098E0	-9.14228E0	5.29289E-3	9.31978E-2	2.73087E1	-3.26458E1	-3.26392E1	2.67649E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9917E-1
1.7E1	1.4E1	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17299E-1	-7.98321E-1	-9.13105E0	-9.14204E0	5.60284E-3	9.36031E-2	2.73045E1	-3.26849E1	-3.26284E1	2.681E1	1.69656E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.00463E-1
1.8E1	9.3E1	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17204E-1	-7.98464E-1	-9.13079E0	-9.14195E0	5.50747E-3	9.32455E-2	2.73003E1	-3.26543E1	-3.26128E1	2.6813E1	1.69653E-7	2.51632E-3	2.51632E-3	6.28056E-3	2.00705E-1
1.9E1	3.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.17251E-1	-7.98178E-1	-9.1311E0	-9.14209E0	5.31673E-3	9.33409E-2	2.73069E1	-3.26555E1	-3.26531E1	2.67818E1	1.69956E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.00463E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.17323E-1	-7.98202E-1	-9.1311E0	-9.14214E0	5.45979E-3	9.3627E-2	2.73192E1	-3.27044E1	-3.26144E1	2.68076E1	1.69581E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.00534E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17418E-1	-7.98559E-1	-9.13119E0	-9.14209E0	5.53131E-3	9.30071E-2	2.72833E1	-3.26242E1	-3.26201E1	2.67897E1	1.69875E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00847E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.1718E-1	-7.98607E-1	-9.1311E0	-9.14168E0	5.50747E-3	9.31978E-2	2.73181E1	-3.26938E1	-3.26349E1	2.6807E1	1.69653E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.00192E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16989E-1	-7.98464E-1	-9.13115E0	-9.14202E0	5.74589E-3	9.33886E-2	2.73141E1	-3.26969E1	-3.26386E1	2.6801E1	1.69875E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98937E-1