[Scan]
initial_time=2016-02-17T23:20:51
final_time=2016-02-17T23:21:11
ip_count=19
run=1032
dataset=11
scan=582
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.36599E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=1.94931E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=5.52881E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=4.11499E-10
mult1=-9.11428E-9
mult2=-2.7266E-9
rf_tmon=-5.99646E-3
rf_agc=3.15551E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=1.56171E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69571E0
bslens_imon=2.67068E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.99147E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53725E1
cs_ef1b_imon=3.06037E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.18649E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37079E0
lens1_imon=2.57865E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64533E1
os_ef1alow_imon=2.96514E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03596E1
cs_ea2_imon=1.56957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.01971E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.72598E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.26072E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15559E1
os_ea1_imon=2.17693E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63508E1
os_ef1bup_imon=3.10589E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=1.26766E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01931E1
cs_anode1_imon=3.25394E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.70106E-8
tplens_vset=1.4E-1
tplens_vmon=1.61017E0
tplens_imon=-1.18377E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.47613E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.60072E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03019E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.08342E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30932E0
ionrepsh_imon=2.02155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.19675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84082E0
os_ea2_imon=-6.24513E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71101E1
cs_ef2a_imon=3.16879E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10032E0
os_ef2alow_imon=-2.58501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.89325E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10266E1
os_restr2_imon=3.53787E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.32193E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.28782E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.10024E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67716E1
iondef4_imon=1.10901E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09342E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=9.82018E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13825E0
cs_ionaccel_imon=-2.15755E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56457E1
einzel_imon=7.47932E-6
window_vset=0.0E0
window_vmon=2.11315E-1
window_imon=-9.06461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.38973E-4
mask2_vset=0.0E0
mask2_vmon=-1.85643E1
mask2_imon=-5.76312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.39767E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.26129E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33306E1
os_fil1_imon=9.58088E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07711E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64077E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=1.00736E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62024E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6569E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.62285E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8776E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9584E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-2.39117E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.41166E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22439E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.69798E-7
chamber_cvt_pmon=2.52599E-3
foreline_cvt_pmon=2.52599E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42612E-1
res40_imon=-2.73792E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	9.0E0	0.0E0	1.47E2	4.1E1	-2.09673E0	-8.17251E-1	-7.98512E-1	-9.13098E0	-9.14207E0	5.84126E-3	9.30786E-2	2.729E1	-3.26509E1	-3.26341E1	2.67723E1	1.69653E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00021E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.17156E-1	-7.98345E-1	-9.13117E0	-9.14204E0	5.88894E-3	9.31025E-2	2.73069E1	-3.26713E1	-3.26321E1	2.67911E1	1.6986E-7	2.52301E-3	2.52301E-3	6.3074E-3	1.98792E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09673E0	-8.17275E-1	-7.98273E-1	-9.13129E0	-9.14211E0	5.96046E-3	9.3174E-2	2.73134E1	-3.26779E1	-3.2603E1	2.68224E1	1.69731E-7	2.52362E-3	2.52362E-3	6.27954E-3	2.00108E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.17204E-1	-7.98464E-1	-9.13134E0	-9.1418E0	5.74589E-3	9.3174E-2	2.73464E1	-3.26608E1	-3.26602E1	2.67794E1	1.69725E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.00705E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.17084E-1	-7.98249E-1	-9.13117E0	-9.1419E0	5.84126E-3	9.29832E-2	2.73117E1	-3.26939E1	-3.2611E1	2.67972E1	1.69725E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00021E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17108E-1	-7.98488E-1	-9.13095E0	-9.14168E0	5.65052E-3	9.30071E-2	2.73177E1	-3.26482E1	-3.26669E1	2.6797E1	1.69654E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.17227E-1	-7.98559E-1	-9.13081E0	-9.14214E0	5.84126E-3	9.29117E-2	2.72835E1	-3.26603E1	-3.26386E1	2.67998E1	1.69654E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00847E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.1749E-1	-7.98583E-1	-9.13107E0	-9.14199E0	5.34058E-3	9.32932E-2	2.72949E1	-3.26573E1	-3.26068E1	2.68012E1	1.69731E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.00463E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.17156E-1	-7.98178E-1	-9.13115E0	-9.14192E0	5.43594E-3	9.33886E-2	2.73069E1	-3.26224E1	-3.26987E1	2.68213E1	1.69798E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00363E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.1706E-1	-7.98225E-1	-9.13107E0	-9.14166E0	5.05447E-3	9.31025E-2	2.73375E1	-3.26999E1	-3.26278E1	2.68146E1	1.69728E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00673E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16989E-1	-7.98059E-1	-9.13124E0	-9.14197E0	5.34058E-3	9.32455E-2	2.73311E1	-3.2682E1	-3.26349E1	2.67974E1	1.69875E-7	2.52867E-3	2.52867E-3	6.31288E-3	2.00847E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.17108E-1	-7.98345E-1	-9.13119E0	-9.14197E0	5.55515E-3	9.32693E-2	2.72781E1	-3.26597E1	-3.26308E1	2.68058E1	1.69725E-7	2.53139E-3	2.53139E-3	6.31817E-3	1.99E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.17013E-1	-7.98273E-1	-9.13153E0	-9.14168E0	5.55515E-3	9.30548E-2	2.72492E1	-3.26879E1	-3.26554E1	2.68022E1	1.69806E-7	2.52362E-3	2.52362E-3	6.32978E-3	1.99931E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16917E-1	-7.98345E-1	-9.13107E0	-9.14199E0	5.74589E-3	9.30548E-2	2.73151E1	-3.27051E1	-3.2649E1	2.6804E1	1.6987E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.9934E-1
1.8E1	9.9E1	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16941E-1	-7.98416E-1	-9.13117E0	-9.14207E0	5.6982E-3	9.32932E-2	2.73363E1	-3.26903E1	-3.26398E1	2.67866E1	1.69728E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.01197E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16846E-1	-7.98345E-1	-9.13143E0	-9.14207E0	5.72205E-3	9.32932E-2	2.73315E1	-3.26735E1	-3.26236E1	2.68238E1	1.69728E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98592E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.17013E-1	-7.98082E-1	-9.13088E0	-9.14221E0	5.62668E-3	9.32455E-2	2.72889E1	-3.2626E1	-3.26404E1	2.68136E1	1.69728E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.1687E-1	-7.98225E-1	-9.13107E0	-9.14204E0	5.93662E-3	9.31263E-2	2.73139E1	-3.2662E1	-3.26266E1	2.67792E1	1.69728E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16941E-1	-7.98464E-1	-9.13076E0	-9.14214E0	5.45979E-3	9.34124E-2	2.72744E1	-3.26625E1	-3.26631E1	2.68134E1	1.69723E-7	2.51603E-3	2.51603E-3	6.33388E-3	1.99729E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16894E-1	-7.98535E-1	-9.13126E0	-9.14216E0	5.8651E-3	9.32217E-2	2.73123E1	-3.26795E1	-3.26296E1	2.67716E1	1.69798E-7	2.52599E-3	2.52599E-3	6.29128E-3	1.9917E-1