[Scan]
initial_time=2016-02-17T23:21:44
final_time=2016-02-17T23:22:04
ip_count=19
run=1032
dataset=11
scan=584
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08846E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=1.37325E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=1.95007E-9
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=5.27632E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=4.13144E-10
mult1=-9.31021E-9
mult2=-2.78597E-9
rf_tmon=-4.25582E-3
rf_agc=3.36336E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.62344E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6261E0
bslens_imon=2.46893E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53603E1
cs_ef1b_imon=3.04438E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04681E1
cs_ea1_imon=2.19215E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38377E0
lens1_imon=2.55034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.99503E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.57417E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.98078E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.72534E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=4.28226E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.18507E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63462E1
os_ef1bup_imon=3.05898E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25328E0
cs_ionrep_imon=1.26447E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93349E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=3.27965E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.69296E-8
tplens_vset=1.4E-1
tplens_vmon=1.64556E0
tplens_imon=-1.71468E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03018E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.06418E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23499E0
ionrepsh_imon=2.00456E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33734E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7453E1
cs_ef2b_imon=3.10624E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.84259E0
os_ea2_imon=-4.79397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71397E1
cs_ef2a_imon=3.19208E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09221E0
os_ef2alow_imon=-2.66146E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44726E-1
os_ef2bup_imon=-5.39301E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=3.53404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02087E1
cs_anode2_imon=2.28156E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.11688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.07704E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.10192E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=9.82867E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-2.00464E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47139E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56226E1
einzel_imon=7.60791E-6
window_vset=0.0E0
window_vmon=1.52235E-1
window_imon=-1.04547E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39206E-4
mask2_vset=0.0E0
mask2_vmon=-1.86251E1
mask2_imon=-7.98728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9269E3
multa_neg_imon=7.64355E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.22424E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.24713E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33764E0
defgridb_imon=5.99418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.58945E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07011E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63835E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30841E1
cs_fil1_imon=1.00628E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61294E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65644E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.87603E-2
os_fil2_imon=-2.78503E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91236E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.04699E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.76765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.10325E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22408E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.02073E-1
chamber_ion_pmon=1.69875E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20602E-1
res40_imon=-2.797E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.17323E-1	-7.98297E-1	-9.13091E0	-9.14195E0	5.6982E-3	9.30786E-2	2.73039E1	-3.26773E1	-3.25989E1	2.6804E1	1.69936E-7	2.51603E-3	2.51603E-3	6.32328E-3	1.99227E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.17299E-1	-7.98583E-1	-9.13103E0	-9.14185E0	5.96046E-3	9.33886E-2	2.7364E1	-3.26543E1	-3.26218E1	2.68172E1	1.69725E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.98661E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.17251E-1	-7.98869E-1	-9.13088E0	-9.14207E0	6.12736E-3	9.32217E-2	2.7321E1	-3.26472E1	-3.26472E1	2.67937E1	1.69806E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16965E-1	-7.98368E-1	-9.13095E0	-9.14204E0	6.05583E-3	9.35078E-2	2.73345E1	-3.2641E1	-3.26512E1	2.68238E1	1.69865E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.1706E-1	-7.98512E-1	-9.13091E0	-9.14199E0	5.76973E-3	9.3317E-2	2.72877E1	-3.26591E1	-3.2635E1	2.68354E1	1.69731E-7	2.52473E-3	2.52473E-3	6.32978E-3	2.01174E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16965E-1	-7.98488E-1	-9.13088E0	-9.14218E0	5.74589E-3	9.30786E-2	2.73287E1	-3.26732E1	-3.26077E1	2.68058E1	1.69725E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.00363E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.17084E-1	-7.98583E-1	-9.13126E0	-9.14202E0	5.91278E-3	9.30548E-2	2.73009E1	-3.26879E1	-3.26134E1	2.67968E1	1.69728E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.1687E-1	-7.98225E-1	-9.13093E0	-9.14209E0	5.96046E-3	9.31025E-2	2.73429E1	-3.26843E1	-3.26122E1	2.68016E1	1.69728E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.17204E-1	-7.98512E-1	-9.13079E0	-9.14171E0	5.53131E-3	9.35316E-2	2.73219E1	-3.26585E1	-3.26188E1	2.67902E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.17108E-1	-7.98821E-1	-9.13095E0	-9.14204E0	5.88894E-3	9.34839E-2	2.72847E1	-3.26909E1	-3.25858E1	2.68022E1	1.69943E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00534E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.17037E-1	-7.98726E-1	-9.13091E0	-9.14187E0	5.72205E-3	9.3317E-2	2.73237E1	-3.26867E1	-3.26332E1	2.68022E1	1.69656E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.00285E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17156E-1	-7.98535E-1	-9.13119E0	-9.14178E0	5.8651E-3	9.3174E-2	2.72862E1	-3.26826E1	-3.26006E1	2.68022E1	1.6987E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00534E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.17037E-1	-7.98559E-1	-9.13115E0	-9.14178E0	5.8651E-3	9.3317E-2	2.72922E1	-3.27123E1	-3.25697E1	2.67583E1	1.69654E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.00151E-1
1.7E1	1.9E1	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16965E-1	-7.98392E-1	-9.13105E0	-9.14211E0	5.88894E-3	9.34124E-2	2.73157E1	-3.26762E1	-3.26467E1	2.68277E1	1.69802E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99456E-1
1.8E1	9.6E1	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.1706E-1	-7.98488E-1	-9.13084E0	-9.14168E0	5.45979E-3	9.32932E-2	2.73784E1	-3.26152E1	-3.26561E1	2.68005E1	1.69581E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.98491E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.17013E-1	-7.98368E-1	-9.13136E0	-9.14195E0	5.65052E-3	9.3317E-2	2.73129E1	-3.2647E1	-3.2644E1	2.67746E1	1.69875E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.17108E-1	-7.98631E-1	-9.13122E0	-9.14207E0	5.57899E-3	9.33647E-2	2.73165E1	-3.26386E1	-3.26536E1	2.67998E1	1.69581E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.17037E-1	-7.98488E-1	-9.13117E0	-9.1419E0	5.45979E-3	9.33886E-2	2.73075E1	-3.26638E1	-3.26266E1	2.68028E1	1.69875E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.17156E-1	-7.98345E-1	-9.13146E0	-9.14178E0	5.60284E-3	9.3317E-2	2.73153E1	-3.26314E1	-3.2602E1	2.68058E1	1.69725E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.00705E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.17299E-1	-7.98869E-1	-9.13098E0	-9.14164E0	5.48363E-3	9.3317E-2	2.73216E1	-3.26644E1	-3.26242E1	2.6807E1	1.69875E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.02073E-1