[Scan]
initial_time=2016-02-17T23:23:37
final_time=2016-02-17T23:24:06
ip_count=19
run=1032
dataset=11
scan=588
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08862E-4
ql1_vset=
ql1_vmon=-8.17037E-1
ql1_imon=1.37188E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.90066E-9
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=4.88842E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=4.17495E-10
mult1=-1.08352E-8
mult2=-2.6527E-9
rf_tmon=-4.10244E-3
rf_agc=3.3781E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=1.62293E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69257E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.05118E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.0268E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04886E1
cs_ea1_imon=2.1662E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36415E0
lens1_imon=2.75765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.55012E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.00216E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.72572E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11015E1
os_restr1_imon=4.27328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.1799E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=1.2491E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93251E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=3.27066E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.69224E-8
tplens_vset=1.4E-1
tplens_vmon=1.56152E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26054E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.58472E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02997E2
lens6_imon=2.98389E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.07248E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=2.01083E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.16692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.81447E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00392E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.64698E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10427E1
os_restr2_imon=3.54023E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31262E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.28029E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7311E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68024E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09503E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=9.8392E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10551E0
cs_ionaccel_imon=-2.08972E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=1.74095E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.8596E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.76133E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.41668E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=6.85288E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30231E0
defgridb_imon=6.31214E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.58019E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63748E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=1.00578E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6567E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82866E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.09876E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22466E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31555E-3
inlet_lpb_pmon=2.00258E-1
chamber_ion_pmon=1.69763E-7
chamber_cvt_pmon=2.52406E-3
foreline_cvt_pmon=2.52406E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92328E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.17037E-1	-7.98321E-1	-9.13107E0	-9.14216E0	5.6982E-3	9.30309E-2	2.7347E1	-3.27062E1	-3.26189E1	2.67931E1	1.69728E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98247E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16965E-1	-7.98726E-1	-9.13126E0	-9.14183E0	5.29289E-3	9.32693E-2	2.72408E1	-3.27411E1	-3.25899E1	2.6798E1	1.69653E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.1718E-1	-7.98392E-1	-9.13091E0	-9.14161E0	5.24521E-3	9.3174E-2	2.73428E1	-3.26984E1	-3.26156E1	2.68028E1	1.69656E-7	2.52139E-3	2.52139E-3	6.31858E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.17084E-1	-7.98249E-1	-9.131E0	-9.14173E0	5.48363E-3	9.31978E-2	2.72898E1	-3.26854E1	-3.26389E1	2.67908E1	1.69798E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.16917E-1	-7.98154E-1	-9.13112E0	-9.14171E0	5.45979E-3	9.3174E-2	2.72666E1	-3.26182E1	-3.26302E1	2.6801E1	1.69654E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.16774E-1	-7.98249E-1	-9.13081E0	-9.1419E0	5.65052E-3	9.29356E-2	2.73255E1	-3.26663E1	-3.26687E1	2.67938E1	1.69654E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16727E-1	-7.98202E-1	-9.13086E0	-9.14178E0	5.34058E-3	9.32932E-2	2.73027E1	-3.26687E1	-3.26464E1	2.6813E1	1.69802E-7	2.52757E-3	2.52757E-3	6.32386E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16798E-1	-7.98345E-1	-9.13119E0	-9.14178E0	5.50747E-3	9.31263E-2	2.72666E1	-3.26416E1	-3.26332E1	2.681E1	1.69728E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16774E-1	-7.98631E-1	-9.13086E0	-9.14197E0	5.57899E-3	9.3174E-2	2.72671E1	-3.26689E1	-3.26168E1	2.68106E1	1.69728E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.17108E-1	-7.98249E-1	-9.13093E0	-9.14192E0	5.67436E-3	9.32932E-2	2.73141E1	-3.26639E1	-3.2638E1	2.67866E1	1.69806E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.00818E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.1687E-1	-7.98631E-1	-9.13119E0	-9.1419E0	5.57899E-3	9.34124E-2	2.72877E1	-3.2614E1	-3.26386E1	2.67932E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16798E-1	-7.98559E-1	-9.13076E0	-9.14171E0	5.74589E-3	9.32932E-2	2.72815E1	-3.26638E1	-3.26319E1	2.67962E1	1.69654E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98764E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16822E-1	-7.98702E-1	-9.13076E0	-9.14161E0	5.55515E-3	9.32455E-2	2.72561E1	-3.26878E1	-3.26021E1	2.67842E1	1.69725E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9951E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16822E-1	-7.98655E-1	-9.13103E0	-9.14209E0	5.48363E-3	9.29832E-2	2.73511E1	-3.26655E1	-3.26561E1	2.67908E1	1.69881E-7	2.52362E-3	2.52362E-3	6.33538E-3	2.00108E-1
1.8E1	1.07E2	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.17013E-1	-7.98464E-1	-9.13105E0	-9.14195E0	5.48363E-3	9.3174E-2	2.73075E1	-3.26356E1	-3.26543E1	2.6807E1	1.69725E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9985E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.1737E-1	-7.98368E-1	-9.13098E0	-9.14204E0	5.79357E-3	9.31263E-2	2.73069E1	-3.26714E1	-3.26366E1	2.67752E1	1.69654E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.01022E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.1706E-1	-7.98392E-1	-9.13088E0	-9.14161E0	5.53131E-3	9.33409E-2	2.72903E1	-3.26968E1	-3.26337E1	2.67821E1	1.69653E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9968E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16941E-1	-7.98416E-1	-9.13079E0	-9.14176E0	5.79357E-3	9.32693E-2	2.73315E1	-3.26873E1	-3.2644E1	2.67722E1	1.69725E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.9917E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16894E-1	-7.98535E-1	-9.13095E0	-9.14185E0	5.53131E-3	9.29832E-2	2.72727E1	-3.2629E1	-3.26759E1	2.68046E1	1.69728E-7	2.52209E-3	2.52209E-3	6.3514E-3	1.9911E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.17037E-1	-7.9813E-1	-9.13091E0	-9.14166E0	5.79357E-3	9.34839E-2	2.7311E1	-3.26779E1	-3.26054E1	2.68024E1	1.69763E-7	2.52406E-3	2.52406E-3	6.31555E-3	2.00258E-1