[Scan]
initial_time=2016-02-17T23:24:17
final_time=2016-02-17T23:24:46
ip_count=19
run=1032
dataset=11
scan=589
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=1.37074E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.88162E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=5.03969E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=4.22692E-10
mult1=-9.12106E-9
mult2=-2.68602E-9
rf_tmon=-4.22042E-3
rf_agc=3.40288E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=1.58447E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61017E0
bslens_imon=2.94675E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=1.97943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5391E1
cs_ef1b_imon=3.04785E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=2.17764E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42506E0
lens1_imon=2.87242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.98669E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.56461E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=3.00163E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.72379E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=4.27149E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15518E1
os_ea1_imon=2.19215E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.08782E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=1.24536E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=3.26124E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.68572E-8
tplens_vset=1.4E-1
tplens_vmon=1.58539E0
tplens_imon=-3.48439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26201E1
iondef3_imon=1.52816E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26862E1
iondef2_imon=1.58444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98505E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.07031E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=2.01164E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34171E1
lens5b_imon=2.19321E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.83669E0
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.17852E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10785E0
os_ef2alow_imon=-2.72749E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.6384E-1
os_ef2bup_imon=-5.42081E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=3.53265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.32123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.26523E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73204E1
iondef1_imon=1.11405E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.06835E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.09456E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=9.82131E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11103E0
cs_ionaccel_imon=-1.93166E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47105E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56336E1
einzel_imon=7.63571E-6
window_vset=0.0E0
window_vmon=1.24433E-1
window_imon=-1.12193E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.38969E-4
mask2_vset=0.0E0
mask2_vmon=-1.86101E1
mask2_imon=-5.38084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.9267E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.82948E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.02061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=5.92339E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33341E1
os_fil1_imon=9.60497E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07219E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=1.00682E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62082E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65843E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80005E-2
os_fil2_imon=-2.64023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8776E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.25327E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37018E-1
cs_fil2_imon=-2.6576E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.0181E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22536E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00285E-1
chamber_ion_pmon=1.69806E-7
chamber_cvt_pmon=2.52697E-3
foreline_cvt_pmon=2.52697E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13073E-1
res40_imon=-2.69622E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=186
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16965E-1	-7.9844E-1	-9.13124E0	-9.14178E0	5.79357E-3	9.36508E-2	2.73233E1	-3.26528E1	-3.26715E1	2.68018E1	1.69653E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00534E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.17132E-1	-7.98678E-1	-9.131E0	-9.1419E0	5.50747E-3	9.3627E-2	2.73027E1	-3.26723E1	-3.26536E1	2.68001E1	1.6965E-7	2.51369E-3	2.51369E-3	6.34385E-3	2.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.17037E-1	-7.98202E-1	-9.13091E0	-9.14192E0	5.53131E-3	9.3627E-2	2.72986E1	-3.26874E1	-3.26231E1	2.68022E1	1.69654E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98592E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16822E-1	-7.98178E-1	-9.13122E0	-9.14156E0	5.57899E-3	9.33886E-2	2.73183E1	-3.27089E1	-3.26278E1	2.68082E1	1.6987E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16941E-1	-7.98559E-1	-9.13134E0	-9.14168E0	5.4121E-3	9.33886E-2	2.73081E1	-3.26579E1	-3.26627E1	2.68154E1	1.69728E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16774E-1	-7.98535E-1	-9.13124E0	-9.14152E0	5.62668E-3	9.34124E-2	2.72815E1	-3.26885E1	-3.25871E1	2.68244E1	1.69728E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.16846E-1	-7.98178E-1	-9.13119E0	-9.1419E0	5.34058E-3	9.3627E-2	2.72799E1	-3.2623E1	-3.26146E1	2.6792E1	1.69581E-7	2.5131E-3	2.5131E-3	6.35059E-3	2.00705E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0968E0	-8.16941E-1	-7.98225E-1	-9.13115E0	-9.1418E0	5.62668E-3	9.33409E-2	2.73015E1	-3.26747E1	-3.26615E1	2.68178E1	1.69654E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16798E-1	-7.9844E-1	-9.13115E0	-9.14199E0	5.84126E-3	9.3174E-2	2.73334E1	-3.26614E1	-3.26472E1	2.68058E1	1.69802E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16894E-1	-7.97963E-1	-9.13134E0	-9.14171E0	5.88894E-3	9.31501E-2	2.72959E1	-3.26468E1	-3.26432E1	2.6801E1	1.69725E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.99E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16822E-1	-7.98059E-1	-9.13138E0	-9.14202E0	5.60284E-3	9.31025E-2	2.73086E1	-3.26909E1	-3.26531E1	2.68136E1	1.69881E-7	2.51359E-3	2.51359E-3	6.32418E-3	1.99577E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16822E-1	-7.98035E-1	-9.13095E0	-9.14171E0	5.45979E-3	9.34601E-2	2.73287E1	-3.26496E1	-3.25824E1	2.67968E1	1.69798E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.98322E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16822E-1	-7.98249E-1	-9.13074E0	-9.14168E0	5.57899E-3	9.33409E-2	2.73117E1	-3.27149E1	-3.26458E1	2.67817E1	1.69798E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9917E-1
1.7E1	2.7E1	0.0E0	6.87E2	4.7E2	-2.09665E0	-8.16989E-1	-7.98655E-1	-9.131E0	-9.1419E0	5.48363E-3	9.32455E-2	2.73405E1	-3.26691E1	-3.2616E1	2.67929E1	1.69728E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.9911E-1
1.8E1	8.2E1	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.17013E-1	-7.98249E-1	-9.13115E0	-9.14207E0	5.57899E-3	9.35316E-2	2.73167E1	-3.26725E1	-3.26658E1	2.6819E1	1.6987E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.00534E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.17013E-1	-7.9844E-1	-9.13093E0	-9.14156E0	5.60284E-3	9.3317E-2	2.73281E1	-3.26844E1	-3.26248E1	2.67938E1	1.69731E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.00463E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.16679E-1	-7.97915E-1	-9.1311E0	-9.14173E0	5.74589E-3	9.36985E-2	2.73326E1	-3.26848E1	-3.26462E1	2.68004E1	1.69581E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.17037E-1	-7.98082E-1	-9.13093E0	-9.14171E0	5.62668E-3	9.33647E-2	2.73381E1	-3.26967E1	-3.26011E1	2.68112E1	1.69581E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.01022E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.16894E-1	-7.98392E-1	-9.1311E0	-9.14192E0	5.65052E-3	9.3317E-2	2.72671E1	-3.26321E1	-3.26799E1	2.67986E1	1.70221E-7	2.51919E-3	2.51919E-3	6.31269E-3	1.99061E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16965E-1	-7.98154E-1	-9.13134E0	-9.1418E0	5.55515E-3	9.31978E-2	2.73204E1	-3.26862E1	-3.26201E1	2.68118E1	1.69806E-7	2.52697E-3	2.52697E-3	6.3074E-3	2.00285E-1