[Scan]
initial_time=2016-02-17T23:25:36
final_time=2016-02-17T23:26:05
ip_count=19
run=1032
dataset=11
scan=591
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.17204E-1
ql1_imon=1.37023E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.0097E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=4.0251E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=4.6196E-10
mult1=-9.31897E-9
mult2=-2.56292E-9
rf_tmon=-3.67127E-3
rf_agc=3.37662E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=1.55898E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53233E1
cs_ef1b_imon=3.04229E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05192E1
cs_ea1_imon=2.16548E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40861E0
lens1_imon=2.67835E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64591E1
os_ef1alow_imon=2.96723E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03522E1
cs_ea2_imon=1.56382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=3.01866E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.72173E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11164E1
os_restr1_imon=4.2767E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.17594E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.2437E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02215E1
cs_anode1_imon=3.27166E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.69058E-8
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-1.51543E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26705E1
iondef3_imon=1.51335E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.57607E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.9862E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.05817E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=2.00795E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.17377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74542E1
cs_ef2b_imon=3.12153E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.85473E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.17435E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09105E0
os_ef2alow_imon=-2.7553E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.6384E-1
os_ef2bup_imon=-5.35479E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10753E1
os_restr2_imon=3.54308E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.28087E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73448E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.09024E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09773E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=9.80683E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-1.95599E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=1.97993E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82594E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.85701E1
mask2_imon=-7.39649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=8.01728E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.8673E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.34676E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61811E0
defgridb_imon=6.01653E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.57167E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07045E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30929E1
cs_fil1_imon=1.00563E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62551E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65613E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73837E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.16965E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38142E-1
cs_fil2_imon=-2.57072E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.33493E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2253E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.69653E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2987E-1
res40_imon=-2.69969E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16417E-1	-7.98678E-1	-9.13091E0	-9.14185E0	5.36442E-3	9.3174E-2	2.73321E1	-3.26494E1	-3.26212E1	2.68016E1	1.69728E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.99283E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16631E-1	-7.98702E-1	-9.13115E0	-9.14178E0	5.55515E-3	9.32932E-2	2.73322E1	-3.2672E1	-3.26602E1	2.67986E1	1.69728E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.9963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16894E-1	-7.98225E-1	-9.13079E0	-9.14176E0	5.4121E-3	9.32217E-2	2.73033E1	-3.26472E1	-3.2639E1	2.68186E1	1.69653E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9883E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1687E-1	-7.98011E-1	-9.131E0	-9.14199E0	5.17368E-3	9.30548E-2	2.72992E1	-3.26797E1	-3.25971E1	2.6795E1	1.70088E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9883E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16941E-1	-7.98297E-1	-9.13098E0	-9.14214E0	5.29289E-3	9.32455E-2	2.72818E1	-3.2664E1	-3.26291E1	2.67992E1	1.69653E-7	2.52169E-3	2.52169E-3	6.29665E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.17084E-1	-7.98154E-1	-9.13122E0	-9.14199E0	5.48363E-3	9.3317E-2	2.73523E1	-3.2659E1	-3.26024E1	2.6801E1	1.69728E-7	2.52757E-3	2.52757E-3	6.32936E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.17132E-1	-7.98345E-1	-9.13115E0	-9.14192E0	5.60284E-3	9.33647E-2	2.73171E1	-3.26543E1	-3.26248E1	2.6819E1	1.69728E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.17227E-1	-7.98249E-1	-9.13119E0	-9.1419E0	5.65052E-3	9.33409E-2	2.73057E1	-3.2652E1	-3.26213E1	2.6818E1	1.69875E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.17084E-1	-7.97987E-1	-9.13136E0	-9.14185E0	5.60284E-3	9.31263E-2	2.73252E1	-3.26514E1	-3.25953E1	2.68028E1	1.69725E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.9985E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.1706E-1	-7.97939E-1	-9.13107E0	-9.14207E0	5.48363E-3	9.2864E-2	2.73105E1	-3.26543E1	-3.26386E1	2.68142E1	1.69653E-7	2.52492E-3	2.52492E-3	6.31278E-3	1.98661E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16917E-1	-7.98225E-1	-9.13105E0	-9.14209E0	5.55515E-3	9.27687E-2	2.73039E1	-3.26657E1	-3.26158E1	2.67998E1	1.69581E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.17084E-1	-7.98535E-1	-9.13126E0	-9.14221E0	5.45979E-3	9.31263E-2	2.73375E1	-3.26717E1	-3.26633E1	2.67836E1	1.69654E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.99977E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.17323E-1	-7.99012E-1	-9.13117E0	-9.14245E0	5.62668E-3	9.31025E-2	2.72997E1	-3.26693E1	-3.2644E1	2.67998E1	1.70023E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.9963E-1
1.7E1	1.5E1	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.17418E-1	-7.98798E-1	-9.13095E0	-9.14223E0	5.50747E-3	9.29832E-2	2.73003E1	-3.26506E1	-3.26062E1	2.67902E1	1.69875E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00151E-1
1.8E1	1.03E2	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.17037E-1	-7.98368E-1	-9.13086E0	-9.14214E0	5.8651E-3	9.29832E-2	2.73333E1	-3.26711E1	-3.2602E1	2.6816E1	1.69654E-7	2.5199E-3	2.5199E-3	6.34588E-3	2.00847E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.17084E-1	-7.98678E-1	-9.13105E0	-9.1424E0	5.43594E-3	9.32217E-2	2.73117E1	-3.27041E1	-3.26146E1	2.68154E1	1.69802E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00151E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.17204E-1	-7.98607E-1	-9.1311E0	-9.14202E0	5.29289E-3	9.30071E-2	2.73016E1	-3.27092E1	-3.26001E1	2.67833E1	1.69875E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.17108E-1	-7.98869E-1	-9.13112E0	-9.14216E0	5.07832E-3	9.30786E-2	2.73149E1	-3.26608E1	-3.26996E1	2.67926E1	1.69798E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00363E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.17108E-1	-7.98869E-1	-9.13126E0	-9.14226E0	5.55515E-3	9.3174E-2	2.73198E1	-3.26602E1	-3.26349E1	2.67972E1	1.69723E-7	2.51603E-3	2.51603E-3	6.30212E-3	2.00231E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.17204E-1	-7.98392E-1	-9.13126E0	-9.14233E0	5.57899E-3	9.30309E-2	2.73448E1	-3.26398E1	-3.26705E1	2.68094E1	1.69653E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.00705E-1