[Scan]
initial_time=2016-02-17T23:30:14
final_time=2016-02-17T23:30:43
ip_count=19
run=1032
dataset=11
scan=598
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08842E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.37004E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.90213E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=4.14479E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.10783E-10
mult1=-9.93304E-9
mult2=-2.72061E-9
rf_tmon=-4.29012E-3
rf_agc=3.50579E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.62143E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62829E0
bslens_imon=2.81533E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05169E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.06595E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.0193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04742E1
cs_ea1_imon=2.19252E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37316E0
lens1_imon=2.64951E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04429E1
cs_ea2_imon=1.56273E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.00901E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.72549E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.16801E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28695E0
cs_ionrep_imon=1.25848E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=3.2721E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.68138E-8
tplens_vset=1.4E-1
tplens_vmon=1.62461E0
tplens_imon=-3.5342E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26543E1
iondef3_imon=1.48667E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26434E1
iondef2_imon=1.57824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02996E2
lens6_imon=2.9871E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.07436E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=2.00182E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33898E1
lens5b_imon=2.21307E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86134E0
os_ea2_imon=-8.00434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.74204E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.69503E-1
os_ef2bup_imon=-5.40897E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=3.53519E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.28389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72943E1
iondef1_imon=1.10563E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68175E1
iondef4_imon=1.07548E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.09252E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=9.82802E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-2.08251E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.85713E1
mask2_imon=-8.1752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.72528E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.56088E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.33955E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46472E0
defgridb_imon=6.02735E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33376E1
os_fil1_imon=9.57965E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07107E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6391E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=1.00464E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62011E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65358E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.75127E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.00209E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80044E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22404E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.24198E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.69802E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.03451E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16631E-1	-7.98106E-1	-9.13146E0	-9.1419E0	5.55515E-3	9.32932E-2	2.72993E1	-3.26822E1	-3.26318E1	2.67984E1	1.69875E-7	2.51662E-3	2.51662E-3	6.36797E-3	1.98764E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16727E-1	-7.98178E-1	-9.13143E0	-9.14202E0	5.8651E-3	9.32455E-2	2.73394E1	-3.26815E1	-3.25723E1	2.67957E1	1.69943E-7	2.51847E-3	2.51847E-3	6.28056E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16917E-1	-7.98321E-1	-9.1316E0	-9.14197E0	5.55515E-3	9.31978E-2	2.7344E1	-3.26856E1	-3.26166E1	2.68036E1	1.69881E-7	2.51915E-3	2.51915E-3	6.35223E-3	1.98344E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16822E-1	-7.98178E-1	-9.13124E0	-9.14202E0	5.65052E-3	9.3317E-2	2.73086E1	-3.26602E1	-3.26679E1	2.67794E1	1.69581E-7	2.52276E-3	2.52276E-3	6.2645E-3	1.98491E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16798E-1	-7.9844E-1	-9.13112E0	-9.14202E0	5.62668E-3	9.34362E-2	2.72794E1	-3.26529E1	-3.26529E1	2.68106E1	1.69728E-7	2.52977E-3	2.52977E-3	6.36244E-3	1.98419E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16846E-1	-7.9844E-1	-9.13131E0	-9.14207E0	5.53131E-3	9.34601E-2	2.73198E1	-3.26579E1	-3.2629E1	2.67782E1	1.69802E-7	2.52867E-3	2.52867E-3	6.30192E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16917E-1	-7.97939E-1	-9.13098E0	-9.14211E0	5.36442E-3	9.33886E-2	2.73069E1	-3.26236E1	-3.26048E1	2.68046E1	1.6969E-7	2.52351E-3	2.52351E-3	6.28843E-3	1.99999E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16965E-1	-7.98321E-1	-9.13115E0	-9.14185E0	5.36442E-3	9.30786E-2	2.73063E1	-3.26422E1	-3.26464E1	2.67902E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16798E-1	-7.98273E-1	-9.13143E0	-9.14202E0	5.19753E-3	9.31501E-2	2.72504E1	-3.26494E1	-3.26446E1	2.68157E1	1.69798E-7	2.51954E-3	2.51954E-3	6.35601E-3	1.98491E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16989E-1	-7.98011E-1	-9.13138E0	-9.1418E0	5.88894E-3	9.29594E-2	2.72862E1	-3.26791E1	-3.26809E1	2.6804E1	1.69581E-7	2.52538E-3	2.52538E-3	6.37905E-3	1.96874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.1706E-1	-7.98059E-1	-9.13148E0	-9.14216E0	5.50747E-3	9.34124E-2	2.72955E1	-3.26825E1	-3.2623E1	2.68268E1	1.69653E-7	2.52599E-3	2.52599E-3	6.3723E-3	1.98491E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16822E-1	-7.98249E-1	-9.13181E0	-9.14192E0	5.14984E-3	9.33886E-2	2.72979E1	-3.26446E1	-3.2641E1	2.68232E1	1.69802E-7	2.5199E-3	2.5199E-3	6.37351E-3	1.98592E-1
1.6E1	4.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16822E-1	-7.98178E-1	-9.1316E0	-9.14195E0	5.31673E-3	9.32455E-2	2.73279E1	-3.26933E1	-3.26452E1	2.68058E1	1.69654E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.99283E-1
1.7E1	2.0E1	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16488E-1	-7.98512E-1	-9.13131E0	-9.1419E0	5.4121E-3	9.32693E-2	2.73303E1	-3.26807E1	-3.26398E1	2.67698E1	1.69581E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.99977E-1
1.8E1	7.4E1	1.0E0	7.27E2	5.0E2	-2.09495E0	-8.16512E-1	-7.98535E-1	-9.13134E0	-9.14199E0	5.38826E-3	9.32217E-2	2.72886E1	-3.26343E1	-3.2649E1	2.67878E1	1.69728E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.00673E-1
1.9E1	4.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16226E-1	-7.98297E-1	-9.13141E0	-9.14221E0	5.38826E-3	9.32693E-2	2.73159E1	-3.26536E1	-3.265E1	2.68175E1	1.69654E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.00499E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.16512E-1	-7.98106E-1	-9.13155E0	-9.14185E0	5.36442E-3	9.33886E-2	2.73087E1	-3.26831E1	-3.26506E1	2.67764E1	1.69725E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.98661E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16703E-1	-7.98512E-1	-9.13138E0	-9.14202E0	5.50747E-3	9.32217E-2	2.73434E1	-3.27033E1	-3.2616E1	2.68265E1	1.69873E-7	2.51863E-3	2.51863E-3	6.25603E-3	1.98883E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.1687E-1	-7.98202E-1	-9.13119E0	-9.14199E0	5.34058E-3	9.34839E-2	2.73175E1	-3.26868E1	-3.26124E1	2.68424E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16655E-1	-7.98225E-1	-9.13126E0	-9.14207E0	5.29289E-3	9.3174E-2	2.72943E1	-3.26434E1	-3.26543E1	2.68175E1	1.69802E-7	2.52209E-3	2.52209E-3	6.24198E-3	1.99283E-1