[Scan]
initial_time=2016-02-17T23:31:54
final_time=2016-02-17T23:32:17
ip_count=19
run=1032
dataset=11
scan=601
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.36238E-8
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=1.88005E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=3.46255E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=4.03881E-10
mult1=-8.77714E-9
mult2=-2.69466E-9
rf_tmon=-4.36222E-3
rf_agc=3.32254E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.55861E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.64951E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20331E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.05514E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.01998E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04838E1
cs_ea1_imon=2.17522E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38518E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03594E1
cs_ea2_imon=1.55588E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.00396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.72427E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.28013E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.17233E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=1.27326E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.26958E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.6951E-8
tplens_vset=1.4E-1
tplens_vmon=1.618E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2593E1
iondef3_imon=1.4809E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26789E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.08152E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=2.01155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.17053E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.82468E0
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71059E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10682E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.85721E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.54744E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01605E1
cs_anode2_imon=2.27849E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68232E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.09009E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=9.83155E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-2.16901E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.38962E-4
mask2_vset=0.0E0
mask2_vmon=-1.86044E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.34315E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.45634E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.09441E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.57635E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07954E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63825E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=1.00635E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65899E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76417E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.00209E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37291E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=1.9911E-1
chamber_ion_pmon=1.69581E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.96843E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16798E-1	-7.98297E-1	-9.1316E0	-9.14209E0	5.31673E-3	9.32217E-2	2.73181E1	-3.26885E1	-3.26154E1	2.68099E1					
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16488E-1	-7.98225E-1	-9.13115E0	-9.14192E0	5.38826E-3	9.3317E-2	2.73222E1	-3.26578E1	-3.25758E1	2.6792E1	1.6987E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16798E-1	-7.98297E-1	-9.13112E0	-9.14192E0	5.31673E-3	9.32217E-2	2.72986E1	-3.26372E1	-3.26006E1	2.6796E1	1.69806E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16703E-1	-7.98297E-1	-9.13119E0	-9.14192E0	5.43594E-3	9.33409E-2	2.73303E1	-3.26927E1	-3.26116E1	2.68022E1	1.69725E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.16679E-1	-7.98368E-1	-9.13117E0	-9.14199E0	5.62668E-3	9.33409E-2	2.72903E1	-3.2652E1	-3.26531E1	2.68142E1	1.69728E-7	2.53087E-3	2.53087E-3	6.31837E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09704E0	-8.16584E-1	-7.98273E-1	-9.13095E0	-9.14211E0	5.19753E-3	9.32693E-2	2.73105E1	-3.26741E1	-3.26422E1	2.67962E1	1.69943E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.9985E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09719E0	-8.16488E-1	-7.98154E-1	-9.13115E0	-9.14168E0	5.50747E-3	9.32217E-2	2.73103E1	-3.26614E1	-3.26515E1	2.68117E1	1.69875E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.16727E-1	-7.98321E-1	-9.13134E0	-9.14166E0	5.84126E-3	9.31263E-2	2.73294E1	-3.26872E1	-3.26198E1	2.68138E1	1.69652E-7	2.52131E-3	2.52131E-3	6.31798E-3	1.99562E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16584E-1	-7.98321E-1	-9.13146E0	-9.14202E0	5.48363E-3	9.31501E-2	2.73051E1	-3.26419E1	-3.26307E1	2.6796E1	1.69734E-7	2.51952E-3	2.51952E-3	6.3245E-3	1.99703E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.16631E-1	-7.98559E-1	-9.13115E0	-9.14207E0	5.38826E-3	9.32693E-2	2.73039E1	-3.26543E1	-3.26068E1	2.6795E1	1.69653E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00534E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16512E-1	-7.98464E-1	-9.13129E0	-9.14214E0	5.48363E-3	9.33409E-2	2.73234E1	-3.2682E1	-3.26301E1	2.6798E1	1.69654E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16703E-1	-7.98583E-1	-9.13115E0	-9.14209E0	5.60284E-3	9.36031E-2	2.73105E1	-3.2647E1	-3.26518E1	2.67902E1	1.70023E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16631E-1	-7.98321E-1	-9.13122E0	-9.14173E0	5.45979E-3	9.32455E-2	2.72558E1	-3.26615E1	-3.26633E1	2.67962E1	1.6987E-7	2.52169E-3	2.52169E-3	6.34518E-3	1.98661E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16679E-1	-7.98416E-1	-9.13136E0	-9.14197E0	5.57899E-3	9.3174E-2	2.73664E1	-3.26464E1	-3.26314E1	2.67896E1	1.69654E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.9911E-1
1.8E1	1.04E2	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16298E-1	-7.98202E-1	-9.13124E0	-9.14221E0	5.60284E-3	9.31501E-2	2.73112E1	-3.26964E1	-3.26523E1	2.6801E1	1.69654E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.99456E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16441E-1	-7.98631E-1	-9.13115E0	-9.14195E0	5.65052E-3	9.33409E-2	2.73204E1	-3.26708E1	-3.26319E1	2.68166E1	1.69731E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.00463E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.16202E-1	-7.98273E-1	-9.13129E0	-9.14197E0	5.43594E-3	9.34601E-2	2.72907E1	-3.27035E1	-3.26434E1	2.68064E1	1.69798E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.00876E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16369E-1	-7.9844E-1	-9.1315E0	-9.14185E0	5.57899E-3	9.32693E-2	2.73173E1	-3.26654E1	-3.26561E1	2.68082E1	1.69798E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.00448E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09657E0	-8.16607E-1	-7.98225E-1	-9.13169E0	-9.14185E0	5.4121E-3	9.32932E-2	2.72811E1	-3.26332E1	-3.26488E1	2.6834E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16441E-1	-7.98106E-1	-9.13146E0	-9.14185E0	5.53131E-3	9.3317E-2	2.73315E1	-3.26789E1	-3.2593E1	2.68232E1	1.69581E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.9911E-1