[Scan]
initial_time=2016-02-17T23:33:28
final_time=2016-02-17T23:33:51
ip_count=19
run=1032
dataset=11
scan=604
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36903E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.83536E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=3.94106E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=4.24707E-10
mult1=-1.00896E-8
mult2=-2.85435E-9
rf_tmon=-4.00172E-3
rf_agc=3.29611E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.58838E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69094E0
bslens_imon=2.62118E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.99095E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53753E1
cs_ef1b_imon=3.05864E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02371E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=2.18315E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36483E0
lens1_imon=2.57174E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64739E1
os_ef1alow_imon=2.97922E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.55403E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84473E1
cs_ef1a_imon=3.01187E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.72946E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1115E1
os_restr1_imon=4.26713E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15186E1
os_ea1_imon=2.18407E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63756E1
os_ef1bup_imon=3.07245E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24695E0
cs_ionrep_imon=1.26388E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93439E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01637E1
cs_anode1_imon=3.27209E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.68664E-8
tplens_vset=1.4E-1
tplens_vmon=1.62907E0
tplens_imon=-2.43212E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26675E1
iondef3_imon=1.49161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.59914E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98469E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.07693E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26961E0
ionrepsh_imon=1.99991E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3395E1
lens5b_imon=2.17913E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74606E1
cs_ef2b_imon=3.1211E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.86082E0
os_ea2_imon=-4.78049E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06161E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71195E1
cs_ef2a_imon=3.1911E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.14611E0
os_ef2alow_imon=-2.56707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.79908E-1
os_ef2bup_imon=-5.39839E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10888E1
os_restr2_imon=3.54549E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01852E1
cs_anode2_imon=2.27516E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.08374E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67932E1
iondef4_imon=1.07232E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.08949E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=9.86088E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09509E0
cs_ionaccel_imon=-2.04287E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47163E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56316E1
einzel_imon=7.66901E-6
window_vset=0.0E0
window_vmon=1.33831E-1
window_imon=-1.05724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86114E1
mask2_imon=-7.62182E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.21286E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.65667E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=6.96566E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33239E0
defgridb_imon=6.27042E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.57906E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07219E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64137E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=1.00676E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61885E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66097E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.58176E-2
os_fil2_imon=-2.67236E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92618E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91628E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.7613E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12052E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22694E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.6987E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.24977E-1
res40_imon=-2.66124E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=467
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.4E1	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.1656E-1	-7.98535E-1	-9.13157E0	-9.14199E0	5.43594E-3	9.32693E-2	2.72838E1	-3.26601E1	-3.26389E1	2.68015E1	1.69846E-7	2.51842E-3	2.51842E-3	6.3148E-3	1.99673E-1
2.0E0	3.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16846E-1	-7.98297E-1	-9.13162E0	-9.1419E0	5.50747E-3	9.3174E-2	2.73375E1	-3.26818E1	-3.26351E1	2.68097E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16846E-1	-7.98249E-1	-9.13196E0	-9.14202E0	5.48363E-3	9.30548E-2	2.73104E1	-3.26703E1	-3.26349E1	2.67944E1	1.69673E-7	2.52219E-3	2.52219E-3	6.29365E-3	1.99356E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16417E-1	-7.98106E-1	-9.13153E0	-9.14192E0	5.126E-3	9.31501E-2	2.73287E1	-3.2682E1	-3.26207E1	2.67879E1	1.6987E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.99E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16393E-1	-7.98178E-1	-9.1316E0	-9.14226E0	5.67436E-3	9.32455E-2	2.72835E1	-3.26615E1	-3.2647E1	2.6813E1	1.69798E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16441E-1	-7.98178E-1	-9.13126E0	-9.14202E0	5.57899E-3	9.35793E-2	2.72939E1	-3.26785E1	-3.26313E1	2.67956E1	1.69725E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.9985E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16298E-1	-7.98225E-1	-9.13122E0	-9.14204E0	5.53131E-3	9.31978E-2	2.73694E1	-3.26651E1	-3.2608E1	2.6804E1	1.69728E-7	2.52209E-3	2.52209E-3	6.34037E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16202E-1	-7.98297E-1	-9.1315E0	-9.14187E0	5.53131E-3	9.30309E-2	2.73105E1	-3.26278E1	-3.26158E1	2.68166E1	1.69802E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16965E-1	-7.98273E-1	-9.1315E0	-9.14185E0	5.57899E-3	9.32217E-2	2.73027E1	-3.26398E1	-3.26164E1	2.68118E1	1.69654E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.17084E-1	-7.98297E-1	-9.13155E0	-9.14178E0	5.34058E-3	9.31025E-2	2.73147E1	-3.26645E1	-3.26254E1	2.68142E1	1.69728E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.00847E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16822E-1	-7.98512E-1	-9.13157E0	-9.14197E0	5.50747E-3	9.30309E-2	2.72949E1	-3.26633E1	-3.26224E1	2.67944E1	1.69728E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16917E-1	-7.98202E-1	-9.13131E0	-9.14192E0	5.43594E-3	9.28402E-2	2.72889E1	-3.26819E1	-3.26056E1	2.68016E1	1.69654E-7	2.53087E-3	2.53087E-3	6.28552E-3	1.9963E-1
1.6E1	3.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17108E-1	-7.98321E-1	-9.13165E0	-9.14197E0	5.38826E-3	9.32217E-2	2.72997E1	-3.26681E1	-3.26134E1	2.67902E1	1.69581E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.9963E-1
1.7E1	1.8E1	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16894E-1	-7.98345E-1	-9.13141E0	-9.14185E0	5.38826E-3	9.33886E-2	2.73285E1	-3.26705E1	-3.26609E1	2.68034E1	1.6987E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.99E-1
1.8E1	9.4E1	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16894E-1	-7.98202E-1	-9.13153E0	-9.14185E0	5.55515E-3	9.32217E-2	2.73063E1	-3.26549E1	-3.26366E1	2.67728E1	1.69728E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.1687E-1	-7.98488E-1	-9.13155E0	-9.14176E0	5.57899E-3	9.3317E-2	2.72895E1	-3.26693E1	-3.26344E1	2.6814E1	1.69728E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.97731E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.16798E-1	-7.98535E-1	-9.1311E0	-9.14195E0	5.79357E-3	9.33647E-2	2.73189E1	-3.26627E1	-3.26266E1	2.68082E1	1.69581E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.97559E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16846E-1	-7.98488E-1	-9.13124E0	-9.14216E0	6.03199E-3	9.33647E-2	2.73234E1	-3.26484E1	-3.26478E1	2.68088E1	1.69728E-7	2.52318E-3	2.52318E-3	6.34588E-3	1.97388E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16607E-1	-7.98512E-1	-9.13115E0	-9.14204E0	5.84126E-3	9.32455E-2	2.73204E1	-3.26649E1	-3.26124E1	2.67989E1	1.69943E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16464E-1	-7.98583E-1	-9.13138E0	-9.14192E0	5.6982E-3	9.30548E-2	2.73375E1	-3.26801E1	-3.26675E1	2.67932E1	1.6987E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.99E-1