[Scan]
initial_time=2016-02-17T23:34:00
final_time=2016-02-17T23:34:22
ip_count=19
run=1032
dataset=11
scan=605
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.3644E-8
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=1.90392E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=4.07779E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.30298E-10
mult1=-8.80122E-9
mult2=-2.72859E-9
rf_tmon=-6.05655E-3
rf_agc=3.20298E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=1.59117E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66851E0
bslens_imon=2.59448E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1989E1
lens5a_imon=1.98905E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05074E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53614E1
cs_ef1b_imon=3.05825E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02062E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04872E1
cs_ea1_imon=2.16535E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38603E0
lens1_imon=2.68263E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64979E1
os_ef1alow_imon=2.97564E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.56152E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84318E1
cs_ef1a_imon=3.00354E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=1.72594E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11172E1
os_restr1_imon=4.26707E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15067E1
os_ea1_imon=2.20282E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.0656E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25761E0
cs_ionrep_imon=1.2427E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93552E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=3.27563E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.68614E-8
tplens_vset=1.4E-1
tplens_vmon=1.59981E0
tplens_imon=-3.47571E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.58796E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.04118E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29005E0
ionrepsh_imon=2.03276E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33897E1
lens5b_imon=2.17674E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74446E1
cs_ef2b_imon=3.1159E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.87283E0
os_ea2_imon=-7.51598E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71062E1
cs_ef2a_imon=3.17833E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10627E0
os_ef2alow_imon=-2.58632E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.72495E-1
os_ef2bup_imon=-5.34029E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10597E1
os_restr2_imon=3.54038E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31948E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.28567E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.0877E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.0798E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.09004E-8
olens1_vset=-9.9E-1
olens1_vmon=-9.83429E-1
olens1_imon=9.85805E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09587E0
cs_ionaccel_imon=-2.08326E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.472E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56148E1
einzel_imon=7.60338E-6
window_vset=0.0E0
window_vmon=1.56268E-1
window_imon=-1.06245E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39216E-4
mask2_vset=0.0E0
mask2_vmon=-1.86185E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.47219E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.5466E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.15998E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62724E0
defgridb_imon=6.05809E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33382E1
os_fil1_imon=9.58614E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07225E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64273E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=1.00549E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6411E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65863E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.7138E-2
os_fil2_imon=-2.80503E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80941E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.94236E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37105E-1
cs_fil2_imon=-2.63979E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.91541E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22514E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.70015E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.45323E-1
res40_imon=-2.65976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16607E-1	-7.98321E-1	-9.13091E0	-9.14171E0	5.76973E-3	9.32932E-2	2.73399E1	-3.26856E1	-3.26667E1	2.68007E1	1.69654E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.01372E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16512E-1	-7.98011E-1	-9.13107E0	-9.14183E0	5.76973E-3	9.32217E-2	2.73565E1	-3.26762E1	-3.26187E1	2.68213E1	1.69875E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00847E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16584E-1	-7.98249E-1	-9.13131E0	-9.14159E0	5.67436E-3	9.30786E-2	2.72786E1	-3.26938E1	-3.26313E1	2.68209E1	1.69731E-7	2.52697E-3	2.52697E-3	6.32418E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.16727E-1	-7.9813E-1	-9.13124E0	-9.1419E0	5.6982E-3	9.32455E-2	2.7337E1	-3.26685E1	-3.25995E1	2.6804E1	1.69725E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.98322E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.16631E-1	-7.98035E-1	-9.13124E0	-9.14166E0	5.81741E-3	9.33409E-2	2.73051E1	-3.26615E1	-3.26446E1	2.67926E1	1.69723E-7	2.51814E-3	2.51814E-3	6.29157E-3	1.98727E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.1656E-1	-7.98249E-1	-9.13117E0	-9.14197E0	5.50747E-3	9.30309E-2	2.72811E1	-3.26296E1	-3.26494E1	2.6798E1	1.70023E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16441E-1	-7.9813E-1	-9.13131E0	-9.14202E0	5.65052E-3	9.3317E-2	2.73316E1	-3.26773E1	-3.26296E1	2.67839E1	1.69802E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00673E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16584E-1	-7.98059E-1	-9.13126E0	-9.1419E0	5.60284E-3	9.32217E-2	2.72467E1	-3.26614E1	-3.26632E1	2.68106E1	1.69802E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.00499E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16655E-1	-7.98273E-1	-9.13131E0	-9.14173E0	5.93662E-3	9.31263E-2	2.72733E1	-3.2697E1	-3.26003E1	2.67902E1	1.69653E-7	2.52599E-3	2.52599E-3	6.29665E-3	1.9917E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.16584E-1	-7.98583E-1	-9.13112E0	-9.14178E0	5.79357E-3	9.35316E-2	2.73345E1	-3.26825E1	-3.26146E1	2.67842E1	1.69802E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16679E-1	-7.98106E-1	-9.13107E0	-9.14176E0	5.8651E-3	9.33647E-2	2.72955E1	-3.26789E1	-3.26038E1	2.68142E1	1.69731E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.00285E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.17013E-1	-7.98321E-1	-9.13155E0	-9.14187E0	5.48363E-3	9.32455E-2	2.7352E1	-3.26795E1	-3.26152E1	2.68004E1	1.69725E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.9985E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16774E-1	-7.98416E-1	-9.1316E0	-9.14192E0	5.126E-3	9.32217E-2	2.73387E1	-3.26963E1	-3.2641E1	2.68178E1	1.69728E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.00151E-1
1.7E1	1.7E1	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.1687E-1	-7.98202E-1	-9.13122E0	-9.14183E0	5.4121E-3	9.30548E-2	2.73177E1	-3.26518E1	-3.26663E1	2.67908E1	1.69581E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99803E-1
1.8E1	1.06E2	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.1656E-1	-7.98392E-1	-9.13126E0	-9.14185E0	5.24521E-3	9.31263E-2	2.72927E1	-3.26526E1	-3.26272E1	2.68016E1	1.69802E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16727E-1	-7.98345E-1	-9.13141E0	-9.14214E0	5.43594E-3	9.30071E-2	2.73201E1	-3.26368E1	-3.26314E1	2.68166E1	1.69654E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.99456E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16917E-1	-7.98035E-1	-9.13143E0	-9.14187E0	5.53131E-3	9.28402E-2	2.73069E1	-3.26531E1	-3.26307E1	2.67884E1	1.69654E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.1687E-1	-7.97892E-1	-9.13131E0	-9.14218E0	5.79357E-3	9.29356E-2	2.73141E1	-3.26573E1	-3.26134E1	2.68076E1	1.69798E-7	2.52707E-3	2.52707E-3	6.33977E-3	2.00534E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16846E-1	-7.97868E-1	-9.13131E0	-9.1418E0	5.24521E-3	9.28402E-2	2.72915E1	-3.26573E1	-3.26396E1	2.67968E1	1.70023E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.99977E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16917E-1	-7.97844E-1	-9.13155E0	-9.14199E0	5.4121E-3	9.31025E-2	2.72997E1	-3.26627E1	-3.26356E1	2.68046E1	1.70015E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00021E-1